ClassID:

44527

B24B9/065 - CPC Classification

Classification description:

Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Recent Application in this class:
#1
20260124709
2026-05-07

EDGE POLISHING DRUM OF WAFER, EDGE POLISHING EQUIPMENT INCLUDING THE SAME, AND METHOD FOR POLISHING EDGE OF WAFER

#2
20260123317
2026-04-30

METHOD OF PROCESSING WAFER AND METHOD OF MANUFACTURING PROCESSED WAFER

#3
20260077444
2026-03-19

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS

#4
20260063568
2026-03-05

SYSTEMS AND METHODS FOR PROCESSING SEMICONDUCTOR WAFERS USING FRONT-END PROCESSED WAFER GLOBAL GEOMETRY METRICS

#5
20260008157
2026-01-08

EDGE POLISHING DRUM FOR WAFERS AND EDGE POLISHING EQUIPMENT FOR WAFERS INCLUDING THE SAME

#6
20250296191
2025-09-25

WAFER EDGE POLISHING DRUM AND WAFER EDGE POLISHING EQUIPMENT INCLUDING THE SAME

#7
20250282017
2025-09-11

POLISHING APPARATUS, POLISHING METHOD, AND POLISHING HEAD

#8
20250262707
2025-08-21

GRINDING APPARATUS

#9
20250239443
2025-07-24

WORKPIECE PROCESSING METHOD AND PROCESSING APPARATUS

#10
20250222553
2025-07-10

WORKPIECE PROCESSING METHOD

#11
20250178148
2025-06-05

GRINDING METHOD

#12
20250153300
2025-05-15

WORKPIECE EDGE GRINDING MACHINE AND METHOD

#13
20250069625
2025-02-27

CHAMFER FORMATION ON DATA STORAGE DISC SUBSTRATES

#14
20240429087
2024-12-26

CHUCK TABLE AND EDGE TRIMMING APPARATUS

#15
20240416479
2024-12-19

POLISHING APPARATUS AND POLISHING METHOD

#16
20240304455
2024-09-12

CHEMICAL MECHANICAL POLISHING APPARATUS

#17
20240165765
2024-05-23

METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER

#18
20240120215
2024-04-11

METHOD OF PROCESSING WAFER AND WAFER PROCESSING APPARATUS

#19
20240051078
2024-02-15

APPARATUS FOR FILM REMOVAL

#20
20230415293
2023-12-28

METHOD OF FORMING TRUER

#21
20230339069
2023-10-26

System and method for processing silicon wafers

#22
20230211449
2023-07-06

DEVICE FOR POLISHING OUTER PERIPHERY OF WAFER

#23
20230050442
2023-02-16

SYSTEMS AND METHODS FOR PROCESSING SEMICONDUCTOR WAFERS USING FRONT-END PROCESSED WAFER GLOBAL GEOMETRY METRICS

#24
20230047412
2023-02-16

SYSTEMS AND METHODS FOR PROCESSING SEMICONDUCTOR WAFERS USING FRONT-END PROCESSED WAFER EDGE GEOMETRY METRICS

#25
20220339754
2022-10-27

POLISHING METHOD

#26
20220293425
2022-09-15

Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device

#27
20220234160
2022-07-28

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#28
20220184768
2022-06-16

EDGE TRIMMING METHOD

#29
20220013352
2022-01-13

Cleaning module, substrate processing apparatus including cleaning module, and cleaning method

#30
20210402562
2021-12-30

Substrate processing apparatus and substrate processing method

#31
20210362285
2021-11-25

Substrate processing apparatus, polishing head, and substrate processing method

#32
20210327718
2021-10-21

Method of helical chamfer machining silicon wafer

#33
20210237221
2021-08-05

Substrate processing apparatus and substrate processing method

#34
20210123843
2021-04-29

Method for preparing silicon carbide wafer and silicon carbide wafer

#35
20210086323
2021-03-25

Polishing device

#36
20200240929
2020-07-30

Method for evaluating edge shape of silicon wafer, apparatus for evaluating thereof, silicon wafer, method for selecting and method for manufacturing thereof

