83964 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Creating layers of material on a substrate Processes for creating layers of materials not provided for in groups -
Forming Antirelaxation Coatings on Interior Surfaces of Vapor Cells
#2MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
#3MITIGATION OF CONTAMINATION OF ELECTROPLATED COBALT-PLATINUM FILMS ON SUBSTRATES
#4METHOD FOR MANUFACTURING NANOPARTICLE ARRAY, SURFACE PLASMON RESONANCE-BASED SENSOR AND METHOD FOR ANALYZING USING SAME
#5Imprinted substrates
#6Stacked structure and method for manufacturing the same
#7Method of treating a solid layer bonded to a carrier substrate
#8Post-processing techniques on mems foundry fabricated devices for large angle beamsteering
#9Method of manufacturing electroplated cobalt-platinum films on substrates
#10Selective step coverage for micro-fabricated structures
#11MEMS electrothermal actuator for large angle beamsteering
#12Interfacial Convective Assembly for High Aspect Ratio Structures Without Surface Treatment
#13METHOD FOR MANUFACTURING NANOPARTICLE ARRAY, SURFACE PLASMON RESONANCE-BASED SENSOR AND METHOD FOR ANALYZING USING SAME
#14Deposition of protective material at wafer level in front end for early stage particle and moisture protection
#15Flexible electronics for wearable healthcare sensors
#16Deposition of protective material at wafer level in front end for early stage particle and moisture protection
#17Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
#18Impact element for a sensor device and a manufacturing method
#19Method for coating microstructured components
#20Flexible electronics for wearable healthcare sensors
#21Method for the material-saving production of wafers and processing of wafers
#22Coating method using particle alignment and particle coated substrate manufactured thereby
#23Dielectric cladding of microelectromechanical systems (MEMS) elements for improved reliability
#24MEMS sensors with selectively adjusted damping of suspension
#25Laminate
#26Imprinted substrates
#27Flexible electronics for wearable healthcare sensors
#28Method of forming space for use in analysis devices
#29MEMS electrical contact systems and methods
#30Atomic Layer Deposition Layer for a Microelectromechanical system (MEMS) Device
#31Mitigation of contamination of electroplated cobalt-platinum films on substrates
#32Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
#33Infrared sensor design using an epoxy film as an infrared absorption layer
#34Versatile process for precision nanoscale manufacturing
#35Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#36Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)
#37Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation
#38Systems and methods for laser splitting and device layer transfer
#39Methods of forming nano-scale and micro-scale structured materials and materials formed thereby
#40Process for forming graphene layers on silicon carbide
#41Method for achieving good adhesion between dielectric and organic material
#42Method for manufacturing nanoparticle array, surface plasmon resonance-based sensor and method for analyzing using same
#43Low-stress doped ultrananocrystalline diamond
#44MEMS structure with improved shielding and method
#45Trapped sacrificial structures and methods of manufacturing same using thin-film encapsulation
#46Membrane transducer structures and methods of manufacturing same using thin-film encapsulation
#47Methods and structures for thin-film encapsulation and co-integration of same with microelectronic devices and microelectromechanical systems (MEMS)
#48METHOD FOR REDUCING DISCHARGE DEFECTS AND ELECTRODE DELAMINATION IN PIEZOELECTRIC OPTICAL MEMS DEVICES
#49Capacitive MEMS sensor and method
#50Dielectric polyurethane film
#51MEMS device and method of forming the same
#52DEVICE PACKAGING METHOD AND DEVICE PACKAGE USING THE SAME
#53MEMS device having a getter structure and method of forming the same
#54MEMS device and formation method thereof
#55Methods of forming MEMS device
#56MEMS device and method of manufacturing the same
#57INFRARED SENSOR DESIGN USING AN EPOXY FILM AS AN INFRARED ABSORPTION LAYER
#58METHOD OF FABRICATING ISOLATING SEMICONDUCTOR STRUCTURES
#59Liquid deposition composition and process for forming metal therefrom
#60Method for the prevention of suspended silicon structure etching during reactive ion etching
#61Three-dimensional high surface area electrodes
#62METHOD FOR FABRICATING MULTI-TRENCH STRUCTURE
#63MEMS device with release aperture
#64Coating method using particle alignment and particle coated substrate manufactured thereby
#65MEMS chip and manufacturing method therefor
#66MEMS electrical contact systems and methods
#67Vibration device including support portion
#68Reducing MEMS stiction by introduction of a carbon barrier
#69Electroactive polymer structures printed with varying compositions of ions
#70Reducing microelectromechanical systems stiction by formation of a silicon carbide layer
#71MEMS structure with improved shielding and method
#72Method of forming a bond ring for a first and second substrate
#73DEPOSITION TECHNIQUE FOR DEPOSITING A COATING ON A DEVICE
#74MEMS DEVICE AND METHOD OF MANUFACTURING THE SAME
#75MEMS device with release aperture
#76Anisotropic conductor and method of fabrication thereof
#77Reducing MEMS stiction by introduction of a carbon barrier
#78Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#79Functional nanostructured “jelly rolls” with nanosheet components
#80MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
#81Carbon nanotube film structure and method for manufacturing the same
