MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE AND MANUFACTURING METHODS OF MEMS DEVICE AND SEMICONDUCTOR DEVICE

MICROELECTROMECHANICAL SENSING DEVICE AND MANUFACTURING METHOD THEREOF

Sensor unit, electronic apparatus, and moving object

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

Low voltage MEMS relay filled with alternative gas mixture to SF

MEMS SPEAKER AND METHOD OF MICROFABRICATION OF SUCH A SPEAKER

Optical MEMS based monitoring system

OPTICAL MEMS BASED INTRACRANIAL PRESSURE AND INTRACRANIAL TEMPERATURE MONITOR

Light responsive polymer magnetic microrobots

Amplifier unit for a sound converter, and sound-generating unit

MEMS device comprising a membrane and an actuator

SENSOR UNIT, ELECTRONIC APPARATUS, AND MOVING OBJECT

MEMS device comprising a membrane and an actuator

A MICROFLUIDIC ANALYTICAL PLATFORM FOR AUTONOMOUS IMMUNOASSAYS

Device with a suspended membrane having an increased amplitude of displacement

MEMS structure and method for detecting a change in a parameter

Microelectronic structure with viscous damping controlled by controlling a thermo-piezoresistive effect

Multidirectional artificial muscles from nylon

Method relating to phase change composite bimorphs

Piezoelectric devices with obliquely aligned electrodes

MEMS device comprising a membrane and an actuator

Light responsive polymer magnetic microrobots

Electrothermally actuated microelectromechanical and/or nanoelectromechanical structure providing increased efficiency

Vibrator device, oscillator, electronic device, and vehicle

Systems and methods for micro-cantilever actuation by base excitation

BONDLINE FOR MM-WAVE APPLICATIONS

Actuator based on carbon nanotubes and actuating system using the same

Method for making an actuator based on carbon nanotubes

Method And System For A Visual Overlay Display

Local haptic actuation system

Microelectromechanical device and method for forming a microelectromechanical device having a support structure holding a lamella structure

Mechanical structure comprising an actuator and mechanical amplification means, and production method

Uncooled, high sensitivity spectral selective infrared detector

Micro-bolometer having an adjustable dynamic range

Microelectromechanical displacement structure and method for controlling displacement

Microelectromechanical displacement structure and method for controlling displacement

Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams

Device for converting thermal energy into electrical energy

Low-stress doped ultrananocrystalline diamond

MEMS device

Scanning probe microscope comprising an isothermal actuator

Device and method for generating a second temperature variation from a first temperature variation

Reconfigurable lithographic structures

Integrated mechanical device for electrical switching

Micromechanical component having a bond joint

Integrated mechanical device for electrical switching

Micro rotary machine and methods for using same

Fabrication of robust electrothermal MEMS with fast thermal response

MULTI-STABLE ACTUATOR

Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same

THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH

Reconfigurable lithographic structures

Electrothermal microactuator for large vertical displacement without tilt or lateral shift

Inkjet nozzle assembly having bilayered passive beam

MEMS device with bi-directional element

Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same

Thermal bend actuator material selection

MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS

Micromechanical actuators comprising semiconductors on a group III nitride basis

MEMS actuator

Thermal actuator for a MEMS-based relay switch

MEMS device with bi-directional element

Mechanical structure including a layer of polymerised liquid crystal and method of manufacturing such

Thermal bend actuator comprising passive element having negative thermal expansion

Micro transport machine and methods for using same

Singly attached MEMS thermal device and method of manufacture

Micro-actuator and locking switch

Micro rotary machine and methods for using same

Thermoelastic device with preselected resistivity, inertness and deposition characteristics

Apparatus Comprising a Thermal Bimorph with Enhanced Sensitivity

Polymer linear actuator for micro electro mechanical system and micro manipulator for measurement device of cranial nerve signal using the same

MEMS thermal device with slideably engaged tether and method of manufacture

Methods for implementation of a switching function in a microscale device and for fabrication of a microscale switch

Self-assembling MEMS devices having thermal actuation

Thermoelastic device comprising an expansive element formed from a preselected material

Micro power generator and apparatus for producing reciprocating movement

Actuator and systems and methods

Micro-electromechanical actuator

Switch structures or the like based on a thermoresponsive polymer

Functional material for micro-mechanical systems

Thermal plastic deformation of RF MEMS devices

Proportional micromechanical valve

Bimorph MEMS devices

Thermoelastic device comprising an expansive element formed from a preselected material

Process for manufacturing a microsystem

Unilateral thermal buckle beam actuator

Resonant elements and oscillators

MEMS resonator with beam segments having predefined angular offset to each other and to resonator silicon crystal orientation

Multi-die integrated circuit package

MEMS rotary fuze architecture for out-of-line applications

Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same