#37
20200198084
2020-06-25

Wafer grinding wheel

#38
20200070304
2020-03-05

Grinding method and OGS substrate

#39
20200066507
2020-02-27

Method and apparatus for manufacturing semiconductor device

#40
20200043746
2020-02-06

Chemical mechanical polishing apparatus

#41
20200023490
2020-01-23

POLISHING APPARATUS AND POLISHING METHOD FOR POLISHING A PERIPHERY OF A SUBSTRATE

#42
20200023486
2020-01-23

Polishing apparatus and polishing method

#43
20200020823
2020-01-16

LED wafer processing method

#44
20200004093
2020-01-02

Display device and method for manufacturing the same

#45
20190390335
2019-12-26

Substrate processing apparatus and substrate processing method

#46
20190385834
2019-12-19

SUBSTRATE PROCESSING METHOD

#47
20190348270
2019-11-14

Method of polishing silicon wafer including notch polishing process and method of producing silicon wafer

#48
20190345635
2019-11-14

Chamfered silicon carbide substrate and method of chamfering

#49
20190299354
2019-10-03

Wafer edge polishing apparatus and method

#50
20190217438
2019-07-18

Substrate processing apparatus and control method

#51
20190206693
2019-07-04

Method for wafer trimming

#52
20190148125
2019-05-16

Apparatus and method for processing a surface of a substrate

#53
20190054589
2019-02-21

Polishing method and polishing apparatus

#54
20180342398
2018-11-29

Wafer processing method

#55
20180277401
2018-09-27

Substrate processing method and apparatus

#56
20180264626
2018-09-20

Abrasive rotary tool with abrasive agglomerates

#57
20180250793
2018-09-06

Flexible abrasive rotary tool

#58
20180169822
2018-06-21

Polishing apparatus and polishing method

#59
20180169820
2018-06-21

Polishing apparatus and pressing pad for pressing polishing tool

#60
20180136560
2018-05-17

Stepped wafer and method for manufacturing stepped wafer

#61
20180133861
2018-05-17

Polishing apparatus and polishing method

#62
20180101071
2018-04-12

Rubbing alignment method and apparatus

#63
20180079130
2018-03-22

Rectangular substrate for imprint lithography and making method

#64
20180079053
2018-03-22

Grinding method, OGS substrate and manufacturing method of OGS mother substrate

#65
20180076043
2018-03-15

Substrate processing method and substrate processing apparatus

#66
20170330783
2017-11-16

Vacuum chuck, beveling/polishing device, and silicon wafer beveling/polishing method

#67
20170312879
2017-11-02

Polishing apparatus for detecting abnormality in polishing of a substrate

#68
20170301533
2017-10-19

Method for processing semiconductor wafer, method for manufacturing bonded wafer, and method for manufacturing epitaxial wafer

#69
20170291273
2017-10-12

Polishing apparatus and polishing method

#70
20170256391
2017-09-07

Silicon carbide single crystal substrate and method for manufacturing the same

#71
20170253991
2017-09-07

Method for growing monocrystalline silicon and monocrystalline silicon ingot prepared thereof

#72
20170221697
2017-08-03

Method for manufacturing SiC epitaxial wafer and SiC epitaxial wafer

#73
20170216989
2017-08-03

Polishing apparatus

#74
20170165804
2017-06-15

Polishing apparatus and polishing method

#75
20170151646
2017-06-01

Calibration apparatus and calibration method

#76
20170136572
2017-05-18

SiC substrate separating method

#77
20170125237
2017-05-04

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

#78
20170103900
2017-04-13

METHOD FOR FORMING WAFER

#79
20170100813
2017-04-13

Polishing method of polishing a substrate

#80
20170084879
2017-03-23

Method for cutting display panel

#81
20170072528
2017-03-16

Polishing apparatus and polishing method

#82
20170011903
2017-01-12

Method for manufacturing semiconductor wafer

#83
20160305022
2016-10-20

Substrate processing apparatus and substrate processing method

#84
20160300708
2016-10-13

Chamfering apparatus and method for manufacturing notchless wafer

#85
20160297048
2016-10-13

Wafer polishing apparatus

#86
20160190023
2016-06-30

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

#87
20160114455
2016-04-28

Apparatus for detecting abnormality in polishing of a substrate

#88
20160096250
2016-04-07

Adjusting a substrate polishing condition

#89
20160067843
2016-03-10

Electronic grade glass substrate and making method

#90
20160052193
2016-02-25

Rectangular substrate for imprint lithography and making method

#91
20160052107
2016-02-25

Polishing method

#92
20160005635
2016-01-07

Attachment method

#93
20160004011
2016-01-07

Method for polishing photonic chips

#94
20150352682
2015-12-10

Polishing apparatus

#95
20150321312
2015-11-12

Modifying substrate thickness profiles

#96
20150306726
2015-10-29

Edge finishing apparatus

#97
20150298280
2015-10-22

Polishing apparatus and polishing method

#98
20150283664
2015-10-08

Outer periphery polishing apparatus for disc-shaped workpiece

#99
20150266155
2015-09-24

METHOD FOR PRODUCING POLISHED-ARTICLE

#100
20150258651
2015-09-17

Electric sharpener for ceramic and metal blades

#101
20150235858
2015-08-20

Wafer back-side polishing system and method for integrated circuit device manufacturing processes

