84043 ⎘
Subject matter not provided for in other groups of this subclass; Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same for cutting, cleaving or grinding
HIGH SPEED MANUFACTURE OF MICRO-ELECTRICAL MECHANICAL SYSTEMS ARRAYS
#2METHOD FOR MANUFACTURING A MICROMECHANICAL FASTENING ELEMENT, SHAPING TOOL FOR PRODUCING AN IMPRESSION OF THE MICROMECHANICAL FASTENING ELEMENT, AND MICROMECHANICAL FASTENING ELEMENT
#3Shaping nanomaterials by short electrical pulses
#4Lathe Head for Nano/Micro Machining of Materials
#5MEMS manufacturing method and MEMS manufacturing apparatus
#6Electrostatic chuck table using method
#7DEVICES WITH THINNED WAFER
#8Lathe head for nano/micro machining of materials
#9Reconstruction Of Scanning Probe Microscopy Cantilever Tip
#10Systems and methods for controlling wafer-breaker devices
#11Lathe head for nano/micro machining of materials
#12Bonded wafer assembly system and method
#13Sacrificial substrate for etching