84227 ⎘
Manufacture or treatment of nanostructures
Integrated circuits having interconnects and heat dissipators based on nanostructures
#8102Plasmon resonant cavities in vertical nanowire arrays
#8103Direct write lithography system
#8104EMITTING APPARATUS FOR WASHING LIGHT NANOIMPRINT TEMPLATE AND METHOD FOR THE SAME
#8105IMPRINTING DEVICE AND IMPRINTING METHOD
#8106Imprint lithography apparatus and method
#8107Semiconductor device, method of manufacturing the same, and electronic device including the semiconductor device
#8108Fluorescent silica nanoparticles through silica densification
#8109ELECTRON BEAM SOURCE SYSTEM AND METHOD
#8110Superhydrophobic/amphiphilic(oleophilic) surface with nano structure and the fabrication method thereof
#8111TEMPLATE SUBSTRATE PROCESSING APPARATUS AND TEMPLATE SUBSTRATE PROCESSING METHOD
#8112Device for recovering nanopowders and ultrafine powders contained in a gas
#8113METHOD AND SYSTEM FOR DESIGN OF A SURFACE TO BE MANUFACTURED USING CHARGED PARTICLE BEAM LITHOGRAPHY
#8114Method for compensating proximity effects of particle beam lithography processes
#8115METHOD AND SYSTEM FOR DESIGN OF ENHANCED ACCURACY PATTERNS FOR CHARGED PARTICLE BEAM LITHOGRAPHY
#8116Carbon nanotube forming method and pre-treatment method therefor
#8117DRAWING APPARATUS, DRAWING METHOD AND METHOD OF MANUFACTURING ARTICLE
#8118Optical member for EUV lithography, and process for production of reflective layer-equipped substrate
#8119METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH VARIABLE PATTERN DOSAGE
#8120Solution based nanostructured carbon materials (NCM) coatings on bipolar plates in fuel cells
#8121Method for producing hollow nanoparticle comprising deposition on/in an ionic liquid, hollow nanoparticle, and dispersion liquid thereof
#8122SYSTEM AND METHOD FOR PRECISION TRANSPORT, POSITIONING, AND ASSEMBLING OF LONGITUDINAL NANO-STRUCTURES
#8123SINGLE PARTICLE FILM ETCHING MASK AND PRODUCTION METHOD OF SINGLE PARTICLE FILM ETCHING MASK, PRODUCTION METHOD OF MICRO STRUCTURE WITH USE OF SINGLE PARTICLE FILM ETCHING MASK AND MICRO STRUCTURE PRODUCED BY MICRO STRUCTURE PRODUCTION METHOD
#8124NANOMATERIAL-BASED FILMS PATTERNED USING A SOLUBLE COATING
#8125Method for simultaneously producing carbon nanotubes and hydrogen, and device for simultaneously producing carbon nanotubes and hydrogen
#8126Carbon nanostructures from pyrolysis of organic materials
#8127Spin torque magnetic integrated circuits and devices therefor
#8128Fluorinated silazane release agents in nanoimprint lithography
#8129IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
#8130Method for preparation of well-dispersed, discrete nanoparticles by spray drying techniques
#8131Magnetic tunnel junction having coherent tunneling structure
#8132MOSFET with a nanowire channel and fully silicided (FUSI) wrapped around gate
#8133Metallic Nanofiber Ink, Substantially Transparent Conductor, and Fabrication Method
#8134METHOD AND SYSTEM FOR FORMING PATTERNS USING CHARGED PARTICLE BEAM LITHOGRAPHY WITH OVERLAPPING SHOTS
#8135Method using block copolymers for making a master mold for nanoimprinting patterned magnetic recording disks with chevron servo patterns
#8136Photoresponsive ionic organic compound, method of producing the same, and photoresponsive carbon nanotube dispersant comprising said ionic organic compound
#8137Wet chemical and plasma methods of forming stable PtPd catalysts
#8138Catalyst for synthesis of hydrocarbons from CO and Hand preparation method thereof
#8139Method of fabricating semiconductor device
#8140Method of manufacturing a photomask
#8141Graphene hybrid materials, apparatuses, systems and methods
#8142GRAPHITE NANO-CARBON FIBER AND METHOD OF PRODUCING THE SAME
#8143Flexible Zn2SnO4/MnO2 Core/Shell Nanocable - Carbon Microfiber Hybrid Composites for High Performance Supercapacitor Electrodes