#102
20150221729
2015-08-06

Silicon carbide single-crystal substrate

#103
20150162409
2015-06-11

Silicon carbide single-crystal substrate

#104
20150162181
2015-06-11

Semiconductor wafer manufacturing method

#105
20150151398
2015-06-04

Polishing apparatus and polishing method

#106
20150104620
2015-04-16

Polishing apparatus and polishing method

#107
20150101752
2015-04-16

Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus

#108
20150099428
2015-04-09

Dicing Device and Dicing Method

#109
20150093967
2015-04-02

Method for grinding workpieces, in particular for centering grinding of workpieces such as optical lenses

#110
20150087210
2015-03-26

Polishing apparatus

#111
20150065015
2015-03-05

Rubbing device and rubbing method

#112
20140242885
2014-08-28

Polishing apparatus and polishing method

#113
20140213155
2014-07-31

Wafer polishing method

#114
20140213154
2014-07-31

Polishing apparatus

#115
20140213153
2014-07-31

Wafer polishing tool using abrasive tape

#116
20140213152
2014-07-31

Wafer edge trimming tool using abrasive tape

#117
20140206262
2014-07-24

POLISHING APPARATUS AND METHOD OF POLISHING SEMICONDUCTOR WAFER

#118
20140187128
2014-07-03

Method and apparatus for cleaning grinding work chuck using a vacuum

#119
20140187126
2014-07-03

Polishing apparatus and polishing method

#120
20140127973
2014-05-08

Adjusting a substrate polishing condition

#121
20140117380
2014-05-01

Flat SiC semiconductor substrate

#122
20140094095
2014-04-03

Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction

#123
20140087627
2014-03-27

Method of detecting abnormality in polishing of a substrate and polishing apparatus

#124
20140080394
2014-03-20

Beveling grindstone

#125
20140080382
2014-03-20

Grinding apparatus and method for fabrication of liquid crystal display device

#126
20140073228
2014-03-13

SILICON CARBIDE SINGLE-CRYSTAL SUBSTRATE AND METHOD FOR MANUFACTURING SAME

#127
20140073223
2014-03-13

Method and apparatus for wafer backgrinding and edge trimming on one machine

#128
20140051336
2014-02-20

Grinding wheel for wafer edge trimming

#129
20130344775
2013-12-26

WAFER PROCESSING METHOD

#130
20130273810
2013-10-17

Method and system for finishing glass sheets

#131
20130264584
2013-10-10

Silicon carbide single-crystal substrate and method for manufacturing same

#132
20130237402
2013-09-12

SAPPHIRE MATERIAL AND PRODUCTION METHOD THEREOF

#133
20130101790
2013-04-25

Electronic grade glass substrate and making method

#134
20130078810
2013-03-28

Method and apparatus for performing a polishing process in semiconductor fabrication

#135
20130005222
2013-01-03

Glass edge finishing method

#136
20120315739
2012-12-13

MANUFACTURING METHOD FOR SEMICONDUCTOR WAFER

#137
20120252320
2012-10-04

Polishing apparatus and polishing method

#138
20120244787
2012-09-27

Polishing apparatus and polishing method

#139
20120233930
2012-09-20

Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same

#140
20120225610
2012-09-06

METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM GLASS SUBSTRATE

#141
20120208437
2012-08-16

Polishing apparatus and polishing method

#142
20120202406
2012-08-09

Apparatus and method for surface grinding and edge trimming workpieces

#143
20120135668
2012-05-31

Method of polishing a substrate using a polishing tape having fixed abrasive

#144
20120135181
2012-05-31

SUBSTRATE STRUCTURE AND PANEL STRUCTURE

#145
20120103937
2012-05-03

METHOD OF MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC STORAGE MEDIUM

#146
20120100785
2012-04-26

METHOD FOR CHAMFERING WAFER

#147
20120045968
2012-02-23

Substrate polishing method and device

#148
20120028555
2012-02-02

Grinding Tool For Trapezoid Grinding Of A Wafer

#149
20120025353
2012-02-02

Semiconductor and solar wafers

#150
20120009854
2012-01-12

Edge finishing apparatus

#151
20110318994
2011-12-29

Method of preparing an edge-strengthened article

#152
20110297959
2011-12-08

Chamfered freestanding nitride semiconductor wafer and method of chamfering nitride semiconductor wafer

