DIFFRACTIVE OPTICAL ELEMENTS AND MASTER TOOLS FOR PRODUCING THE DIFFRACTIVE OPTICAL ELEMENTS

Ultra-High Frequency MEMS Resonators with First and Second Order Temperature-Induced Frequency Drift Compensation

SYSTEM AND METHOD FOR DESIGNING A SCANNING MIRROR ASSEMBLY WITH AN OPTIMIZED FREQUENCY BANDWIDTH BASED ON SPRING CONSTANT INFORMATION

MEMS manufacturing system and MEMS manufacturing method

Microfluidic device with multi-level, programmable microfluidic node

Sizing of a microfluidic device for confining a sample

Device Designing Method and Device Designing Apparatus

Micromechanical spring device and method for manufacturing a micromechanical spring device

Microfluidics planar placement and routing algorithm

Nano-electromechanical switch

System and method for extracting relevant computational data for design analysis and validation

Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems

Thermal bend actuator material selection

MICRO--ELECTROMECHANICAL ACTUATOR WITH SPACER SEPARATED LAYERS

Thermoelastic device with preselected resistivity, inertness and deposition characteristics

Thermoelastic device comprising an expansive element formed from a preselected material

Micro-electromechanical actuator

Computer aided design method and system for developing a microfluidic system

Microfluidic design automation method and system

Thermoelastic device comprising an expansive element formed from a preselected material

Micromechanical sensor having a self-test function and optimization method