Method for manufacturing MEMS torsional electrostatic actuator

MEMS resonator

MEMS anti-phase vibratory gyroscope

Metallizing MEMS devices

Small wafer area MEMS switch

Planar cavity MEMS and related structures, methods of manufacture and design structures

MEMS hinges with enhanced rotatability

Very low power microelectromechanical devices for the internet of everything

MEMS actuator package architecture

MEMS actuator package architecture

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Microelectromechanical device and system with low-impedance resistive transducer

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

MEMS electrostatic actuator device for RF varactor applications

Refractory seed metal for electroplated MEMS structures

Measuring device and method for determining mass and/or mechanical properties of a biological system

VIBRATION ANGULAR VELOCITY SENSOR

Planar cavity MEMS and related structures, methods of manufacture and design structures

Integrated semiconductor device and manufacturing method

Capacitive microelectromechanical device and method for forming a capacitive microelectromechanical device

SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME

Microstructure plating systems

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

Planar cavity MEMS and related structures, methods of manufacture and design structures

Micromechanical structure comprising carbon material and method for fabricating the same

MEMS sensor with high voltage switch

Process for manufacturing a microelectromechanical interaction system for a storage medium

Support pillar

Low-stress low-hydrogen LPCVD silicon nitride

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Bonded wafer structure having cavities with low pressure and method for forming

Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure

Micromechanical device with an actively deflectable element

MEMS having a cutout section on a concave portion between a substrate and a stationary member

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-Electro-Mechanical System (MEMS) structures and design structures

Acceleration sensor

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Method for manufacturing microcantilever

NEMS devices with series ferroelectric negative capacitor

Thin capping for MEMS devices

METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES IN SILICON NANOWIRES

Micro-electro-mechanical system device with enhanced structural strength

Electrostatically deflectable micromechanical device

Stress isolated differential pressure sensor

STRESS ISOLATED MEMS DEVICE WITH ASIC AS CAP

MEMS sensor cap with multiple isolated electrodes

Planar cavity MEMS and related structures, methods of manufacture and design structures

Stress isolation for MEMS device

Planar cavity MEMS and related structures, methods of manufacture and design structures

MEMS sensor including an over-travel stop and method of manufacture

Method to improve cantilever process performance

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure

MEMS structure with improved shielding and method

MEMS DEVICE

III-V nitride resonate structure based photoacoustic sensor

Micromechanical structure and method for fabricating the same

Micro-electro-mechanical system (MEMS) structures and design structures

Micromechanical component having a diaphragm structure

Micro-electro-mechanical system (MEMS) structures and design structures

Pressure-sensitive sensor

MEMS sensor with dynamically variable reference capacitance

Glass wafer assembly

Methods and apparatus for MEMS devices with increased sensitivity

Fabrication of tungsten MEMS structures

MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT

Method and system for CMOS based MEMS bump stop contact damage prevention

Semiconductor structures provided within a cavity and related design structures

Method of forming surface protrusions on an article and the article with the protrusions attached

Nano-electromechanical switch

Torsional and lateral stiffness measurement

Polymer anchored microelectromechanical system (MEMS) cantilever and method of fabricating the same

Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method

Forming magnetic microelectromechanical inductive components

Forming magnetic microelectromechanical inductive components

Micro-electro-mechanical system device with enhanced structural strength

MEMS-based levers and their use for alignment of optical elements

ELECTRONIC DEVICE

Method and apparatus for fabricating electrostatic capacitance-type acceleration sensor and electrostatic capacitance-type acceleration sensor

Planar cavity MEMS and related structures, methods of manufacture and design structures

Method for creating a resonator

Micro-electro-mechanical system (MEMS) structures and design structures

Cantilever beam structure where stress is matched and method of manufacturing the same

MEMS structure with improved shielding and method

Electric device and method of manufacturing the same

Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate

MEMS pressure transducer assembly

MEMS/MOEMS sensor design

Method for forming micro-electro-mechanical system (MEMS) beam structure

Micro-electromechanical device having a soft magnetic material electrolessly deposited on a metal layer

MEMS vibrator, method of manufacturing MEMS vibrator, electronic device, and moving object

Merged legs and semi-flexible anchoring having cantilevers for MEMS device

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Hybrid radio frequency component

Electric equipment having movable portion, and its manufacture

Planar cavity MEMS and related structures, methods of manufacture and design structures