#153
20110294406
2011-12-01

WAFER POLISHING APPARATUS

#154
20110256815
2011-10-20

Method for polishing silicon wafer, method for producing silicon wafer, apparatus for polishing disk-shaped workpiece, and silicon wafer

#155
20110256811
2011-10-20

POLISHING METHOD

#156
20110237164
2011-09-29

Polishing apparatus, polishing method and pressing member for pressing a polishing tool

#157
20110223839
2011-09-15

Grinder, grinding method using the grinder, manufacturing method of display device using the grinding method, and display device manufactured by the manufacturing method

#158
20110207294
2011-08-25

Method for manufacturing semiconductor device

#159
20110165825
2011-07-07

Polishing apparatus

#160
20110154590
2011-06-30

Wafer edge cleaning

#161
20110136411
2011-06-09

Method and apparatus for polishing a substrate having a grinded back surface

#162
20110062115
2011-03-17

Composition and method for polishing bulk silicon

#163
20110034106
2011-02-10

Polishing apparatus

#164
20110003540
2011-01-06

POLISHING APPARATUS

#165
20110003537
2011-01-06

Polishing apparatus and polishing method

#166
20100330885
2010-12-30

Method for polishing the edge of a semiconductor wafer

#167
20100317265
2010-12-16

Chamfering apparatus for chamfering glass substrates

#168
20100304643
2010-12-02

Grinding apparatus and method for fabrication of liquid crystal display device

#169
20100285726
2010-11-11

Method for manufacturing a glass substrate for a magnetic disc

#170
20100266874
2010-10-21

Method of surface-finishing glass substrate for magnetic disks and glass substrate for magnetic disks

#171
20100255757
2010-10-07

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#172
20100190416
2010-07-29

Device for polishing the edge of a semiconductor substrate

#173
20100178851
2010-07-15

POLISHING APPARATUS AND POLISHING METHOD

#174
20100136886
2010-06-03

Polishing apparatus and substrate processing apparatus

#175
20100112909
2010-05-06

METHOD OF AND APPARATUS FOR ABRADING OUTER PERIPHERAL PARTS OF A SEMICONDUCTOR WAFER

#176
20100105299
2010-04-29

METHODS AND APPARATUS FOR POLISHING AN EDGE AND/OR NOTCH OF A SUBSTRATE

#177
20100105294
2010-04-29

METHODS AND APPARATUS TO MINIMIZE THE EFFECT OF TAPE TENSION IN ELECTRONIC DEVICE POLISHING

#178
20100105291
2010-04-29

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE

#179
20100096728
2010-04-22

Nitride semiconductor substrate and method of fabricating the same

#180
20100022166
2010-01-28

Substrate processing apparatus

#181
20100006982
2010-01-14

METHOD OF PRODUCING SEMICONDUCTOR WAFER

#182
20090324896
2009-12-31

Chamfering apparatus for silicon wafer, method for producing silicon wafer, and etched silicon wafer

#183
20090311522
2009-12-17

Wafer polishing method and wafer produced thereby

#184
20090275269
2009-11-05

Wafer polishing device and method

#185
20090264053
2009-10-22

APPARATUS AND METHODS FOR USING A POLISHING TAPE CASSETTE

#186
20090227189
2009-09-10

Polishing apparatus

#187
20090227187
2009-09-10

Apparatus for polishing edge surface of glass substrate for magnetic recording media, and process for producing glass substrate

#188
20090218659
2009-09-03

Chamfered freestanding nitride semiconductor wafer and method of chamfering nitride semiconductor wafer

#189
20090176444
2009-07-09

Wafer polishing method and apparatus

#190
20090170406
2009-07-02

Wafer production method

#191
20090163119
2009-06-25

Method for machining chamfer portion of semiconductor wafer and method for correcting groove shape of grinding stone

#192
20090156104
2009-06-18

Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same

#193
20090142992
2009-06-04

Polishing apparatus and polishing method

#194
20090142916
2009-06-04

APPARATUS AND METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT

#195
20090130960
2009-05-21

Method For Producing A Semiconductor Wafer With A Polished Edge

#196
20090124174
2009-05-14

Substrate treating method and substrate treating apparatus

#197
20090117828
2009-05-07

Polishing apparatus and substrate processing apparatus

#198
20090104853
2009-04-23

Method of manufacturing disk substrate

#199
20090098804
2009-04-16

Apparatus for polishing a wafer and method for detecting a polishing end point by the same

