Method and Device for Measuring a Voltage

MEMS DEVICE

Zero Power Micro-Chemomechanical Hydrogen Sensor

MEMS DEVICE WITH RESONATING STRUCTURE

MICRO-ELECTROMECHANICAL DEVICES

DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCTURE HAVING IMPROVED MECHANICAL ROBUSTNESS

STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AND FABRICATION METHOD THEREOF

MEMS SWITCH AND ELECTRONIC DEVICE

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SYSTEMS

Vehicle Operator Awareness System

MEMS DEVICE AND ELECTRONIC DEVICE

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICAL ACTUATOR AND PRODUCTION METHOD THEREOF

STRAIN SENSOR SWITCH FOR TIMING BASED SENSING

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

MULTI-LEVEL MEMS PROCESS

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DEVICE

SYSTEMS AND METHODS FOR WAFER DIE ASSEMBLY BONDING

Radio frequency micro-electro-mechanical switch and radio frequency device

MEMS switch and manufacture method

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICES

MEMS SOUND TRANSDUCER

MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC REFLECTOR TRENCHES

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

Piezoelectric anti-stiction structure for microelectromechanical systems

COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR

A SCANNING MEMS MIRROR DEVICE

MEMS MIRROR AND MEMS MIRROR ARRAY SYSTEM

MICROMECHANICAL DEVICE

CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE

MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-STATE SEMICONDUCTOR PROCESS

Micro-electromechanical system package having movable platform

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

Piezoelectric anti-stiction structure for microelectromechanical systems

MEMS phase shifter including a substrate with a coplanar waveguide signal structure formed thereon and electrically insulated from a metal film bridge

Anti-stiction enhancement of ruthenium contact

MEMS microphone and MEMS accelerometer on a single substrate

CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

Method for producing a microelectromechanical sensor and microelectromechanical sensor

Vibrating element

SEMICONDUCTOR CHIP

Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement

Vehicle operator awareness system

Piezoelectric anti-stiction structure for microelectromechanical systems

Sensor package having a movable sensor

Silicon carbide structure, device, and method

Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current

Sensor package having a movable sensor

Fence structure to prevent stiction in a MEMS motion sensor

Silicon carbide microelectromechanical structure, device, and method

MEMS bridge devices and methods of manufacture thereof

Micromechanical sensor that includes a stress decoupling structure

Sensor package having a movable sensor

Manufacturing method of sensor package

Reflective device

Micromechanical spring structure

Fence structure to prevent stiction in a MEMS motion sensor

Trench-based microelectromechanical transducer and method for manufacturing the microelectromechanical transducer

Connection Panel for Electronic Components

MEMS strain gauge sensor and manufacturing method

MEMS pressure gauge sensor and manufacturing method

SILICON CARBIDE STRUCTURE, DEVICE, AND METHOD

Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current

Optical circuit switch mirror array crack protection

Flexible membrane

MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same

Movable reflection device and reflection surface drive system utilizing same

INERTIA SENSOR

Integrating MEMS structures with interconnects and vias

Silicon carbide microelectromechanical structure, device, and method

High displacement ultrasonic transducer

Material structure and method for deep silicon carbide etching

Optical scanning apparatus having pivoting reflector and piezoelectric element

Electric connection flexures

Scanning mirror device and a method for manufacturing it

Self-powered piezoelectric energy harvesting microsystem

Accelerometer sensor system

MEMS device and process

MEMS sensor with voltage sensing of movable mass

SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

Ultra low power thermally-actuated oscillator and driving circuit thereof

MEMS device

Sensor including moving masses and means for detecting relative movements of the masses

Inertial sensor with nested seismic masses and method for manufacturing such a sensor

Translating Z axis accelerometer

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

MEMS electrostatic actuator device for RF varactor applications

MEMS capacitive pressure sensors

Inertial sensor

Two-state charge-pump control-loop for MEMS DVC control

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

Micromechanical structure and method for fabricating the same

Micro-electro-mechanical system (MEMS) structures and design structures

High displacement ultrasonic transducer

Actuator

Device comprising a strained germanium membrane

High-output MEMS accelerometer

Production of micro-mechanical devices

MEMS electrostatic actuator

Micro-electro mechanical apparatus with PN-junction

Spring-mass system with a small transverse displacement

Actuator, optical scanner, and image forming apparatus

Vibration device including support portion

Micromirror

Micro-electro-mechanical system (MEMS) structures and design structures

Functional device, electronic apparatus, and moving object

Physical quantity sensor having an elongated groove, and manufacturing method thereof