#8144X-RAY ABSORBING COMPOSITIONS AND METHODS OF MAKING THE SAME
#8145Device and process for positioning individual particles on a substrate
#8146VERTICALLY ALIGNING A CARBON NANOTUBES ARRAY
#8147Graphite nano-carbon fiber and method of producing the same
#8148Tailored raman spectrocopic probes for ultrasensitive and highly multiplexed assays
#8149Charged particle beam writing apparatus and charged particle beam writing method
#8150Charged particle beam writing apparatus and charged particle beam writing method
#8151Nanomotor-based patterning of surface microstructures
#8152Method of hardening an interface of carbon material using nano silicon carbide coating
#8153IMPRINT APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR SUBSTRATE
#8154Three-dimensional bicontinuous heterostructures, method of making, and their application in quantum dot-polymer nanocomposite photodetectors and photovoltaics
#8155METHOD FOR ENHANCING MASS OF GOLD NANOPARTICLE THROUGH LIGHT-IRRADIATION, METHOD AND SENSOR FOR DETECTING MOLECULAR BINDING USING THE METHOD FOR ENHANCING MASS
#8156High surface area nano-structured graphene composites and capacitive devices incorporating the same
#8157Procedure for obtaining graphene oxide nano-platelets and derivates and graphene oxide non-platelets thus obtained
#8158GRAPHENE-BASED THIN FILMS IN HEAT CIRCUITS AND METHODS OF MAKING THE SAME
#8159Method for producing curable composition for imprints
#8160Controlled decoration of carbon nanotubes with aerosol nanoparticles
#8161Imprinting apparatus, imprinting method, and manufacturing method of uneven plate
#8162Mold-forming substrate and inspection method
#8163Device and method for transferring micro structure
#8164Method for growing carbon nanotube forests, and generating nanotube structures therefrom, and apparatus
#8165Imprint Apparatus, Imprint Method, and Process Condition Selection Method
#8166Magnetic tunnel junction device
#8167Magnetic random access memory with field compensating layer and multi-level cell
#8168Magnetic tunnel junction with spacer layer for spin torque switched MRAM
#8169Magnetic element with improved out-of-plane anisotropy for spintronic applications
#8170Pinning field in MR devices despite higher annealing temperature
#8171High efficiency broadband semiconductor nanowire devices and methods of fabricating without foreign catalysis
#8172"Green" synthesis of colloidal nanocrystals and their water-soluble preparation
#8173METHOD FOR PRODUCING SILICA-BASED GLASS SUBSTRATE FOR IMPRINT MOLD, AND METHOD FOR PRODUCING IMPRINT MOLD
#8174Highly-ordered nanostructure arrays and methods of preparation thereof
#8175ROLL IMPRINTING APPARATUS
#8176Iminecalixarene derivatives and aminocalixarene derivatives, method of preparation thereof, and self-assembled monolayer prepared by the method, fixing method of oligo-DNA by using the self-assembled monolayer, and oligo-DNA chip prepared by the method
#8177THROUGH SILICON VIAS USING CARBON NANOTUBES
#8178Method to enable the process and enlarge the process window for silicide, germanide or germanosilicide formation in structures with extremely small dimensions
#8179Synthesizing method for lithium titanium oxide nanoparticle using supercritical fluids
#8180NANOTUBE-NANOHORN COMPLEX AND METHOD OF MANUFACTURING THE SAME
#8181COMPOSITE MATERIALS HAVING GRAPHENE LAYERS AND PRODUCTION AND USE THEREOF
#8182Solvent annealing block copolymers on patterned substrates
#8183Photocatalytic reactions in nano-imprint lithography processes
#8184Method of producing nano-size graphene-based material and an equipment for producing the same
#8185Imprint apparatus and article manufacturing method
#8186Mold, imprint method, and method of manufacturing article
#8187Imprint apparatus and article manufacturing method
