83948 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems; Integrating an electronic processing unit with a micromechanical structure Processes for integrating an electronic processing unit with a micromechanical structure not provided for in -
Sensor and method for reducing an interference signal component in a measuring signal from a sensor
#2Composite structures
#3Microphone device
#4Two-port SRAM connection structure
#5Two-port SRAM connection structure
#6Component part having a MECS component on a mounting carrier
#7Physical quantity sensor, electronic apparatus, and moving object
#8MEMS device with a capping substrate
#9MEMS fabrication process with two cavities operating at different pressures
#10Apparatus comprising and a method for manufacturing an embedded MEMS device
#11Physical quantity sensor, electronic apparatus, and moving object
#12Electronic device, integrated circuit, electronic apparatus, and moving object
#13Microphone system with integrated passive device die
#14Apparatus comprising and a method for manufacturing an embedded MEMS device
#15Micromechanical component having a diaphragm
#16MEMS-microphone
#17Forming a micro electro mechanical system
#18INTEGRATION OF VACUUM MICROELECTRONIC DEVICE WITH INTEGRATED CIRCUIT
#19Electronic device and method of manufacturing same
#20Bonded Microfluidics System Comprising CMOS-Controllable Microfluidic Devices
#21Semiconductor device having an adhesive portion with a stacked structure and method for manufacturing the same
#22Integrated sensor and circuitry
#23Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards
#24Integrated quartz oscillator on an active electronic substrate
#25Integrated passive device and method of fabrication
#26Integrated sensor and circuitry and process therefor
#27Micro electro mechanical system
#28Integration of vacuum microelectronic device with integrated circuit
#29Method for forming and sealing a cavity for an integrated MEMS device
#30Integrated sensor and circuitry and process therefor
#31Integrated circuit on high performance chip
#32Method and apparatus for preventing metal/silicon spiking in MEMS devices
#33LTCC-based modular MEMS phased array