#82Method for the automated production consisting of a molecular layer of amphiphilic molecules and a device for producing said molecular layer
#83Laminate, production method for same, and method of creating device structure using laminate
#84Durable, heat-resistant multi-layer coatings and coated articles
#85Interfacial convective assembly for high aspect ratio structures without surface treatment
#86Silicon hardmask layer for directed self-assembly
#87METHOD FOR PRODUCING A THIN SINGLE CRYSTAL SILICON HAVING LARGE SURFACE AREA
#88Method of fabricating isolating semiconductor structures using a layout of trenches and openings
#89Methods for producing a thin film consisting of nanosheet monolayer film(s) by spin coat methods, and hyperhydrophilized materials, substrates for an oxide thin film and dielectric materials obtained therefrom
#90HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS
#91Making a microfluidic device with improved adhesion
#92METHOD OF FABRICATING LIQUID FILM, METHOD OF ARRANGING NANO PARTICLES AND SUBSTRATE HAVING LIQUID THIN FILM FABRICATED USING THE SAME
#93Input device with tactile feedback
#94Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#95Infrared sensor design using an epoxy film as an infrared absorption layer
#96Method for forming a multilayer structure
#97MEMS device with release aperture
#98Handling layer for transparent substrate
#99Conformal coating of highly structured surfaces
#100Bond ring for a first and second substrate
#101CONTROLLED PROCESS AND RESULTING DEVICE
#102Method for manufacturing chips
#103Carbon nanotube film structure and method for manufacturing the same
#104Methods of and Apparatus for Electrochemically Fabricating Structures Via Interlaced Layers or Via Selective Etching and Filling of Voids
#105METHOD FOR TRANSFERRING AN EPITAXIAL LAYER FROM A DONOR WAFER TO A SYSTEM WAFER APPERTAINING TO MICROSYSTEMS TECHNOLOGY
#106STRUCTURED LAYER DEPOSITION ON PROCESSED WAFERS USED IN MICROSYSTEM TECHNOLOGY
#107Controlled process and resulting device
#108Method for producing partial SOI structures comprising zones connecting a superficial layer and a substrate
#109Method for transferring a nanolayer
#110Lithographically defined adhesion microstructures
#111Probes, Methods of Making Probes, and Applications using Probes
#112Printable, flexible and stretchable diamond for thermal management
#113Manufacturing method of an electromechanical transducer
#114Methods for depositing nanomaterial, methods for fabricating a device, methods for fabricating an array of devices and compositions
#115Process for modifying the properties of a thin layer and substrate applying said process
#116Batch Process for Coating Nanoscale Features and Devices Manufactured From Same
#117Method and device for controlled cleaving process
#118Method of fabricating liquid film, method of arranging nano particles and substrate having liquid thin film fabricated using the same
#119THICK ACTIVE LAYER FOR MEMS DEVICE USING WAFER DISSOLVE PROCESS
#120Durable, heat-resistant multi-layer coatings and coated articles
#121Controlled process and resulting device
#122Microneedle Arrays and Methods of Preparing Same
#123Process for wafer bonding
#124Sub-micron decal transfer lithography
#125Controlled cleaving process
#126Microstructures, microdevices and related methods
#127Method of wafer-to-wafer bonding
#128Method and device for controlled cleaving process
#129Controlled process and resulting device
#130Patterning nanowires on surfaces for fabricating nanoscale electronic devices
#131Polishing Piezoelectric Material
#132Use of tungsten interlayer to enhance the initial nucleation and conformality of ultrananocrystalline diamond (UNCD) thin films
#133Electrochemical deposition method, electrochemical deposition apparatus, and microstructure
#134Method for producing partial SOI structures comprising zones connecting a superficial layer and a substrate
#135Delamination resistant semiconductor film and method for forming the same
#136Material comprising predetermined number of atomic layers and method for manufacturing predetermined number of atomic layers
#137Controlled process and resulting device
#138CONTROLLED PROCESS AND RESULTING DEVICE
#139Controlled process and resulting device
#140Hybrid microfluidic chip and method for manufacturing same
#141Method of fabricating multi layer MEMS and microfluidic devices
#142Thin film device and thin film inductor
#143Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids
#144Methods of and apparatus for making high aspect ratio microelectromechanical structures
#145Film stack for manufacturing micro-electromechanical systems (MEMS) devices
#146High density interconnections with nanowiring
#147Creation of hermetically sealed dielectrically isolating trenches
#148Process for cutting out a block of material and formation of a thin film
#149Controlled cleaving process
#150Decal transfer lithography
#151Method for producing carbon surface films by plasma exposure of a carbide compound
#152Method of foming a micromechanical structure
#153IMPROVED DECAL SOLDER TRANSFER METHOD
#154Method for depositing silicon by pulsed cathodic vacuum arc
#155Systems and methods for filling voids and improving properties of porous thin films
#156Method of altering the properties of a thin film and substrate implementing said method
#157Controlled cleaving process
#158Method for handling semiconductor layers in such a way as to thin same
#159Vertical integrated circuits
#160Method and device for controlled cleaving process
#161Thin films and production methods thereof
#162Method of forming a micromechanical structure
#163Flexible electronics for wearable healthcare sensors
#164Flexible electronics for wearable healthcare sensors