52768 ⎘
Producing optical elements, e.g. lenses or prisms; Production of simple or compound lenses; Production of microlenses Producing solid immersion lenses [SIL]
Annular solid immersion lenses and methods of making them
#2Microfabricated lenses, method of manufacture thereof, and applications therefor
#3Solid immersion lens structures and methods for producing solid immersion lens structures