83753 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Structures acting upon the moving or flexible element for transforming energy into mechanical movement or , i.e. actuators, sensors, generators Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
ACOUSTIC RESONATING DEVICES AND ASSEMBLIES
#2VIBRATION DETECTOR, WEARABLE DEVICE, AND PIPING INSPECTION APPARATUS
#3MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A MEMBRANE SPRING
#4DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVITY SELF-CALIBRATION
#5ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
#6MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME
#7Microelectromechanical Device for Generating Sound Pressure
#8Microelectromechanical Device for Generating Sound Pressure
#9MEMS SENSOR WITH TWO COMPLIANCES
#10MICROMECHANICAL DEVICE FOR ENHANCED ACCELERATION MEASUREMENT
#11Optoelectronic component comprising, on a single substrate, an optical transducer made of a semi-conductor material III-V and an optically scanning microelectromechanical system
#12Bone-conduction sensor assembly
#13PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
#14MICROMECHANICAL SENSOR ELEMENT
#15Micromechanical z-inertial sensor
#16MEMS actuator element and MEMS actuator array with a plurality of MEMS actuator elements
#17MICRON-RESOLUTION SOFT STRETCHABLE STRAIN AND PRESSURE SENSOR
#18Micromechanical device including a stop spring structure
#19Method for manufacturing three-dimensionally structured member, method for manufacturing acceleration pickup, acceleration pickup, and acceleration sensor
#20Micro-opto-mechanical system sensor, arrangement and manufacturing method
#21PIEZOELECTRIC RING GYROSCOPE
#22MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
#23MICRO-ELECTROMECHANICAL ACTUATING DEVICE PROVIDING A MOVEMENT HAVING MULTIPLE DEGREES OF FREEDOM
#24Inertial sensor sampling with combined sense axes
#25MEMS devices
#26Eight spring dual substrate MEMS plate switch and method of manufacture
#27Packaged pressure sensor device
#28Composite sensor package
#29Microphone assembly with back volume vent
#30Pseudo-extensional mode MEMS ring gyroscope
#31Method for processing a monocrystalline substrate and micromechanical structure
#32Liquid-resistant packaging for electro-acoustic transducers and electronic devices
#33MEMS transducer for interacting with a volume flow of a fluid, and method of producing same
#34MEMS microphone and method of manufacturing the same
#35MEMS sensor compensation for off-axis movement
#36MEMS sensor compensation for off-axis movement
#37Packaged pressure sensor device
#38Non-electrical battery based on plastic strings and membranes
#39MEMS sensors, methods for providing same and method for operating a MEMS sensor
#40MEMS DEVICE
#41Microelectromechanical system microphone
#42Method for processing a monocrystalline substrate and micromechanical structure
#43Method And System For A Visual Overlay Display
#44MEMS device and process
#45A SENSING DEVICE, SYSTEM AND A METHOD OF MANUFACTURE THEREOF
#46DIRECT CURRENT ELECTRIC ARC FURNACE FOR METALLURGICAL PLANT
#47MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator
#48Pinched doped well for a junction field effect transistor (JFET) isolated from the substrate
#49Hinged MEMS diaphragm, and method of manufacture thereof
#50Refractory seed metal for electroplated MEMS structures
#51DUAL BAND MEMS ACOUSTIC DEVICE
#52MEMS chip package
#53Mirco-electro-mechanical system device
#54APPARATUS AND METHOD FOR HIGH VOLTAGE I/O ELECTRO-STATIC DISCHARGE PROTECTION
#55Integration of pressure sensors into integrated circuit fabrication and packaging
#56Hinged MEMS diaphragm
#57MEMS microphone with tensioned membrane
#58MEMS device and method for manufacturing a MEMS device
#59Micromachined ultra-miniature piezoresistive pressure sensor and method of fabrication of the same
#60Pressure-sensitive sensor
#61Capacitive MEMS sensor and method
#62Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#63Semiconductor devices and methods of forming thereof
#64Pressure difference sensor and method for its manufacture
#65Nano-electromechanical switch
#66Magnet placement for integrated sensor packages
#67Micro-electro-mechanical transducer having an optimized non-flat surface
#68Micro-electro-mechanical transducer having an optimized non-flat surface
#69Micro-electro-mechanical transducer having an optimized non-flat surface
#70Micromechanical sensor and method for manufacturing a micromechanical sensor
#71Micromechanical component and method for producing a micromechanical component
#72MEMS device with differential vertical sense electrodes
#73Physical quantity sensor having an elongated groove, and manufacturing method thereof
#74Device comprising a spring and an element suspended thereon, and method for manufacturing same
#75Capacitive micro-machined transducer and method of manufacturing the same
#76Multi-axis MEMS rate sensor device
#77Microphone
#78MEMS integrated pressure sensor and microphone devices and methods of forming same
#79ACOUSTIC SENSOR WITH INTEGRATED PROGRAMMABLE ELECTRONIC INTERFACE
#80ACOUSTIC SENSOR AND METHOD FOR MANUFACTURING SAME
#81Integrated microphone package
#82Ultrasonic transducer and method of manufacturing the same
#83Component and method for producing same
#84MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
#85Ultrasonic transducer and method of manufacturing the same
#86MEMS DEVICE
#87Silicon based capacitive microphone
#88Method for manufacturing capacitive micromachined ultrasonic transducer and apparatus configured to obtain subject information using the capacitive micromachined ultrasonic transducer
#89Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#90Micro-electro-mechanical transducer having an optimized non-flat surface
#91Linear fluidic actuator
#92Micro-electro-mechanical transducer having a surface plate
#93DEVICE FOR CONVERTING A FIRST MOTION INTO A SECOND MOTION RESPONSIVE TO THE FIRST MOTION UNDER A DEMAGNIFICATION SCALE
#94MEMS ultrasonic device having a PZT and cMUT
#95Micro-electro-mechanical transducer having a surface plate
#96STANDING WAVE FLUIDIC AND BIOLOGICAL TOOLS
#97MEMS device
#98Devices for storing energy in the mechanical deformation of nanotube molecules and recovering the energy from mechanically deformed nanotube molecules
#99Microphone with pressure relief
#100Adjustable compliant mechanism
#101Seismic acquisition system and sensor based on MEMS sensor with low power consumption
#102MEMS-tunable optical ring resonator
#103Microelectromechanical system (MEMS) apparatus with adjustable spring
#104CMOS and pressure sensor integrated on a chip and fabrication method
#105Hinged MEMS diaphragm and method of manufacture therof
#106Acoustic tweezers