#8188Apparatus and method for a sub microscopic and optically variable image carrying device
#8189MANUFACTURE OF NANOPARTICLES USING NANOPORES AND VOLTAGE-DRIVEN ELECTROLYTE FLOW
#8190MTJ FILM AND METHOD FOR MANUFACTURING THE SAME
#8191Methods of fabricating probe cards including nanotubes
#8192Graphene nanoribbons prepared from carbon nanotubes via alkali metal exposure
#8193Method for fabricating nanoparticles
#8194METHOD FOR FABRICATING SEMICONDUCTOR LIGHTING CHIP
#8195DEFECT INSPECTION METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
#8196Multilayer mirror for EUV lithography and process for its production
#8197Modified surface for block copolymer self-assembly
#8198Graphene sheet and method for producing the same
#8199Auric acid assisted silicon nanoparticle formation method
#8200Novel Hydrogen Storage Materials
#8201Method for forming graphene nanoribbons
#8202System and method for producing carbon nanotubes
#8203Holding apparatus, imprint apparatus and article manufacturing method using same
#8204Ultrananocrystalline diamond films with optimized dielectric properties for advanced RF MEMS capacitive switches
#8205Silicon structure and manufacturing methods thereof and of capacitor including silicon structure
#8206Methods of making heterojunction devices
#8207Graphene growth on a carbon-containing semiconductor layer
#8208Nanoscopic wire-based devices and arrays
#8209Charged particle beam writing apparatus and method
#8210Carbonaceous nanocomposite having novel structure and fabrication method thereof
#8211Providing electron beam proximity effect correction by simulating write operations of polygonal shapes
#8212Method and system for manipulating a cell
#8213Nanoparticles for use in tumor diagnosis and therapy
#8214Method for fabricating semiconductor nano circular ring
#8215Preparation method for reduced graphene oxide using sulfonyl hydrazide-based reducing agent and optoelectronic devices thereof
#8216COMPOSITE CARBON FIBER ELECTRODES INCORPORATING POROUS HIGH SURFACE AREA CARBON
#8217CNT-INFUSED CERAMIC FIBER MATERIALS AND PROCESS THEREFOR
#8218Apparatus to adjust the directional conductivity of nanocomposites
#8219Optical materials, optical components, devices, and methods
#8220Controlling Thickness of Residual Layer
#8221Methods and materials for fabricating laminate nanomolds and nanoparticles therefrom
#8222FORMULATIONS
#8223Method of manufacture of silver oxide nano particles
#8224System And Process For Producing Hydrogen And A Carbon Nanotube Product
#8225Fullerene compositions and methods for photochemical purification
#8226Tunnel field effect transistor and method for manufacturing same
#8227Deposition on a nanowire using atomic layer deposition
#8228Stepwise Surface Assembly of Quantum Dot-Fullerene Heterodimers
#8229Optical materials, optical components, and methods
#8230Method for fabricating an electromagnetic actuator, an electromagnetic actuator, and a charged particle device comprising the same
#8231Charged particle beam writing apparatus and charged particle beam writing method
#8232Critical dimension control during template formation
#8233Systems and methods for micro-contact stamping
#8234METHODS AND SYSTEMS FOR SEPARATING IONS FROM FLUIDS
#8235Thermoelectric material including nano-inclusions, thermoelectric module and thermoelectric apparatus including the same
#8236Bulk synthesis of nanoporous palladium and platinum powders
#8237Label-free detection of renal cancer
#8238Method for producing graphene oxide with tunable gap
#8239CHARGED-PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD
#8240Method for fabricating a mask
#8241Oriented amorphous carbon film and process for forming the same
#8242Glass powder and method of manufacturing the same
#8243MODIFIED CARBON NANOTUBES, METHODS FOR PRODUCTION THEREOF AND PRODUCTS OBTAINED THEREFROM