MEMS element and oscillator

Stress relieved microfabricated cantilever

Electronic device, method of manufacturing the same, and oscillator

Motion conversion mechanisms

Compliant micro device transfer head with integrated electrode leads

Semiconductor structures provided within a cavity and related design structures

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

Method for manufacturing MEMS device

Method of manufacturing a probe comprising a cantilever with a conduit

Through-silicon via resonators in chip packages and methods of assembling same

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

MEMS pressure transducer assembly and method of packaging same

3-dimensional integrated circuit testing using MEMS switches with tungsten cone contacts

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

Micro-electro-mechanical system (MEMS) structures and design structures

Horizontal coplanar switches and methods of manufacture

Electric device and method of manufacturing the same

Etchant-free methods of producing a gap between two layers, and devices produced thereby

Apparatus for reconfiguring an integrated waveguide

Elimination of silicon residues from MEMS cavity floor

Oblique parts or surfaces

Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

Nonvolatile nano-electromechanical system device

Optomechanical non-reciprocal device

NEMS comprising AlSi alloy based transducer

MEMS SENSOR

Micro-electro-mechanical device with a piezoelectric actuator

Strengthened micro-electromechanical system devices and methods of making thereof

MEMS-based levers and their use for alignment of optical elements

MEMS device with integral packaging

MEMS/MOEMS SENSOR DESIGN

Method for MEMS device fabrication and device formed

Actuation signal for microactuator bounce and ring suppression

Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same

Nanoscale Apparatus and Sensor With Nanoshell and Method of Making Same

Method of fabricating sensors having functionalized resonating beams

Microelectronic device and electronic apparatus

OXIDE MEMS BEAM

Method for producing MEMS structures, and MEMS structure

Microelectromechanical structure (MEMS) monitoring

Sacrificial layers made from aerogel for microelectromechanical systems (MEMS) device fabrication processes

Vibration transducer and its manufacturing method

Method of forming an electromechanical transducer device

Microstructure device with an improved anchor

Micromechanical sensor with multiple spring bars

Polymer actuator device

Horizontal coplanar switches and methods of manufacture

Method for fabricating a fixed structure defining a volume receiving a movable element in particular of a MEMS

Vibrating micromechanical system having beam-shaped element

MEMS Device Comprising a Hermetically Sealed Cavity and Devices Obtained Thereof

Actuator element and input apparatus including the same

ACTUATOR DEVICE AND INPUT APPARATUS

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Methods of manufacture for micro-electro-mechanical system (MEMS)

Planar cavity MEMS and related structures, methods of manufacture and design structures

Planar cavity MEMS and related structures, methods of manufacture and design structures

Method of manufacturing a micro-electro-mechanical system (MEMS)

Micromechanical system

ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE

Cantilevers for deposition

Method for manufacturing electronic component

MEMS devices and fabrication thereof

HF-MEMS switch

MEMS sensor

Method for fabricating a microelectromechanical sensor with a piezoresistive type readout

MICRO ACTUATOR, MICRO ACTUATOR SYSTEM, AND METHOD FOR FABRICATING MICRO ACTUATOR

Micromechanical component having an inclined structure and corresponding manufacturing method

Method of forming a micro-electromechanical system (MEMS) having a gap stop

CMOS-MEMS cantilever structure

Nonvolatile nano-electromechanical system device

MEMS PROBE CARD AND MANUFACTURING METHOD THEREOF

Resonator

TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL

MEMS device and MEMS spring element

Method for fabricating a multilayer microstructure with balancing residual stress capability

MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME

Methods and Systems for Detection Using Threshold-Type Electrostatic Sensors

Semiconductor device and method of fabricating the semiconductor device

Method for forming MEMS devices having low contact resistance and devices obtained thereof

Flexible micro/nanofluidic devices

MEMS device and method of fabricating the same

Radio-frequency microelectromechanical systems and method of manufacturing such systems

Method of accurately spacing Z-axis electrode

ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME

MEMS devices and systems actuated by an energy field

OUT-OF-PLANE SPRING STRUCTURES ON A SUBSTRATE

Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same

Process for producing fluorocarbon microstructure, fluorocarbon microstructure, and microsystem

Oblique parts or surfaces

Oblique parts or surfaces

Method for manufacturing electronic component

MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING VIBRATOR WHICH IS PROVIDED WITH SIDE INSULATING FILM AND INSULATING SEPARATION REGION FORMED BY THERMAL OXIDATION

Micro-electro-mechanical device with a piezoelectric actuator

Method of fabricating a structure by anisotropic etching, and silicon substrate with an etching mask

Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same

METHOD OF MANUFACTURING A MEMS ELEMENT

METHOD OF FABRICATING MICRO ELECTRO-MECHANICAL COMPONENT

Passive temperature compensation of silicon MEMS devices

Micro-posts having improved uniformity and a method of manufacture thereof

Oscillator and optical deflector having oscillator

Method for producing a structure comprising a mobile element by means of a heterogeneous sacrificial layer

Method for making micro-electromechanical system devices

MEMS sensor

Electrically conductive polymer actuator, method for manufacturing the same, and method of driving the same

Method for producing a micromechanical structural element and semiconductor arrangement

Method for producing a multilayer piezoelectric microcomponent using sacrificial thick film technology

Contact device and method for producing the same

Microbolometer with improved mechanical stability and method of manufacturing the same

Micro-Electromechanical System Memory Device and Method of Making the Same

High-deformation composite microresonator

Self-poling piezoelectric MEMs device

MEMS device with nanowire standoff layer

Forming a cantilever assembly for vertical and lateral movement

Hermetic packaging and method of manufacture and use therefore

Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards

MEMS device with integral packaging

Transferable micro spring structure

Micro electro-mechanical system and method of manufacturing the same

Piezoresistive sensing structure

Nanocomposite films

Process for manufacturing a microelectromechanical interaction system for a storage medium

Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore

Controlled nanowire in permanent integrated nano-templates and method of fabricating sensor and transducer structures

Micromachined artificial haircell

Apparatus and method for microfabricated multi-dimensional sensors and sensing systems

Micromechanical Component With Active Elements and Method Producing a Component of This Type

Method for manufacturing physical quantity sensor

Piezo-TFT cantilever MEMS fabrication

Energy storage structures using electromechanically active materials for micro electromechanical systems

Microstructure and manufacturing method thereof and microelectromechanical system

Out-of-plane spring structures on a substrate

Bimorph element, bimorph switch, mirror element, and method for manufacturing these

Temperature compensation for silicon MEMS resonator

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

Oscillating system and optical deflector

Three dimensional microstructures and methods for making three dimensional microstructures

MEMS device and method of fabrication

Heat activated nanometer-scale pump

Manufacturing method of microelectromechanical system

Microelectromechanical system comprising a beam that undergoes flexural deformation

Calibration for automated microassembly

Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and producing method thereof

Piezoresistive sensing structure

Microelectromechanical systems (MEMS) device including a superlattice

Method for Making a Microelectromechanical Systems (MEMS) Device Including a Superlattice

Vibrating gyrosensor and vibrating element

Temperature compensation for silicon MEMS resonator

Method of obtaining release-standing micro structures and devices by selective etch removal of protective and sacrificial layer using the same

MEMS oscillator drive

Electroplating pcb components

Manufacturing method of a MEMS structure, a cantilever-type MEMS structure, and a sealed fluidic channel

Method for making a planar suspended microstructure, using a sacrificial layer of polymer material and resulting component

Weighted released-beam sensor

Interleaved MEMS-based probes for testing integrated circuits

Method of making a microelectromechanical (MEM) device using porous material as a sacrificial layer

Micromechanical device with thinned cantilever structure and related methods

Method of enhancing connection strength for suspended membrane leads and substrate contacts

Oblique parts or surfaces

Micro structure with interlock configuration

Method and micromechanical component

Method for manufacturing semiconductor physical quantity sensor

Physical quantity sensor

Method for fabricating vertical offset structure

Composite beam microelectromechanical system switch

Fabrication of silicon micro-mechanical structures

Enhancement of fabrication yields of nanomechanical devices by thin film deposition

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures

Micromechanical device with thinned cantilever structure and related methods

MEMS device with integral packaging

Electrode design and positioning for controlled movement of a moveable electrode and associated support structure

Temperature compensation for silicon MEMS resonator

Method for supplying multiple voltages to a movable part of a MEMS device

Transferable micro spring structure

Piezo-TFT cantilever MEMS

Integrated released beam layer structure fabricated in trenches and manufacturing method thereof

Manufacturing methods of MEMS device

Micro structure with interlock configuration

System and method of fabricating micro cavities

Forming tool for forming a contoured microelectronic spring mold

Micro-electro-mechanical switch, and methods of making and using it

Acoustic devices with edge corrugation

Actuator designs for MEMS-based active cooling

Magnetoelastically actuated MEMS device and methods for its manufacture

Integration of electromechanical and CMOS devices in front-end-of-line using replacement metal gate process flow

Micro-electro-mechanical system (MEMS) chip