83755 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes; Structures acting upon the moving or flexible element for transforming energy into mechanical movement or , i.e. actuators, sensors, generators Structures for transforming energy not provided for in groups -
SEMICONDUCTOR DIE WITH SENSOR SECTION LOCATED AT THE EDGE
#2Sound producing cell
#3PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
#4PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A SINGLE SEMICONDUCTOR WAFER AND RELATED MEMS DEVICE
#5SEMICONDUCTOR DIE WITH SENSOR SECTION LOCATED AT THE EDGE
#6Hearing device and hearing device module
#7Quantum metrology and quantum memory using defect sates with spin-3/2 or higher half-spin multiplets
#8Quantum metrology and quantum memory using defect sates with spin-3/2 or higher half-spin multiplets
#9Method of actuating a shape changeable member, shape changeable member and actuating system
#10MEMS-component
#11Cover based adhesion force measurement system for microelectromechanical system (MEMS)
#12Non-electrical battery based on plastic strings and membranes
#13Microelectromechanical system with spring for magnet placement
#14Micro-nuclear battery and energy conversion method thereof
#15Quantum metrology and quantum memory using defect states with spin-3/2 or higher half-spin multiplets
#16Method and apparatus to implement frequency stabilization of a resonator
#17Method for manufacturing a MEMS element
#18ENVIRONMENTALLY RESPONSIVE OPTICAL MICROSTRUCTURED HYBRID ACTUATOR ASSEMBLIES AND APPLICATIONS THEREOF
#19Reactive ionic liquid, and ion-immobilized metal oxide particle, ion-immobilized elastomer, and transducer using same
#20Liquid-driven nano-porous actuator and the application thereof
#21Microfabricated Elastomeric Valve and Pump Systems
#22Mechanisms for forming micro-electro mechanical device
#23Self-regulating chemo-mechano-chemical systems
#24Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism
#25Reactive ionic liquid, and ion-immobilized metal oxide particle, ion-immobilized elastomer, and transducer using same
#26Reconfigurable lithographic structures
#27Component and method for producing same
#28Liquid MEMS component responsive to pressure
#29Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation
#30MEMS-based integrated inverter for wafer-scale thermionic energy converter
#31Motion conversion system
#32Magnetic force drive device, optical scanning device, and image display device
#33Motion conversion system
#34Microfabricated elastomeric valve and pump systems
#35Reconfigurable lithographic structures
#36Microfabricated elastomeric valve and pump systems
#37Micromechanical sensor for measuring the mass flow rate in accordance with the Coriolis principle
#38Thermoelectric generator with micro-electrostatic energy converter
#39Motion conversion system
#40Large area induced assembly of nanostructures
#41Reversible actuation in arrays of nanostructures
#42Actively switchable nano-structured adhesive
#43Magnetic MEMS device
#44MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
#45System and method for implementing a high-sensitivity sensor with improved stability