#8244COATING FORMING COMPOSITION USED FOR FORMING TRANSPARENT CONDUCTIVE FILM
#8245PELLICLE FILM AND A PELLICLE FOR EUV APPLICATION, AND A METHOD FOR MANUFACTURING THE FILM
#8246Curable composition for imprints, patterning method and pattern
#8247Methods for the growth of three-dimensional nanorod networks
#8248METHOD OF IMPRINTING TEXTURE ON RIGID SUBSTRATE USING FLEXIBLE STAMP
#8249Water-soluble functionalized fullerenes
#8250NANOWIRE PREPARATION METHODS, COMPOSITIONS, AND ARTICLES
#8251Nanowire preparation methods, compositions, and articles
#8252Optical vacuum ultra-violet wavelength nanoimprint metrology
#8253Semiconductor structure and circuit including ordered arrangement of graphene nanoribbons, and methods of forming same
#8254Method of Fabricating Silicon Quantum Dot Layer and Device Manufactured Using the Same
#8255Graphene on Diamond Devices and Associated Methods
#8256Process for remediation of plastic waste
#8257Energy beam drawing apparatus and method of manufacturing device
#8258Nanotextured surfaces and related methods, systems, and uses
#8259Nanoparticle Deposition Systems
#8260METHOD FOR MAKING EPITAXIAL STRUCTURE
#8261Method for making epitaxial structure
#8262Method for making epitaxial structure
#8263Method for making semiconductor epitaxial structure
#8264Method for making epitaxial structure
#8265Magnetic carbon nanotube based biodetection
#8266HIGHLY FLUORESCENT CARBON NANOPARTICLES AND METHODS OF PREPARING THE SAME
#8267Charged particle beam drawing apparatus and article manufacturing method
#8268Functionalization of sphybridized carbon, silicon and/or germanium surfaces
#8269SUPER-HYDROPHOBIC MICROSTRUCTURE
#8270System and method for low-power nanotube growth using direct resistive heating
#8271NANOSTRUCTURES AND METHODS FOR CHEMICALLY SYNTHESIZING NANOSTRUCTURES
#8272Purification of carbon nanotubes using agarose column and density gradient ultracentrifugation
#8273Combination catalysts based on iron for the substantial synthesis of multi-walled carbon nanotubes by chemical vapor deposition
#8274PHOTOCURABLE COMPOSITION AND METHOD FOR PRODUCING MOLDED PRODUCT WITH FINE PATTERN
#8275EPITAXIAL STRUCTURE
#8276Epitaxial structure and method for making the same
#8277SEMICONDUCTOR EPITAXIAL STRUCTURE
#8278Epitaxial structure
#8279Method for synthesis of titanium dioxide nanotubes using ionic liquids
#8280Integrated rig for the production of boron nitride nanotubes via the pressurized vapor-condenser method
#8281Design and Fabrication of Dilute Nitride Material and Multi-Quantum Well Solar Cells
#8282Base and method for making epitaxial structure using the same
#8283Method for making epitaxial structure using carbon nanotube mask
#8284Method for making epitaxial structure
#8285Acceptance determining method of blank for EUV mask and manufacturing method of EUV mask
#8286Nanorod-containing precursor powder, nanorod-containing superconductor bulk and method for manufacturing the same
#8287Partially and fully surface-enabled metal ion-exchanging energy storage devices
#8288ELECTRODE FOR LITHIUM ION BATTERY AND METHOD FOR PRODUCING SAME
#8289BCNnanotube formation via the pressurized vapor/condenser method
#8290ORDERED ASSEMBLY OF NANOPARTICLES IN SPATIALLY DEFINED REGIONS
#8291Process of forming a material having nano-particles and a material having nano-particles
#8292METHOD FOR THE CREATION OF COMPLEX STRUCTURES ON A MICROMETRIC OR NANOMETRIC SCALE, AND THE COMPLEX STRUCTURE THUS OBTAINED
#8293LOW DIELECTRIC CONSTANT NANO-ZEOLITE THIN FILM AND MANUFACTURING METHOD THEREOF
#8294SYNTHETIC NANOCARRIERS WITH REACTIVE GROUPS THAT RELEASE BIOLOGICALLY ACTIVE AGENTS
#8295Titanium oxide nano tube material and method for manufacturing the same
#8296Random graphite and fabrication method thereof using graphene nanoribbon
#8297Method for fabricating graphene sheets or graphene particles using supercritical fluid
