B81C2900/00 - CPC Classification Index

ClassID:

84186 ⎘

B81C2900/00 - CPC Classification

Classification description:

Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems

Sub-classes:

HIGH SPEED MANUFACTURE OF MICRO-ELECTRICAL MECHANICAL SYSTEMS ARRAYS

Method and apparatus for manufacturing microfluidic chip with femtosecond plasma grating

Method for inflating micro-channels

DEVICES WITH THINNED WAFER

System and method for precision fabrication of micro- and nano-devices and structures