B81C99/003 - CPC Classification Index

#1

20260042662

2026-02-12

PACKAGED MEMS DEVICE HAVING A HUMIDITY SENSOR

#2

20260035235

2026-02-05

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

#3

20250187909

2025-06-12

MICRO-ASSEMBLER SYSTEM WITH MICRO-OBJECT TRAP LOCATIONS

#4

20240281955

2024-08-22

METHOD AND A SYSTEM FOR CHARACTERISING STRUCTURES THROUGH A SUBSTRATE

#5

20240166500

2024-05-23

METHOD AND DEVICE FOR ASCERTAINING DYNAMIC PARAMETERS OF A MEMS APPARATUS, AND MEMS APPARATUS

#6

20240017990

2024-01-18

METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE STRUCTURES IN AN ELECTROCHEMICAL FABRICATION SYSTEM

#7

20230377121

2023-11-23

Method and a system for characterising structures through a substrate

#8

20230358781

2023-11-09

Systems and methods for thermally regulating sensor operation

#9

20220089432

2022-03-24

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

#10

20200045485

2020-02-06

MEMS transducer system and associated methods

#11

20190391176

2019-12-26

Systems and methods for thermally regulating sensor operation

#12

20190359479

2019-11-28

MEMS sensor compensation for off-axis movement

#13

20190241427

2019-08-08

Method and apparatus for evaluating electrostatic or nonlinear devices

#14

20190144264

2019-05-16

MEMS sensor compensation for off-axis movement

#15

20190097578

2019-03-28

Method for determining the quality factor of an oscillator

#16

20180335326

2018-11-22

Sensor device with integrated calibration system and calibration method

#17

20180288547

2018-10-04

MEMS transducer system and associated methods

#18

20180259376

2018-09-13

Environmental sensor

#19

20180069507

2018-03-08

Self-tuning microelectromechanical impedance matching circuits and methods of fabrication

#20

20170363424

2017-12-21

Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface

#21

20170184629

2017-06-29

Systems and methods for thermally regulating sensor operation

#22

20170099535

2017-04-06

Electric device, in particular a microphone having re-adjustable sensitivity, and adjustment method

#23

20170089966

2017-03-30

Capacitance measurement

#24

20160297677

2016-10-13

Internally generated DFT stepped hysteresis sweep for electrostatic MEMS

#25

20160236931

2016-08-18

MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME

#26

20160178415

2016-06-23

Device and method for sensor calibration

#27

20160167961

2016-06-16

Compensation and calibration for MEMS devices

#28

20150293145

2015-10-15

Calibration of a mechanical property of SPM cantilevers

#29

20150276547

2015-10-01

Detecting failure of scanning mirror

#30

20150252322

2015-09-10

Methods, apparatus, and systems for fabrication of polymeric nano- and micro-fibers in aligned configurations

#31

20150219537

2015-08-06

Torsional and lateral stiffness measurement

#32

20150177126

2015-06-25

Method and system for characterization of nano- and micromechanical structures

#33

20150160089

2015-06-11

Pressure sensor with built-in calibration capability

#34

20150082856

2015-03-26

Sensor device with integrated calibration system and calibration method

#35

20150062681

2015-03-05

Method for adapting the parameters of a controller for micromechanical actuators, and device

#36

20140299947

2014-10-09

Inertial angular sensor of balanced MEMS type and method for balancing such a sensor

#37

20140260508

2014-09-18

Compensation and calibration for MEMS devices

#38

20140117888

2014-05-01

Mechanical component, mechanical system, and method for operating a mechanical component

#39

20140083164

2014-03-27

Calibration of MEMS sensor

#40

20130263643

2013-10-10

Method for measuring a microelectromechanical semiconductor component

#41

20130247688

2013-09-26

Method and device for measuring a microelectromechanical semiconductor component

#42

20120235981

2012-09-20

System and method of sensing actuation and release voltages of an interferometric modulator

#43

20120212468

2012-08-23

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

#44

20120186365

2012-07-26

System for mechanical characterization of materials and biological samples in the sub-millinewton force range

#45

20120153973

2012-06-21

On-chip measurement of capacitance for micro-electro-mechanical system (MEMS) actuator circuit

#46

20120126836

2012-05-24

Microelectromechanical structure (MEMS) monitoring

#47

20110185458

2011-07-28

Force, pressure, or stiffness measurement or calibration using graphene or other sheet membrane

#48

20110140692

2011-06-16

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

#49

20110025350

2011-02-03

Method of measuring micro- and nano-scale properties

#50

20100321027

2010-12-23

Methods and Systems for Detection Using Threshold-Type Electrostatic Sensors

#51

20100039409

2010-02-18

Method and apparatus for sensing, measurement or characterization of display elements integrated with the display drive scheme, and system and applications using the same

#52

20100028999

2010-02-04

Methods, apparatus, and systems for fabrication of polymeric nano- and micro-fibers in aligned configurations

#53

20090224748

2009-09-10

System and method of sensing actuation and release voltages of an interferometric modulator

#54

20090213107

2009-08-27

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

#55

20090207159

2009-08-20

METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME

#56

20080239611

2008-10-02

Apparatus and method for drive controlling micro machine device

#57

20070045537

2007-03-01

Microsystem manipulation apparatus

#58

20060044298

2006-03-02

System and method of sensing actuation and release voltages of an interferometric modulator

#59

15265340

2018-12-04

Trimming method for microresonators and microresonators made thereby

#60

14987685

2019-04-23

Method to test the quality factor of a MEMS gyroscope at chip probe