83892 ⎘
Basic microelectromechanical structures Devices comprising elements which are movable in relation to each other, e.g. slidable or rotatable
MEMS Optical Modulator Independently Controlled with Integrated ASIC Device and Making the Same
#2METHOD OF MANUFACTURE AND ASSEMBLY OF XY FLEXURE MECHANISM ASSEMBLY
#3MEMS TRANSDUCER
#4COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
#5STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
#6DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFORMANCES AND MANUFACTURING PROCESS THEREOF
#7MEMS Device and Apparatus Having Such a MEMS Device
#8MEMS transducer
#9DIRECT DRIVE MEMS SCANNING MICROMIRROR
#10MEMS DEVICE AND METHOD OF DRIVING MEMS DEVICE
#11MEMS transducer
#12MEMS ROTOR WITH COATED BOTTOM SURFACE
#13Sensor and electronic device
#14Micro electrostatic actuated pneumatic driven motor
#15MICRO-MECHANICAL DEVICE WITH LOCAL ELECTROMAGNETIC ACTUATION
#16Actuator
#17Three-dimensional micro devices and method for their production
#18Miniaturized optical zoom lens system
#19Kinetic energy atom-powered engine
#20MEMS device
#21MEMS electrostatic actuator device for RF varactor applications
#22Reducing MEMS stiction by deposition of nanoclusters
#23In-plane-strain-actuated out-of-plane actuator
#24LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT
#25MEMS electrostatic actuator
#26Kinetic energy atom-powered engine
#27System and methods for actuation using electro-osmosis
#28MEMS device
#29Display device and method for manufacturing the same
#30Reducing MEMS stiction by introduction of a carbon barrier
#31MEMS device having variable gap width and method of manufacture
#32Reducing MEMS stiction by deposition of nanoclusters
#33Reducing MEMS stiction by introduction of a carbon barrier
#34Process for fabricating a magnetic tweezer
#35Methods and systems for micro bearings
#36Display device and method for manufacturing the same
#37MEMS device having variable gap width and method of manufacture
#38Kinetic energy atom-powered engine
#39Methods and systems for positioning micro elements
#40Coupling wire to semiconductor region
#41Methods and systems for positioning micro elements
#42Methods and systems for micro bearings
#43System for coupling wire to semiconductor region
#44Method of manufacture and assembly of XY flexure mechanism assembly
#45Microphone