Patents-Review.com
ClassID:

83941 ⎘

B81C1/00198 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements

Recent Application in this class:
#1
20260138866
2026-05-21

DESIGNS AND METHODS FOR MAUFACTURING OUT-OF-PLANE ROTATION STOPS FOR MEMS DEVICES

 #2
20250361138
2025-11-27

ELECTROMECHANICAL SYSTEM COMPRISING A MOVABLE ELEMENT PROVIDED WITH AN OPENING

 #3
20240425359
2024-12-26

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURING PROCESS THEREOF

 #4
20240329076
2024-10-03

MEMS ACCELEROMETER WITH VERTICAL STOPS

 #5
20240043266
2024-02-08

MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS

 #6
20240010490
2024-01-11

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFORMANCES AND MANUFACTURING PROCESS THEREOF

 #7
20230365401
2023-11-16

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATION METHOD

 #8
20230322546
2023-10-12

MEMS with cover drive and method of operating the same

 #9
20230296461
2023-09-21

PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME

 #10
20230127991
2023-04-27

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

 #11
20220363535
2022-11-17

MIRROR DEVICE MANUFACTURING METHOD AND MIRROR UNIT MANUFACTURING METHOD

 #12
20220340411
2022-10-27

MEMS ROTOR WITH COATED BOTTOM SURFACE

 #13
20220119245
2022-04-21

MEMS device having an improved stress distribution and manufacturing process thereof

 #14
20210405347
2021-12-30

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

 #15
20200262699
2020-08-20

Micro-electro-mechanical device having two buried cavities and manufacturing process thereof

 #16
20200209615
2020-07-02

Micromachined mirror assembly having reflective layers on both sides

 #17
20190256350
2019-08-22

Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths

 #18
20190210868
2019-07-11

Micro-electro-mechanical device having two buried cavities and manufacturing process thereof

 #19
20190135612
2019-05-09

Micromechanical z-inertial sensor

 #20
20190092625
2019-03-28

Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widths

 #21
20190062154
2019-02-28

Three-dimensional micro devices and method for their production

 #22
20180290880
2018-10-11

Isolated protrusion/recession features in a micro electro mechanical system

 #23
20180238926
2018-08-23

Inertia sensor and method of manufacturing the same

 #24
20180157030
2018-06-07

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

 #25
20180143591
2018-05-24

Flexible strip for horology and method for manufacturing the same

 #26
20180017387
2018-01-18

Segmented electrode structure for quadrature reduction in an integrated device

 #27
20170146793
2017-05-25

MICROFABRICATED OPTICAL APPARATUS WITH INTEGRATED TURNING SURFACE

 #28
20170123202
2017-05-04

Electrostatically actuated oscillating structure with oscillation starting phase control, and manufacturing and driving method thereof

 #29
20170101306
2017-04-13

MICROMECHANICAL COMPONENT HAVING TWO AXES OF OSCILLATION AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

 #30
20170081173
2017-03-23

MEMS devices and methods of manufacturing the same

 #31
20160107883
2016-04-21

Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures

 #32
20160090302
2016-03-31

Microfluidic device with integrated stirring structure and manufacturing method thereof

 #33
20160033754
2016-02-04

DISPLAY DEVICE AND METHOD FOR FABRICATING THE SAME

 #34
20160018636
2016-01-21

DISPLAY DEVICE AND MANUFACTURING METHOD OF SAME

 #35
20150353354
2015-12-10

System and method for precision transport, positioning, and assembling of longitudinal nano-structures

 #36
20150348947
2015-12-03

Three-dimensional inter-chip contact through vertical displacement MEMS

 #37
20150345196
2015-12-03

MEMS hinges with enhanced rotatability

 #38
20150266727
2015-09-24

MEMS device with non-planar features

 #39
20150246808
2015-09-03

Rotary nanotube bearing structure and methods for manufacturing and using the same

 #40
20150232327
2015-08-20

Sensor and method for manufacturing a sensor

 #41
20150111332
2015-04-23

Method and device of MEMS process control monitoring and packaged MEMS with different cavity pressures

 #42
20150102437
2015-04-16

MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING AND METHOD OF FABRICATION

 #43
20150028434
2015-01-29

Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer

 #44
20140308738
2014-10-16

Microfluidic device with integrated stirring structure and manufacturing method thereof

 #45
20140057104
2014-02-27

Process for fabricating high-precision objects by high-resolution lithography and dry deposition and objects thus obtained

 #46
20130220016
2013-08-29

Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor

 #47
20130098866
2013-04-25

Rotary nanotube bearing structure and methods for manufacturing and using the same

 #48
20120219772
2012-08-30

SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBLING OF LONGITUDINAL NANO-STRUCTURES

 #49
20110311791
2011-12-22

System and method for precision transport, positioning, and assembling of longitudinal nano-structures

 #50
20100061143
2010-03-11

Assembling and applying nano-electro-mechanical systems

 #51
20090317233
2009-12-24

Rotary nanotube bearing structure and methods for manufacturing and using the same

 #52
20090278628
2009-11-12

Integrated single-crystal MEMS device

 #53
20060156445
2006-07-13

Molecular motor power-supplying device