#8298Method of forming single-walled carbon nanotubes
#8299CARBON NANOTUBE GROWTH VIA CHEMICAL VAPOR DEPOSITION USING A CATALYTIC TRANSMEMBRANE TO SEPARATE FEEDSTOCK AND GROWTH CHAMBERS
#8300Method for modifying electrical properties of carbon nanotubes
#8301COMPOSITIONS COMPRISING FUNCTIONALIZED CARBON-BASED NANOSTRUCTURES AND RELATED METHODS
#8302Carbon nanotube structures for enhancement of thermal dissipation from semiconductor modules
#8303Organic electronic devices prepared using decomposable polymer additives
#8304Narrow-Waist Nanowire Transistor with Wide Aspect Ratio Ends
#8305Growth and transfer of monolithic horizontal nanowire superstructures onto flexible substrates
#8306Volume-labeled nanoparticles and methods of preparation
#8307Methods of fabricating nanoimprint stamp
#8308Method for forming recess defect on carbon nanotube
#8309GRAPHENE-IRON OXIDE COMPLEX AND FABRICATION METHOD THEREOF
#8310Electrochemical sensors
#8311Efficient boron nitride nanotube formation via combined laser-gas flow levitation
#8312Process for producing article having fine concavo-convex structure on its surface and process for producing wire-grid polarizer
#8313THERMOELECTRIC DEVICE BASED ON SILICON NANOWIRES AND MANUFACTURING METHOD THEREOF
#8314Silicon pen nanolithography
#8315Hybrid lithographic method for fabricating complex multidimensional structures
#8316Drawing apparatus and method of manufacturing article
#8317ADVANCED PHOTOMASK REPAIR
#8318SILVER-NICKEL CORE-SHEATH NANOSTRUCTURES AND METHODS TO FABRICATE
#8319SILVER NANOWIRES AND PREPARATION METHOD THEREOF
#8320METAL MATRIX COMPOSITE MATERIALS CONTAINING CARBON NANOTUBE-INFUSED FIBER MATERIALS AND METHODS FOR PRODUCTION THEREOF
#8321IMPRINT TEMPLATE FABRICATION AND REPAIR BASED ON DIRECTED BLOCK COPOLYMER ASSEMBLY
#8322CARBON NANOTUBE FILM STRUCTURE
#8323METHOD AND DEVICE FOR FORMING PATTERN
#8324METHOD FOR FABRICATING POLARIZER
#8325Biosynthesis of nanoparticles
#8326Replication of patterned thin-film structures for use in plasmonics and metamaterials
#8327Black GE based on crystalline/amorphous core/shell nanoneedle arrays
#8328Nitrogen-doped transparent graphene film and manufacturing method thereof
#8329SUBSTRATE, MANUFACTURING METHOD OF SUBSTRATE, SEMICONDUCTOR ELEMENT, AND MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT
#8330CNT-TAILORED COMPOSITE SPACE-BASED STRUCTURES
#8331SEPARATION OF CARBON NANOTUBES INTO CHIRALLY ENRICHED FRACTIONS
#8332PROCESS FOR PRODUCING CARBON NANOFIBRES AND/OR CARBON NANOTUBES
#8333GRAPHENE-SILICON CARBIDE-GRAPHENE NANOSHEETS
#8334Oriented carbon nanotube manufacturing method
#8335MULTI-ANGLE HARD BIAS DEPOSITION FOR OPTIMAL HARD-BIAS DEPOSITION IN A MAGNETIC SENSOR
#8336Preparation of layer-by-layer materials and coatings from ionic liquids
#8337Wide area stamp for antireflective surface
#8338Nanoparticle composition and associated methods thereof
#8339Single Wall Carbon Nanotubes By Atmospheric Chemical Vapor Deposition
#8340APPARATUS FOR SINGLE MOLECULE DETECTION AND METHOD THEREOF
#8341Method and system for providing magnetic tunneling junction elements having improved performance through capping layer induced perpendicular anisotropy and memories using such magnetic elements
#8342Method of Fabrication of Carbon Nanofibers on Nickel Foam
#8343Nanostructures and lithographic method for producing highly sensitive substrates for surface-enhanced spectroscopy
#8344Spin torque oscillator having multiple fixed ferromagnetic layers or multiple free ferromagnetic layers
#8345Piezo-phototronic sensor
#8346Imprint lithography
#8347Non-volatile memory cell with lateral pinning
#8348Systems and process for forming carbon nanotube sensors
#8349Chemically-etched nanostructures and related devices
#8350REDUCTION OF GRAPHENE OXIDE TO GRAPHENE IN HIGH BOILING POINT SOLVENTS
