83870 ⎘
Basic microelectromechanical structures; Suspended structures, i.e. structures allowing a movement See-saws
Transducer
#2NON-CONTACT MICROELECTROMECHANICAL SYSTEMS
#3NON-CONTACT MICROELECTROMECHANICAL SYSTEM DEVICE WITH HINGE-LEVEL ACTUATION
#4ACTUATOR DEVICE
#5MEMS SENSOR HAVING A HIGH ROBUSTNESS AGAINST THE STICTION PHENOMENON
#6ACCELERATION SENSOR
#7MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
#8VARIABLE INDUCTOR AND INDUCTOR MODULE
#9MEMS Array Structures for Gyroscopes with High Resonant Frequencies
#10Actuator device
#11Method for lithography process
#12Thermal metamaterial for low power MEMS thermal control
#13Actuator device
#14Inertial sensor and inertial measurement unit
#15MEMS and method of manufacturing the same
#16Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
#17Actuator device
#18MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging
#19MEMS bridge devices and methods of manufacture thereof
#20Linearized micromechanical sensor
#21Micromechanical z-inertial sensor
#22Forming an offset in an interdigitated capacitor of a microelectromechanical systems (MEMS) device
#23Physical quantity sensor, electronic device, and mobile body
#24Actuator
#25MEMS sensor with dual pendulous proof masses
#26ELECTROSTATIC OFFSET CORRECTION
#27Actuator device
#28Functional element, electronic apparatus and mobile entity
#29Micromechanical sensor and method for producing a micromechanical sensor
#30Multi-axis accelerometer with reduced stress sensitivity
#31MEMS accelerometric sensor having high accuracy and low sensitivity to temperature and aging
#32Active opening MEMS switch device
#33ELECTROMAGNETICALLY ACTUATED MICROSHUTTER
#34Physical quantity sensor, manufacturing method of physical quantity sensor, sensor device, electronic apparatus, and moving object
#35Z axis accelerometer design with offset compensation
#36MEMS device
#37Methods of forming sensor integrated packages and structures formed thereby
#38Reducing MEMS stiction by increasing surface roughness
#39MEMS electrostatic actuator device for RF varactor applications
#40Reducing MEMS stiction by deposition of nanoclusters
#41Rocker device for a micromechanical Z-sensor
#42Physical quantity sensor, electronic device, and mobile body
#43Reducing MEMS stiction by deposition of nanoclusters
#44Methods of forming microstructure and electronic device having moveable component
#45Functional element, physical quantity sensor, electronic apparatus and mobile entity
#46Microelectromechanical device with motion limiters
#47MEMS electrostatic actuator
#48MEMS device
#49Electromagnetically actuated microshutter
#50Reducing MEMS stiction by introduction of a carbon barrier
#51MEMS device and methods for manufacturing and using same
#52Reducing MEMS stiction by deposition of nanoclusters
#53Reducing MEMS stiction by introduction of a carbon barrier
#54MEMS electrostatic actuator
#55Electromagnetically actuated microshutter
#56Method for forming a mirror MEMS device
#57MEMS device and methods for manufacturing and using same
#58Microstructure and electronic device
#59Micromechanical element mobile along at least one axis of rotation
#60Method for creating a micromechanical membrane structure and MEMS component
#61Micromirror unit and method of making the same
#62Micromechanical component and method for oscillation excitation of an oscillation element of a micromechanical component
#63Planarity of pixel mirrors
#64Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same
#65Mounting system for torsional suspension of a MEMS device
#66Method of producing an oscillator device
#67Movable device
#68Micro-oscillation element provided with weight portion, and array utilizing the same
#69Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same
#70MEMS devices with an etch stop layer
#71Oscillator device, optical deflector and optical instrument using the same
#72Hinge assembly for a digital micromirror device
#73Tiltable-body apparatus, and method of fabricating the same
#74Triaxial membrane accelerometer
#75Micromirror unit and method of making the same
#76Micro-mechanical device comprising suspended element which is connected to a support by means of a pier and producing method thereof
#77Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
#78Utilizing a protective plug to maintain the integrity of the FTP shrink hinge
#79Tiltable-body apparatus, and method of fabricating the same
#80Methods of fabricating interferometric modulators by selectively removing a material
#81Methods of fabricating interferometric modulators by selectively removing a material
#82Systems and methods for amorphous flexures in micro-electro mechanical systems
#83Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
#84Micromirror unit and method of making the same
#85Microelectromechanical system comb actuator and manufacturing method thereof
#86MEMS device and method of forming MEMS device
#87Tiltable-body apparatus, and method of fabricating the same
#88Microstructure with movable mass