83962 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Creating layers of material on a substrate having low tensile stress between layers
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUBSTRATES USING SEED LAYERS
#2Method of forming monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers
#3Method for Controlling Stress in a Substrate During Laser Deposition
#4Hybrid Metal and Carbon or Glassy Carbon MEMS u-ECOG Electrode and Microelectrode Structures
#5Planar cavity MEMS and related structures, methods of manufacture and design structures
#6Planar cavity MEMS and related structures, methods of manufacture and design structures
#7Planar cavity mems and related structures, methods of manufacture and design structures
#8Planar cavity MEMS and related structures, methods of manufacture and design structures
#9Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus
#10Planar cavity MEMS and related structures, methods of manufacture and design structures
#11Planar cavity MEMS and related structures, methods of manufacture and design structures
#12Planar cavity MEMS and related structures, methods of manufacture and design structures
#13Planar cavity MEMS and related structures, methods of manufacture and design structures
#14Planar cavity MEMS and related structures, methods of manufacture and design structures
#15Planar cavity MEMS and related structures, methods of manufacture and design structures
#16Planar cavity MEMS and related structures, methods of manufacture and design structures
#17Planar cavity MEMS and related structures, methods of manufacture and design structures
#18Micro-electro-mechanical system (MEMS) structures and design structures
#19Micro-electro-mechanical system (MEMS) structures and design structures
#20Micro-electro-mechanical system (MEMS) structures and design structures
#21Planar cavity MEMS and related structures, methods of manufacture and design structures
#22Planar cavity MEMS and related structures, methods of manufacture and design structures
#23Planar cavity MEMS and related structures, methods of manufacture and design structures
#24Planar cavity MEMS and related structures, methods of manufacture and design structures
#25Planar cavity MEMS and related structures, methods of manufacture and design structures
#26Planar cavity MEMS and related structures, methods of manufacture and design structures
#27Planar cavity MEMS and related structures, methods of manufacture and design structures
#28Stress isolation features for stacked dies
#29Planar cavity MEMS and related structures, methods of manufacture and design structures
#30Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
#31Planar cavity MEMS and related structures, methods of manufacture and design structures
#32Planar cavity MEMS and related structures, methods of manufacture and design structures
#33Planar cavity MEMS and related structures, methods of manufacture and design structures
#34Planar cavity MEMS and related structures, methods of manufacture and design structures
#35Device and method of manufacturing the same
#36Micro-electro-mechanical system (MEMS) structures and design structures
#37Micro-electro-mechanical system (MEMS) structures and design structures
#38Micro-Electro-Mechanical System (MEMS) structures and design structures
#39Planar cavity MEMS and related structures, methods of manufacture and design structures
#40Planar cavity MEMS and related structures, methods of manufacture and design structures
#41Planar cavity MEMS and related structures, methods of manufacture and design structures
#42Planar cavity MEMS and related structures, methods of manufacture and design structures
#43Planar cavity MEMS and related structures, methods of manufacture and design structures
#44Planar cavity MEMS and related structures, methods of manufacture and design structures
#45Use of metal native oxide to control stress gradient and bending moment of a released MEMS structure
#46Microelectromechanical systems devices with improved lateral sensitivity
#47Micro-electro-mechanical system (MEMS) structures and design structures
#48Planar cavity MEMS and related structures, methods of manufacture and design structures
#49Method for forming micro-electro-mechanical system (MEMS) beam structure
#50Substrate structure and method for manufacturing same
#51Planar cavity MEMS and related structures, methods of manufacture and design structures
#52Planar cavity MEMS and related structures, methods of manufacture and design structures
#53Planar cavity MEMS and related structures, methods of manufacture and design structures
#54Planar cavity MEMS and related structures, methods of manufacture and design structures
#55Planar cavity MEMS and related structures, methods of manufacture and design structures
#56Methods of manufacture for micro-electro-mechanical system (MEMS)
#57Planar cavity MEMS and related structures, methods of manufacture and design structures
#58Planar cavity MEMS and related structures, methods of manufacture and design structures
#59Method of manufacturing a micro-electro-mechanical system (MEMS)
#60Boron doped shell for MEMS device
#61Low compressive TiNx, materials and methods of making the same
#62Substrate for stressed systems and method of making same
#63Method of forming a wear-resistant dielectric layer
#64Substrate for stressed systems and method of making same
#65Substrate for stressed systems and method of making same
#66Substrate flattening method