Patents-Review.com
ClassID:

84046 ⎘

B81C99/0025 - CPC Classification

Classification description:

Subject matter not provided for in other groups of this subclass; Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems not provided for in  - 

Recent Application in this class:
#1
20240182294
2024-06-06

ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

 #2
20240087941
2024-03-14

INTEGRATED DICING DIE BONDING SHEET AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

 #3
20240002220
2024-01-04

Self-packing three-arm thermal scanning probe for micro-nano manufacturing

 #4
20230287555
2023-09-14

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND METHOD OF FABRICATION THEREOF

 #5
20220340416
2022-10-27

A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE

 #6
20220332571
2022-10-20

Semiconductor removing apparatus and operation method thereof

 #7
20210292216
2021-09-23

Additive manufacturing processes and manufactured article

 #8
20210061650
2021-03-04

Transparent material processing method, transparent material processing device, and transparent material

 #9
20210005439
2021-01-07

Deposition Apparatus

 #10
20200071161
2020-03-05

Method and system for fabricating a microelectromechanical system device with a movable portion using anodic etching of a sacrificial layer

 #11
20190359482
2019-11-28

METHOD AND APPARATUS FOR ETCHING A SUBSTRATE

 #12
20190267271
2019-08-29

Transfer head and method for transferring micro devices

 #13
20190084830
2019-03-21

MEMS manufacturing system and MEMS manufacturing method

 #14
20190062157
2019-02-28

Micro-electro-mechanical-systems processing method, and micro-electro-mechanical-systems processing apparatus

 #15
20180362336
2018-12-20

Microelectro-mechanical system device and method for electrostatic bonding the same

 #16
20180267075
2018-09-20

MEMS manufacturing method and MEMS manufacturing apparatus

 #17
20180237325
2018-08-23

Additive manufacturing processes and manufactured article

 #18
20180141265
2018-05-24

Methods and systems for fast imprinting of nanometer scale features in a workpiece

 #19
20180091905
2018-03-29

Circuit board module comprising a continuous cavity, associated sonic transducer assembly, and production method

 #20
20180090351
2018-03-29

Adhesive tape separating tool, manufacturing apparatus of semiconductor chip, manufacturing apparatus of MEMS device manufacturing apparatus of liquid ejecting head, and separating method of adhesive tape

 #21
20180005906
2018-01-04

Device manufacturing method and device manufacturing apparatus

 #22
20170362082
2017-12-21

Microstructure processing method and microstructure processing apparatus

 #23
20160298241
2016-10-13

Method of manufacturing micro-array substrate

 #24
20160236929
2016-08-18

Method for manufacturing microcantilever

 #25
20160185592
2016-06-30

Method of selectively removing an anti-stiction layer on a eutectic bonding area

 #26
20160107189
2016-04-21

System for manufacturing microneedle preparation, and air-conditioning method

 #27
20160099132
2016-04-07

Ultra-high speed anisotropic reactive ion etching

 #28
20150251904
2015-09-10

Room temperature bonding apparatus and room temperature bonding method

 #29
20150249026
2015-09-03

ROOM-TEMPERATURE BONDING APPARATUS AND ROOM-TEMPERATURE BONDING METHOD

 #30
20150239172
2015-08-27

Methods and systems for fast imprinting of nanometer scale features in a workpiece

 #31
20150140717
2015-05-21

Method for manufacturing a structured surface

 #32
20140363975
2014-12-11

Substrate etching method and substrate processing device

 #33
20140299947
2014-10-09

Inertial angular sensor of balanced MEMS type and method for balancing such a sensor

 #34
20140166618
2014-06-19

ULTRA-HIGH SPEED ANISOTROPIC REACTIVE ION ETCHING

 #35
20140137962
2014-05-22

Microfluidic surface processing systems with self-regulated distance-to surface control

 #36
20140134336
2014-05-15

Nanopositioning substrate preparation apparatus and preparation method using dip pen nanolithography with a single tip or multiple tips using atomic force microscope (AFM)

 #37
20140090715
2014-04-03

Microfluidic surface processing systems with self-regulated distance-to surface control

 #38
20140033977
2014-02-06

Micropattern generation with pulsed laser diffraction

 #39
20130196083
2013-08-01

Micropattern generation with pulsed laser diffraction

 #40
20130056036
2013-03-07

Integrated processing and critical point drying systems for semiconductor and MEMS devices

 #41
20120276746
2012-11-01

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE

 #42
20120043300
2012-02-23

NanoNeedles Pulling System

 #43
20120031557
2012-02-09

Bonding unit control unit and multi-layer bonding method

 #44
20120015069
2012-01-19

Nano pattern writer

 #45
20110274839
2011-11-10

Cantilevers for deposition

 #46
20110177978
2011-07-21

Apparatus and method for forming self-assembly arrays

 #47
20110049760
2011-03-03

Nano pattern writer

 #48
20070237897
2007-10-11

Device and method for coating a microstructured and/or nanostructured structural substrate

 #49
20060076316
2006-04-13

Atmospheric process and system for controlled and rapid removal of polymers from high aspect ratio holes

 #50
20050139939
2005-06-30

Wafer protection device

 #51
17354474
2024-03-12

Methods, apparatus, and systems for fabricating solution-based conductive 2D and 3D electronic circuits