GAS ENTRAINMENT DURING JETTING OF FLUID FOR TEMPERATURE CONTROL IN CHEMICAL MECHANICAL POLISHING

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE POLISHING MEMBER

Jet propulsion pipeline polishing equipment

Single-point diamond dresser for grinding wheel based on acoustic emission online monitoring

Dressing apparatus and dressing method for substrate rear surface polishing member

Burnishing tool and method of manufacturing the same

Apparatus for machining a workpiece with a tool having a fluid feed apparatus, and a method for setting up such an apparatus

Chemical-mechanical wafer polishing device

Programmable coolant nozzle system for grinding

GRINDING APPARATUS FOR A SUBSTRATE

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND CHEMICAL MECHANICAL POLISHING METHOD

Method and apparatus for CMP conditioning

Method of phasing threaded grinding stone, as well as device therefor

METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC RECORDING MEDIUM

Pad conditioner and method

GRINDING METHOD, GRINDING DEVICE AND ELECTRODE THEREFOR

Coherent jet nozzles for grinding applications

Polishing method

Method to shape the surface of chemical mechanical polishing pads