45033 ⎘
Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with apertures for inspecting the surface to be abraded
POLISHING APPARATUS AND POLISHING METHOD
#2Double-side polishing apparatus
#3Peak-based endpointing for chemical mechanical polishing
#4Processing end point detection method, polishing method, and polishing apparatus
#5Peak-based endpointing for chemical mechanical polishing
#6Wafer polishing method and double-side polishing apparatus
#7Processing end point detection method, polishing method, and polishing apparatus
#8Diagnostic Methods During CMP Pad Dressing and Associated Systems
#9Peak-based endpointing for chemical mechanical polishing
#10CHEMICAL MECHANICAL POLISHING WITH NAPPED POROMERIC
#11REDUCING POLISHING PAD DEFORMATION
#12Chemical mechanical polishing apparatus with rotating belt
#13Grinding disc for grinding machines
#14CMP pad having a streamlined windowpane
#15Grinding or polishing arrangement
#16Apparatuses and methods for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies
#17Grinding or polishing arrangement
#18Detection system for chemical-mechanical planarization tool