83959 ⎘
Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems Processes for manufacturing microsystems not provided for in groups -
MEMS SENSOR ARRANGEMENT AND METHOD FOR MANUFACTURING A MEMS SENSOR ARRANGEMENT
#2Stacked-die MEMS resonator
#3A SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECHANICAL SYSTEMS DEVICES
#43D Heterogeneously Integrated Power Electronic Building Blocks
#5STACKED-DIE MEMS RESONATOR
#6ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF MAKING
#7CARTRIDGE INTERFERENCE
#8ELECTROMECHANICAL MICROSYSTEM
#9Semiconductor device comprising different types of microelectromechanical systems devices
#10MEMS resonator system
#11MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
#12MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication method thereof
#13MEMS CHIP, MANUFACTURING METHOD THEREOF, MEMS DEVICE, AND ELECTRONIC DEVICE
#14METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIVE PRESSURE SENSOR AND AN INERTIAL SENSOR, AND INTEGRATED SYSTEM
#15Stacked-die MEMS resonator
#16Micromechanical sensor device and corresponding production method
#17Stacked-die MEMS resonator
#18Semiconductor device comprising different types of microelectromechanical systems devices
#19Dielectric comb for MEMS device
#20Integrated structure of mems microphone and air pressure sensor and fabrication method thereof
#21Manufacturing of integrated circuit resonator
#22Stiction reduction system and method thereof
#23Micromechanical device with via strut
#24Package structure for micromechanical resonator
#25MEMS devices with an element having varying widths
#26Discharge circuits, devices and methods
#27Three-dimensional micro devices and method for their production
#28Method for coating microstructured components
#29Microstructure manufacturing method and ION beam apparatus
#30MEMS inertial sensor and forming method therefor
#31Low-profile stacked-die MEMS resonator system
#32SYSTEMS AND METHODS FOR FACILITATING REPAIR OF INOPERABLE MEMS DISPLAY ELEMENTS
#33Stacked-die MEMS resonator system
#34Method of detecting sound using a micro-electro-mechanical system optical microphone
#35Photostructured chemical devices and methods for making same
#36Dual substrate electrostatic MEMS switch with multiple hinges and method of manufacture
#37RF MEMS electrodes with limited grain growth
#38MEMS Display Manufacturing Method
#39MEMS device and method for manufacturing a MEMS device
#40Electromechanical devices and methods for fabrication of the same
#41Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
#42Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring
#43MEMS devices having discharge circuits
#44Micro-electro-mechanical system optical sensor with tilt plates
#45MEMS swtich with internal conductive path
#46PROCESS FOR HYBRIDIZING BY ADHESIVE BONDING TWO MICROELECTRONIC ELEMENTS
#47Method of forming MEMS device
#48Variable area capacitive lateral acceleration sensor and preparation method thereof
#49Photostructured chemical devices and methods for making same
#50Capacitive acceleration sensor with a bending elastic beam and preparation method thereof
#51Microchip structure and treatments for electrochemical detection
#52Method for producing a functional unit and corresponding functional unit
#53MEMS switch device and method of fabrication
#54Method for producing a pressure sensor and corresponding sensor
#55Micro-electromechanical reflector and method for manufacturing a micro-electromechanical reflector
#56Varistor in base for MEMS microphones
#57Method of manufacturing MEMS devices with reliable hermetic seal
#58Micromechanical component, manufacturing method for a micromechanical component and method for mounting a micromechanical component
#59Methods for fabricating micro-devices
#60SURFACE ROUGHENING TO REDUCE ADHESION IN AN INTEGRATED MEMS DEVICE
#61Microstructure plating systems and methods
#62SURFACE CHARGE MITIGATION LAYER FOR MEMS SENSORS
#63Method for forming microelectrode-pair arrays on silicon substrate surface with hydrophobic silicon pillars
#64ESD protection for MEMS resonator devices
#65Micro-device on glass
#66Methods for forming a sealed liquid metal drop
#67MEMS inertial sensor and forming method therefor
#68MEMS devices and methods of forming the same
#69Method of manufacturing a switch system
#70Electromechanical devices and methods for fabrication of the same
#71Stacked die package for MEMS resonator system
#72Method of fabricating micro-devices
#73Photostructured chemical devices and methods for making same
#74Method for manufacturing nanostructure and nanostructure manufactured by the same
#75Stacked die package for MEMS resonator system
#76Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays
#77Fixed parallel plate MEMS capacitor microsensor array
#78Templated nanostructure sensors and methods of manufacture
#79Templated nanostructure sensors and methods of manufacture