ClassID:

83892

B81B2203/06 - CPC Classification

Classification description:

Basic microelectromechanical structures Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable

Recent Application in this class:
#1
20260116741
2026-04-30

MEMS Optical Modulator Independently Controlled with Integrated ASIC Device and Making the Same

#2
20250289709
2025-09-18

METHOD OF MANUFACTURE AND ASSEMBLY OF XY FLEXURE MECHANISM ASSEMBLY

#3
20250250157
2025-08-07

MEMS TRANSDUCER

#4
20250002331
2025-01-02

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

#5
20240400375
2024-12-05

STRAIN SENSOR SWITCH FOR TIMING BASED SENSING

#6
20240010490
2024-01-11

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFORMANCES AND MANUFACTURING PROCESS THEREOF

#7
20230406694
2023-12-21

MEMS Device and Apparatus Having Such a MEMS Device

#8
20230312335
2023-10-05

MEMS transducer

#9
20230271823
2023-08-31

DIRECT DRIVE MEMS SCANNING MICROMIRROR

#10
20230003996
2023-01-05

MEMS DEVICE AND METHOD OF DRIVING MEMS DEVICE

#11
20220396470
2022-12-15

MEMS transducer

#12
20220340411
2022-10-27

MEMS ROTOR WITH COATED BOTTOM SURFACE

#13
20220259035
2022-08-18

Sensor and electronic device

#14
20210211068
2021-07-08

Micro electrostatic actuated pneumatic driven motor

#15
20200132980
2020-04-30

MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION

#16
20190121434
2019-04-25

Actuator

#17
20190062154
2019-02-28

Three-dimensional micro devices and method for their production

#18
20170227747
2017-08-10

Miniaturized optical zoom lens system

#19
20170022814
2017-01-26

Kinetic energy atom-powered engine

#20
20160370576
2016-12-22

MEMS device

#21
20160176701
2016-06-23

MEMS electrostatic actuator device for RF varactor applications

#22
20160167944
2016-06-16

Reducing MEMS stiction by deposition of nanoclusters

#23
20160158933
2016-06-09

In-plane-strain-actuated out-of-plane actuator

#24
20150232331
2015-08-20

LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT

#25
20150229241
2015-08-13

MEMS electrostatic actuator

#26
20150226066
2015-08-13

Kinetic energy atom-powered engine

#27
20150210534
2015-07-30

System and methods for actuation using electro-osmosis

#28
20150168714
2015-06-18

MEMS device

#29
20150138617
2015-05-21

Display device and method for manufacturing the same

#30
20150054096
2015-02-26

Reducing MEMS stiction by introduction of a carbon barrier

#31
20140260616
2014-09-18

MEMS device having variable gap width and method of manufacture

#32
20140167189
2014-06-19

Reducing MEMS stiction by deposition of nanoclusters

#33
20140167188
2014-06-19

Reducing MEMS stiction by introduction of a carbon barrier

#34
20130169393
2013-07-04

Process for fabricating a magnetic tweezer

#35
20130044969
2013-02-21

Methods and systems for micro bearings

#36
20120307331
2012-12-06

Display device and method for manufacturing the same

#37
20120204642
2012-08-16

MEMS device having variable gap width and method of manufacture

#38
20120169068
2012-07-05

Kinetic energy atom-powered engine

#39
20120167377
2012-07-05

Methods and systems for positioning micro elements

#40
20090152702
2009-06-18

Coupling wire to semiconductor region

#41
20080061655
2008-03-13

Methods and systems for positioning micro elements

#42
20080042520
2008-02-21

Methods and systems for micro bearings

#43
20060131714
2006-06-22

System for coupling wire to semiconductor region

#44
18605411
2025-03-25

Method of manufacture and assembly of XY flexure mechanism assembly

#45
15417189
2018-03-13

Microphone