83780 ⎘
Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
DESIGNS AND METHODS FOR MAUFACTURING OUT-OF-PLANE ROTATION STOPS FOR MEMS DEVICES
#2CIRCUIT BREAKER CIRCUIT WITH MICRO-ELECTROMECHANICAL SYSTEMS SWITCH AND ISOLATION CIRCUIT
#3Light Ranging Device Having An Electronically Scanned Emitter Array
#4BATTERY CELL AND BATTERY DEVICE HAVING THE SAME
#5MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS
#6MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
#7Light ranging device having an electronically scanned emitter array
#8Hybrid driving for large aperture tilting mirrors
#9MEMS DEVICE AND METHOD OF DRIVING MEMS DEVICE
#10MICROELECTROMECHANICAL DRIVE FOR MOVING OBJECTS
#11MEMS ROTOR WITH COATED BOTTOM SURFACE
#12BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#13MEMS SYSTEM
#14Light ranging device having an electronically scanned emitter array
#15Switchable displays with movable pixel units
#16Methods for manufacturing micromechanical components and method for manufacturing a mould insert component
#17Microdevice comprising at least two movable elements
#18BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
#19Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#20METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCURRENCE OF COMMON DIRECTION MOLECULES
#21MICROMECHANICAL COIL DEVICE
#22Charge pump systems, devices, and methods
#23Charge pump systems, devices, and methods
#24MICROMECHANICAL COMPONENT
#25Microfluidic mixing
#26Multistage micromechanical timepiece and method for making same
#27Methods and system for microelectromechanical packaging
#28Component especially for horology with surface topology and method for manufacturing the same
#29Light ranging device with electronically scanned emitter array and synchronized sensor array
#30Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
#31Micro electrostatic motor and micro mechanical force transfer devices
#32Micro electrostatic motor and micro mechanical force transfer devices
#33Methods for manufacturing micromechanical components and method for manufacturing a mould insert component
#34Substrate with sliding dielectric film and method of manufacturing the same
#35Charge pump systems, devices, and methods
#36Electrostatic device
#37Physical quantity sensor, physical quantity sensor device, complex sensor device, inertial measurement unit, and vehicle
#38Sensor device and manufacturing method thereof
#39Asymmetric out-of-plane accelerometer
#40Bidirectional MEMS driving arrangements with a force absorbing system
#41Mechanism for a timepiece and timepiece comprising such a mechanism
#42MEMS device and electronic apparatus
#43Light ranging device having an electronically scanned emitter array
#44Physical quantity sensor, method for manufacturing physical quantity sensor, complex sensor, inertia measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#45Three-dimensional micro devices and method for their production
#46Light ranging device with MEMS scanned emitter array and synchronized electronically scanned sensor array
#47Electronically scanned light ranging device with multiplexed photosensors
#48Light ranging device with electronically scanned emitter array and synchronized sensor array
#49Microelectromechanical device with at least one translationally guided moveable element
#50Wavelength tunable optical sources, filters and detectors
#51Charge pump systems, devices, and methods
#52Micromechanical structure for an acceleration sensor
#53Charge pump systems, devices, and methods
#54Method for manufacturing a micromechanical inertial sensor
#55Methods and systems for microelectronic packaging
#56Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process
#57MULTI-LAYER GLASS STRUCTURES
#58Vibration energy harvester
#59Method and apparatus for harvesting energy based on the random occurrence of common direction molecules
#60Deflector
#61Electrode design and low-cost fabrication method for assembling and actuation of miniature motors with ultrahigh and uniform speed
#62Miniaturized optical zoom lens system
#63Electrostatic device
#64Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
#65Kinetic energy atom-powered engine
#66Accelerometers
#67Spin control mechanism and spin device
#68Miniaturized optical zoom lens system
#69MICRO-MIRROR DEVICE AND METHOD FOR DRIVING MIRROR THEREOF
#70Micromechanical component and method for manufacturing same
#71System and method for precision transport, positioning, and assembling of longitudinal nano-structures
#72MEMS DRIVING DEVICE, ELECTRONIC APPARATUS, AND MEMS DRIVING METHOD
#73MOTION CONVERSION SYSTEM
#74Sensor and method for manufacturing a sensor
#75MEMS GYROSCOPE
#76Kinetic energy atom-powered engine
#77System and methods for actuation using electro-osmosis
#78Optical projecting apparatus having two digital micro-mirror devices
#79OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC DEVICE, AND MEMS DEVICE
#80MOVABLE MEMS ELEMENT WITH STICTION MITIGATING SPRING
#81MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS
#82MEMS IRIS DIAPHRAGM-BASED FOR AN OPTICAL SYSTEM AND METHOD FOR ADJUSTING A SIZE OF AN APERTURE THEREOF
#83Wafer bonding method for use in making a MEMS gyroscope
#84Dynamic laser beam shaping methods and systems
#85MEMS-based zoom lens system
#86OPTICAL ASSEMBLY FOR OPTICAL COMMUNICATION SYSTEMS
#87Miniaturized optical zoom lens system
#88Integrated apertured micromirror and applications thereof
#89Method and apparatus for harvesting energy based on the random occurrence of common direction molecules
#90Adjustable lens array with variable optical power
#91System and method for reducing offset variation in multifunction sensor devices
#92INTERFEROMETRIC OPTICAL MODULATOR WITH BROADBAND REFLECTION CHARACTERISTICS
#93MEMS component for generating pressure pulses
#94Process for fabricating high-precision objects by high-resolution lithography and dry deposition and objects thus obtained
#95MEMS DEVICE
#96Space curve mesh driving pair and polyhedral space curve mesh transmission
#97Method and apparatus for harvesting energy based on the random occurrence of common direction molecules
#98Microfabricated elastomeric valve and pump systems
#99SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBLING OF LONGITUDINAL NANO-STRUCTURES
#100Three dimentional (3D) robotic micro electro mechanical systems (MEMS) arm and system
#101Motion conversion system
#102Kinetic energy atom-powered engine
#103Interferometric optical modulator with broadband reflection characteristics
#104MEMS structure with a flexible membrane and improved electric actuation means
#105System and method for precision transport, positioning, and assembling of longitudinal nano-structures
#106Method of fabricating an electromechanical component using graphene
#107Low-Friction Moving Interfaces in Micromachines and Nanomachines
#108Microfabricated Elastomeric Valve And Pump Systems
#109Microfabricated elastomeric valve and pump systems
#110Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system
#111Micromachine switch, filter circuit, duplexer circuit, and communication device
#112Interferometric optical modulator with broadband reflection characteristics
#113Flow directing materials and systems
#114RF MEMS switch with a flexible and free switch membrane
#115Microfabricated elastomeric valve and pump systems
#116MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
#117MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
#118Microfabricated elastomeric valve and pump systems
#119Low-friction moving interfaces in micromachines and nanomachines
#120Motion conversion system
#121Self-stabilizing, floating microelectromechanical device
#122Versatile digitally controlled micro-mechanical actuator
#123Low-friction moving interfaces in micromachines and nanomachines
#124Self-stabilizing, floating microelectromechanical device
#125Microfabricated elastomeric valve and pump systems
#126Microfabricated elastomeric valve and pump systems
#127Apparatus and method for nanoscale and microscale mechanical machining and processing
#128Anchorless electrostatically activated micro electromechanical system switch
#129Low-friction moving interfaces in micromachines and nanomachines
#130Microphone
#131Microelectromechanical systems (MEMS) scanners for scanning laser devices