#200
20090093192
2009-04-09

Device for polishing peripheral edge of semiconductor wafer

#201
20090044831
2009-02-19

WAFER EDGE CLEANING

#202
20090042493
2009-02-12

Chamfering apparatus for chamfering glass substrates

#203
20090038743
2009-02-12

Method of manufacturing glass substrate

#204
20090036042
2009-02-05

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

#205
20090036039
2009-02-05

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

#206
20090036033
2009-02-05

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

#207
20090031511
2009-02-05

Wafer edge cleaning

#208
20090029629
2009-01-29

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

#209
20090029627
2009-01-29

POLISHING APPARATUS AND POLISHING METHOD

#210
20090017733
2009-01-15

SUBSTRATE PROCESSING APPARATUS

#211
20090017731
2009-01-15

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

#212
20090017730
2009-01-15

Polishing apparatus and polishing method

#213
20090004952
2009-01-01

Polishing apparatus and polishing method

#214
20080311827
2008-12-18

Chamfering apparatus, a grinding wheel, and a chamfering method

#215
20080293344
2008-11-27

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE USING A POLISHING PAD

#216
20080293341
2008-11-27

METHODS AND APPARATUS FOR USING A ROLLING BACKING PAD FOR SUBSTRATE POLISHING

#217
20080293340
2008-11-27

Methods and apparatus for removal of films and flakes from the edge of both sides of a substrate using backing pads

#218
20080293337
2008-11-27

METHODS AND APPARATUS FOR POLISHING A NOTCH OF A SUBSTRATE BY SUBSTRATE VIBRATION

#219
20080293336
2008-11-27

METHODS AND APPARATUS TO CONTROL SUBSTRATE BEVEL AND EDGE POLISHING PROFILES OF FILMS

#220
20080293335
2008-11-27

METHODS AND APPARATUS FOR SUBSTRATE EDGE POLISHING USING A POLISHING ARM

#221
20080293334
2008-11-27

METHODS AND APPARATUS FOR USING A BEVEL POLISHING HEAD WITH AN EFFICIENT TAPE ROUTING ARRANGEMENT

#222
20080293331
2008-11-27

METHODS AND APPARATUS FOR LOW COST AND HIGH PERFORMANCE POLISHING TAPE FOR SUBSTRATE BEVEL AND EDGE POLISHING IN SEMINCONDUCTOR MANUFACTURING

#223
20080293329
2008-11-27

METHODS AND APPARATUS FOR IDENTIFYING A SUBSTRATE EDGE PROFILE AND ADJUSTING THE PROCESSING OF THE SUBSTRATE ACCORDING TO THE IDENTIFIED EDGE PROFILE

#224
20080274670
2008-11-06

Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing Apparatus

#225
20080254719
2008-10-16

SUBSTRATE PROCESSING METHOD

#226
20080207093
2008-08-28

METHODS AND APPARATUS FOR CLEANING A SUBSTRATE EDGE USING CHEMICAL AND MECHANICAL POLISHING

#227
20080200100
2008-08-21

Substrate processing apparatus

#228
20080200097
2008-08-21

Polishing method and polishing apparatus

#229
20080188167
2008-08-07

Substrate processing apparatus

#230
20080182482
2008-07-31

GRINDING DEVICE AND METHOD OF GRINDING

#231
20080176488
2008-07-24

Grinding method of a disk-shaped substrate and grinding apparatus

#232
20080153400
2008-06-26

Chemical mechanical polishing apparatus

#233
20080153391
2008-06-26

Method of polishing a semiconductor wafer

#234
20080119115
2008-05-22

Polishing apparatus, polishing brush and manufacturing method of disk-shaped substrate

#235
20080113590
2008-05-15

Polishing method for semiconductor wafer and polishing apparatus for semiconductor wafer

#236
20080113510
2008-05-15

Semiconductor Wafer Fabricating Method and Semiconductor Wafer Mirror Edge Polishing Method

#237
20080113509
2008-05-15

Polishing method and polishing device

#238
20080096474
2008-04-24

Method for producing semiconductor wafer and semiconductor wafer

#239
20080036040
2008-02-14

Semiconductor wafers with highly precise edge profile and method for producing them

#240
20080026185
2008-01-31

Method for Polishing Silicon Wafer, Method for Producing Silicon Wafer, Apparatus for Polishing Disk-Shaped Workpiece, and Silicon Wafer