#8351Active bandgap tuning of graphene for tunable photodetection applications
#8352Forming nanometer-sized patterns by electron microscopy
#8353Method for manufacturing a master mold which is used to form a micropatterned film applied to an exterior of a household appliance and manufacturing apparatus and method of the film using the master mold
#8354Method of manufacturing nanoimprint stamp
#8355Three-dimensional porous polyurea networks and methods of manufacture
#8356Fabrication of pillared graphene
#8357DYE-SENSITIZED SOLAR CELL WITH HYBRID NANOSTRUCTURES AND METHOD FOR FABRICATING WORKING ELECTRODES THEREOF
#8358Imprint method, computer storage medium and imprint apparatus
#8359Method of preparing nitrogen-doped graphene and nitrogen-doped graphene prepared thereby
#8360Carbon nanotube agglomerate
#8361Method for producing alloy catalyst for redox reaction
#8362GRAPHENE/NANO-TITANIUM DIOXIDE COMPOSITES AND METHODS FOR PREPARING THE SAME
#8363TWO-LAYER CATALYST, PROCESS FOR PREPARING SAME AND USE FOR THE MANUFACTURE OF NANOTUBES
#8364Method of forming pattern, method of manufacturing semiconductor device, and method of manufacturing template
#8365Pattern forming method
#8366NANOWIRE PREPARATION METHODS, COMPOSITIONS, AND ARTICLES
#8367SILANE COATING COMPOSITIONS, COATING SYSTEMS, AND METHODS
#8368Nanowire preparation methods, compositions, and articles
#8369Composition containing single-walled nanotubes
#8370High hardness imprint material
#8371Aligned nanoarray and method for fabricating the same
#8372METHOD FOR MANUFACTURING METAL NANOSTRUCTURE AND METAL NANOSTRUCTURE MANUFACTURED BY THE METHOD
#8373Transferring mold and production process of transferring mold
#8374METHOD FOR PRODUCING CARBON NANOTUBE ASSEMBLY HAVING HIGH SPECIFIC SURFACE AREA
#8375Augmented reactor for chemical vapor deposition of ultra-long carbon nanotubes
#8376Embedded nanoparticle films and method for their formation in selective areas on a surface
#8377Nanowire preparation methods, compositions, and articles
#8378Apparatus and associated methods
#8379Magnetoresistive random access memory element and fabrication method thereof
#8380NANOSENSOR AND METHOD OF MANUFACTURING THE SAME
#8381Nanowire fabrication method and semiconductor element using nanowire fabricated thereby
#8382Semiconductor devices including a nanowire and methods of manufacturing the same
#8383Production of vertical arrays of small diameter single-walled carbon nanotubes
#8384Lithography system, modulation device and method of manufacturing a fiber fixation substrate
#8385Projection lens arrangement
#8386Quantum dot optical devices with enhanced gain and sensitivity and methods of making same
#8387Synthesis of silver, antimony, and tin doped bismuth telluride nanoparticles and bulk bismuth telluride to form bismuth telluride composites
#8388Process for producing graphene/SiC composite material and graphene/SiC composite material obtained thereby
#8389METHODS AND APPARATUS FOR PARTICLE PROCESSING
#8390Metal nanoparticles with a pre-selected number of atoms
#8391Surface treatment and exchange of nanostructures from aqueous suspension into organic media and into polymer-matrix composites
#8392Nanocomposite material containing polymer binders
#8393NANOCRATER CATALYST IN METAL NANOPARTICLES AND METHOD FOR PREPARING THE SAME
#8394Method of fabricating sensors having functionalized resonating beams
#8395Beta alumina solid electrolyte and method of preparing the same
#8396Zwitterion-Linker Coatings for Nano-objects in Solutions of Multivalent Counterions
#8397METHOD FOR MANUFACTURING BARIUM TITANATE POWDER AND BARIUM TITANATE POWDER MANUFACTURED BY THE SAME
#8398Curable resin composition for nanoimprint
#8399FABRICATION OF MICROSTRUCTURES AND NANOSTRUCTURES USING ETCHING RESIST
#8400Ion sources, systems and methods