Self-powered piezoelectric energy harvesting microsystem

MEMS device and methods for manufacturing and using same

Light deflector with plate-like mirror forming a base of a recess in a movable member and a mass body on a non-deflecting surface of the mirror to adjust a resonent frequency of the movable member

Device comprising a vibratably suspended optical element

Device comprising a spring and an element suspended thereon, and method for manufacturing same

MEMS scanning micromirror

MEMS scanning micromirror

Merged legs and semi-flexible anchoring having cantilevers for MEMS device

Miniaturized sensor comprising a heating element, and associated production method

Mechanical component and manufacturing method for a mechanical component

Electromechanical systems device with protrusions to provide additional stable states

Reflective device to scan light to project an image on a display surface

Semiconductor manufacturing and semiconductor device with semiconductor structure

Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly

Light deflector

Vibrating element having meandering shape, and optical reflection element

Electrostatic force generator and force measurement system and accelerometer having the same

Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device

Method and apparatus for building three-dimensional MEMS elements

Method and apparatus for building three-dimensional MEMS elements

Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same

Micro-electro-mechanical system (MEMS) structures and design structures

Microelectromechanical system device with electrical interconnections and method for fabricating the same

Thin semiconductor die package

RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS

Electromechanical system structures with ribs having gaps

Method of manufacturing a switch system

Nano-electro-mechanical system (NEMS) structures with actuatable semiconductor fin on bulk substrates

Microelectromechanical system with a center of mass balanced by a mirror substrate

Nanoelectromechanical Structures Exhibiting Tensile Stress And Techniques For Fabrication Thereof

Micro-electro-mechanical systems (MEMS)

METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES

Actuator, optical scanner, and image forming apparatus

Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same

MEMS and method of manufacturing the same

MEMS device and methods for manufacturing and using same

TREATMENT SOLUTION FOR PREVENTING PATTERN COLLAPSE IN METAL FINE STRUCTURE BODY, AND PROCESS FOR PRODUCTION OF METAL FINE STRUCTURE BODY USING SAME

Capacitance type MEMS sensor

Three-dimensional microstructures having a re-entrant shape aperture and methods of formation

Film stress management for MEMS through selective relaxation

Actuator, protective cover for actuator, actuator manufacturing method, and optical deflector incorporating actuator, and two dimensional optical scanner and image projector incorporating optical scanner

Magnetically actuated micro-electro-mechanical capacitor switches in laminate

Semiconductor manufacturing and semiconductor device with semiconductor structure

Microstructure with an enhanced anchor

Microstructure device with an improved anchor

Film stress management for MEMS through selective relaxation

High impact resistant acceleration sensor

MEMS MICROPHONE AND MANUFACTURING METHOD THEREOF

Micromechanical component and manufacturing method for a micromechanical component

Connecting structure for micromechanical oscillating devices

Patterned nanowires

Micromechanical element

Constrained oxidation of suspended micro- and nano-structures

Moving structure and micro-mirror device using the same

Electrostatic actuator including a plurality of urging units with varying rigities

Micro electro mechanical system

Manufacturing method for a micromechanical component and micromechanical component

Systems and Methods for Resonance Frequency Tuning of Micromachined Structures

MEMs devices

Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby

MEMS resonator structure including regions with different densities and method

Method for fabricating a multilayer microstructure with balancing residual stress capability

Micromechanical component having a swiveling part and method for producing same

Sensor and method for its production

Method for releasing the suspended structure of a NEMS and/or NEMS component

Optical scanner

CARBON NANOTUBE ASSEMBLY

Micro scanner device and method for controlling micro scanner device

MEMS sensor, method of manufacturing MEMS sensor, and electronic apparatus

Micro-structure

Nanowire sensor device

MEMS element and method of manufacturing the same

Patterning methods for stretchable structures

Three-dimensional microstructures and methods of formation thereof

Fabrication of suspended carbon micro and nanoscale structures

Microelectromechanical system package with strain relief bridge

Vibrating mirror element

Sensor having improved thermal stability

Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”