#241
20070298687
2007-12-27

APPARATUS AND METHOD FOR MODIFYING AN EDGE

#242
20070298240
2007-12-27

COMPRESSIBLE ABRASIVE ARTICLE

#243
20070287364
2007-12-13

Substrate processing method and substrate processing apparatus

#244
20070270084
2007-11-22

Method of Manufacturing Silicon Substrates for Magnetic Recording Medium, Silicon Substrate for Magnetic Recording Medium, Magnetic Recording Medium, and Magnetic Recording Apparatus

#245
20070254561
2007-11-01

Method of Polishing the Inner Peripheral End Surfaces of Substrates for a Recording Medium Using a Brush

#246
20070254192
2007-11-01

Method of polishing end surfaces of a substrate for a recording medium by a grain flow processing method

#247
20070249267
2007-10-25

Method of polishing the inner peripheral end surfaces of substrates for a recording medium using a brush

#248
20070238393
2007-10-11

METHODS AND APPARATUS FOR POLISHING AN EDGE OF A SUBSTRATE

#249
20070197144
2007-08-23

Wafer polishing apparatus

#250
20070196699
2007-08-23

Silicon substrate for magnetic recording medium, manufacturing method thereof, and magnetic recording medium

#251
20070178701
2007-08-02

Method of processing a substrate

#252
20070131654
2007-06-14

Methods and apparatus for processing a substrate

#253
20070131653
2007-06-14

Methods and apparatus for processing a substrate

#254
20070128990
2007-06-07

Semiconductor wafer polishing apparatus, and method of polishing semiconductor wafer

#255
20070082460
2007-04-12

WAFER PROCESSING METHOD AND WAFER PROCESSING APPARATUS

#256
20070066192
2007-03-22

Wafer-edge polishing system

#257
20070023395
2007-02-01

Production method for semiconductor wafer

#258
20070017900
2007-01-25

Semiconductor wafer and process for producing a semiconductor wafer

#259
20070000873
2007-01-04

Substrate processing method and semiconductor device manufacturing method

#260
20060252355
2006-11-09

Polishing tape and method

#261
20060228997
2006-10-12

Apparatus for polishing edge surface of glass substrate for magnetic recording media, and process for producing glass substrate

#262
20060194520
2006-08-31

Chamfered freestanding nitride semiconductor wafer and method of chamfering nitride semiconductor wafer

#263
20060189262
2006-08-24

Shaped polishing pads for beveling microfeature workpiece edges, and associated systems and methods

#264
20060189261
2006-08-24

Shaped polishing pads for beveling microfeature workpiece edges, and associated systems and methods

#265
20060094343
2006-05-04

Polishing machine

#266
20060084371
2006-04-20

Wafer chuck

#267
20060030242
2006-02-09

Shaped polishing pads for beveling microfeature workpiece edges, and associate system and methods

#268
20060019417
2006-01-26

Substrate processing method and substrate processing apparatus

#269
20060009136
2006-01-12

Fixed-abrasive chemical-mechanical planarization of titanium nitride

#270
20060009134
2006-01-12

Grinding wheel, grinding apparatus and grinding method

#271
20060006545
2006-01-12

Semiconductor structure and fabrication therefor

#272
20060003675
2006-01-05

Fixed-abrasive chemical-mechanical planarization of titanium nitride

#273
20050260933
2005-11-24

Polishing apparatus and method

#274
20050250423
2005-11-10

Method for manufacturing semiconductor device and polishing apparatus

#275
20050245174
2005-11-03

Method of processing a substrate

#276
20050227591
2005-10-13

Processing tool, method of producing processing tool, processing method and processing apparatus

#277
20050221615
2005-10-06

Method of processing a substrate

#278
20050199588
2005-09-15

Fixed-abrasive chemical-mechanical planarization of titanium nitride

#279
20050172430
2005-08-11

Wafer edge cleaning

#280
20050142882
2005-06-30

Semiconductor wafer manufacturing method and wafer

#281
20050124265
2005-06-09

Edge finishing process for glass or ceramic disks used in disk drive data storage devices

#282
20050123709
2005-06-09

Glass or ceramic disk which is not chemically strengthened for use in disk drive data storage devices

#283
20050112999
2005-05-26

Method of truing chamfering grindstone and chamfering device

#284
20050101230
2005-05-12

Clamping jig for glass substrate, buffer sheet, method for processing glass substrate, and glass substrate

#285
17496346
2024-12-03

Chamfer formation on data storage disc substrates