83779 ⎘
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes Devices comprising flexible or deformable elements not provided for in groups -
SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
#2Electrical Measurement of MEMS Switch Beam Resonant Frequency
#3SELF-FOLDING 3D FILM ASSEMBLIES
#4CANTILEVER STRUCTURE WITH INTERMEDIATE SUBSTRATE CONNECTION
#5Silicon MEMS gyroscopes with upper and lower sense plates
#6Self-folding 3D film assemblies
#7ARTIFICIAL RETINAL NERVE FLEXIBLE MICROELECTRODE DEVICE AND FABRICATION METHOD THEREOF
#8Suspended microelectromechanical system (MEMS) devices
#9Deployable KiriForm flexures
#10Micromechanical device and method for manufacturing a micromechanical device
#11Method for processing a monocrystalline substrate and micromechanical structure
#12MEMS device formed by at least two bonded structural layers and manufacturing process thereof
#13Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
#14Flexible electronics for wearable healthcare sensors
#15MEMS device formed by at least two bonded structural layers and manufacturing process thereof
#16Resonator and resonance device
#17MEMS sensor with dual pendulous proof masses
#18Micro-device having a metal-semiconductor compound layer protected against HF etching and method for making the same
#19MEMS switch and electronic device
#20VARIABLE FOCUS MIRROR AND OPTICAL SCANNING DEVICE
#21Device and method of fabricating such a device
#22FLOW PASSAGE MODULE AND CELL CULTURE APPARATUS USING SAME
#23Flexible electronics for wearable healthcare sensors
#24Method for obtaining multilayer graphene
#25FLEXIBLE DISPLAY DEVICE
#26Method for processing a monocrystalline substrate and micromechanical structure
#27Flexible electronics for wearable healthcare sensors
#28MEMS device formed by at least two bonded structural layers and manufacturing process thereof
#29Semiconductor structure and manufacturing method thereof
#30Mechanical stress-decoupling in semiconductor device
#31Pressure sensor and method for producing the pressure sensor
#32Release hole plus contact via for fine pitch ultrasound transducer integration
#33Semiconductor device and method for manufacturing the same
#34System and method for precision transport, positioning, and assembling of longitudinal nano-structures
#35VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT
#36Monolithic fabrication of three-dimensional structures
#37Functional element, electronic apparatus, and moving object
#38MEMS VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
#39Micromechanical structure having a deformable membrane and a protection against strong deformations
#40Merged legs and semi-flexible anchoring having cantilevers for MEMS device
#41Electric equipment having movable portion, and its manufacture
#42VIBRATION ELEMENT AND ELECTRONIC DEVICE
#43VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
#44Hybrid MEMS RF switch and method of fabricating same
#45SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBLING OF LONGITUDINAL NANO-STRUCTURES
#46Hybrid MEMS RF switch and method of fabricating same
#47System and method for precision transport, positioning, and assembling of longitudinal nano-structures
#48Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electronic circuits
#49Systems and methods for micromechanical displacement-based logic circuits
#50Flexible electronics for wearable healthcare sensors
#51Flexible electronics for wearable healthcare sensors
#52Semiconductor device and manufacturing method thereof