Oscillating, deflectable micromechanical element and method for use thereof

Semiconductor device with reduced sensitivity to package stress

Acceleration sensor resistant to excessive force breakage

MICRO MIRRORS HAVING IMPROVED HINGES

TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED

Electronic part with affixed MEMS

Bottom-up assembly of structures on a substrate

Micromechanical device and method of manufacturing micromechanical device

Method of fabricating reflective mirror by wet-etch using improved mask pattern and reflective mirror fabricated using the same

Method for producing a multilayer piezoelectric microcomponent using sacrificial thick film technology

MEMS resonator structure and method

SOI substrate and semiconductor acceleration sensor using the same

Micro-oscillating element and method of making the same

MEMS element, MEMS device and MEMS element manufacturing method

Carbon nanotube MEMS assembly

Movable device

Micromechanical component, method for fabrication and use

Shock resistant and mode mixing resistant torsional hinged device

Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards

Micro-electro-mechanical system micro mirror

Micro-electro-mechanical systems device

Three-dimensional microstructures having an embedded support member with an aperture therein and method of formation thereof

Apparatus, method and system for providing enhanced mechanical protection of thin beams

Piezoresistive sensing structure

Carbon nanotube based compliant mechanism

NON-CONTACT MICRO MIRRORS

Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures

Sacrificial spacer process and resultant structure for MEMS support structure

Forming a sacrificial layer in order to realise a suspended element

MICROMECHANICAL COMPONENT

Method for forming a hermetically sealed cavity

Reflective spatial light modulator with high stiffness torsion spring hinge

6-axis electromagnetically-actuated meso-scale nanopositioner

Triaxial membrane accelerometer

CONDENSER MICROPHONE

Sensor elements with cantilevered bar structures made of semiconductors based on group III-nitride

Micromirror and micromirror device

Method for producing a nanostructure such as a nanoscale cantilever

Oscillating system and optical deflector

Process for manufacturing thick suspended structures of semiconductor material

Micro-mechanical beam protective support structures wherein at least two adjacent support structures touch each other upon reaching a predetermined bending action

Fast-response micro-mechanical devices

Excitation in micromechanical devices

Manufacturing methods for MEMS element and optical modulator

Resonant optical scanner using vibrating body with optimized resonant frequency characteristics and image forming apparatus having the same

MEMS element having a dummy pattern

Spatial light modulator multi-layer mirror plate

Torsional hinged MEMS device

Quantum tunnelling transducer device

Piezoresistive sensing structure

Micro-oscillating element and method of making the same

Method of fabricating a structure in a material

Mems element and method of producing the same, and diffraction type mems element

Micromechanical component and suitable method for its manufacture

Structure and method for reducing thermal stresses on a torsional hinged device

Micro-mirror with rotor structure

Method of making a microelectromechanical (MEM) device using porous material as a sacrificial layer

Ultra-flat reflective MEMS optical elements

Microelectromechanical (MEM) device including a spring release bridge and method of making the same

Systems and methods for amorphous flexures in micro-electro mechanical systems

Method for manufacturing a micromechanical sensor element

MOS transistor with a deformable gate

Scanning device and fabrication method thereof

Micromechanical actuator with multiple-plane comb electrodes and methods of making

Method for fabricating vertical offset structure

Micromechanical device and method of manufacture thereof

Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth

Micro-actuator utilizing electrostatic and lorentz forces, and micro-actuator device, optical switch and optical switch array using the same

Enhancement of fabrication yields of nanomechanical devices by thin film deposition

Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit

Micro mirror device with adjacently suspended spring and method for the same

Micromechanical actuator with multiple-plane comb electrodes and methods of making

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures

Optical scanning using vibratory diffraction gratings

Micro-oscillating element provided with torsion bar

Sensor

Microelectricalmechanical system with improved beam suspension

Unilateral thermal buckle beam actuator

MEMS mirror device and optical disk apparatus

Detection of force applied by pick-up tool for transferring semiconductor devices