Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same

Magnetic annealing sequences for patterned MRAM synthetic antiferromagnetic pinned layers

Magnetic elements with ballistic magnetoresistance utilizing spin-transfer and an MRAM device using such magnetic elements

Parameter control in a lithographic apparatus using polarization

Electron beam irradiating apparatus and irradiating method

Charged particle beam lithography apparatus and method

Hydro cyano and cyano fullerene derivatives

Hydrogen cyano fullerene containing proton conducting membranes

Apparatus and method for manufacturing nono carbon

Translation generation for a mask pattern

Dispersant for dispersing carbon nanotubes and carbon nanotube composition comprising the same

Electronic and optoelectronic devices having nanoparticles configured by patterned ferroelectric material

Method for forming an electronic device

Apparatus and method for optical interference fringe based integrated circuit processing

Magnetic sensing element including free layer having gradient composition and method for manufacturing the same

Coating compositions containing single wall carbon nanotubes

Apparatus for embossing a flexible substrate with a pattern carried by an optically transparent compliant media

Magnetoresistive effect element, magentic memory device and manufacturing method of magnetoresistive effect element and magnetic memory device

Micro polymerization catalyzed by external acid source for chemical lithography

Patterning nanoline arrays with spatially varying pitch

Apparatus and process for carbon nanotube growth

Data recording using carbon nanotube electron sources

Method of low temperature imprinting process with high pattern transfer yield

Methods for patterning dielectric material, and methods for aligning semiconductor fabrication molds and semiconductor substrates

Nano-imprint lithography method involving substrate pressing

Method of preparing an apparatus for positioning a molecule

Structure/method to form bottom spin valves for ultra-high density

Imprint lithography

Magnetoresistance device including layered ferromagnetic structure, and method of manufacturing the same

Powder containing carbon nanotube or carbon nanofiber and process for preparing the same

Low temperature growth of oriented carbon nanotubes

Method of fabricating a polarizing layer on an interface

Imprint lithography template to facilitate control of liquid movement

Imprint lithography method to control extrusion of a liquid from a desired region on a substrate

Stent with coatings containing self-assembled monolayers

Method of providing desirable wetting and release characteristics between a mold and a polymerizable composition

Stamp device for use in soft lithography and method for producing the same

Techniques and compositions for diagnosis and treatment of cancer (muci)

Rubber compositon and tire produced from the same

Method of separating a mold from a solidified layer disposed on a substrate

System for monitoring cell motility in real-time

Alignment system used in nano-imprint lithography and nano imprint lithography method using the alignment system

Magnetically directed self-assembly of molecular electronic junctions comprising conductively coated ferromagnetic microparticles

METHOD FOR MANUFACTURING FUNCTIONAL SUBSTRATE FUNCTIONAL SUBSTRATE METHOD FOR FORMING FINE PATTER CONDUCTIVE FILM WIRING ELECTRO-OPTICAL DEVICE AND ELECTRONIC APPARATUS

Chucking system for nano-manufacturing

Sidewall functionalization of single-wall carbon nanotubes through C-N bond forming substitutions of fluoronanotubes

Determining a dimensional change in a surface using images acquired before and after the dimensional change

Silicon molecular hybrid storage cell

Aberration adjusting method, device fabrication method, and charged particle beam lithography machine

Variable rectangle-type electron beam exposure apparatus and pattern exposure-formation method

Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens

Aberration measuring apparatus for charged particle beam optical system, charged particle beam lithography machine having the aberration measuring apparatus, and device fabrication method using the apparatus

Assembled structures of carbon tubes and method for making the same

Method of forming a contact printing stamp

Carbon nanotube-containing catalysts, methods of making, and reactions catalyzed over nanotube catalysts

Topography transfer method with aspect ratio scaling

Method to correct EUVL mask substrate non-flatness

Fabrication of carbon nanotube reinforced epoxy polymer composites using functionalized carbon nanotubes

Single walled carbon nanohorn adsorptive material and method for production thereof

Carbon nanoparticles and composite particles and process of manufacture

Continuous method for producing inorganic nanotubes

Selective placement of carbon nanotubes on oxide surfaces

Ta based bilayer seed for IrMn CPP spin valve

Molecular jet growth of carbon nanotubes and dense vertically aligned nanotube arrays

Method for storing electricity in quantum batteries

Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens

Method for producing nanocarbon material and method for manufacturing wiring structure

Structure/method to form bottom spin valves for ultra-high density

Synthesis method for a compound used to form a self-assembled monolayer, compound for forming a self-assembled monolayer, and layer structure for a semiconductor component

Graphitic nanotubes in luminescence assays

Devices and methods for biochip multiplexing

Hydrogel copolymer, substrate coated with the copolymer, method of producing microarray using the copolymer, and microarray produced by the method

Methods of forming capping layers on reflective materials

Wear-resistant optical layers and moulded bodies

Material with pattern surface for use as template and process for producing the same

Ozonation of carbon nanotubes in fluorocarbons

Imprint lithography

Scatterometry alignment for imprint lithography

Imprint reference template for multilayer or multipattern registration and method therefor

CPP magneto-resistive element, method of manufacturing CPP magneto-resistive element, magnetic head, and magnetic memory apparatus

Quantum dot phosphor for light emitting diode and method of preparing the same

Imprinting machine and device manufacturing method

Semiconductor manufacturing apparatus

Fabrication method for arranging ultra-fine particles

Imprint lithography

Flare reduction in photolithography

Tunneling magneto-resistive spin valve sensor with novel composite free layer

Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program

Electromagnetic focusing method for electron-beam lithography system

Electron beam duplication lithography method

Micro-column electron beam apparatus

Focusing apparatus and lithography system using the same

Exposure device, exposure method, and semiconductor device manufacturing method

Imprint lithography

Method of manufacturing micro structure, and method of manufacturing mold material

Fabrication of light emitting film coated fullerenes and their application for in-vivo light emission

Method of patterning catalyst layer for synthesis of carbon nanotubes and method of fabricating field emission device using the method

Fabrication process for ultra high density optical disc

Appartus and method for forming pattern

Phase contrast alignment method and apparatus for nano imprint lithography

Method of correcting deviations of critical dimensions of patterns formed on a wafer in a EUVL process

Apparatus and method for manufacturing nano carbon

Method for producing vapor-grown carbon fibers having 3-D linkage structure

CIP GMR enhanced by using inverse GMR material in AP2

Method and apparatus for direct referencing of top surface of workpiece during imprint lithography

Method for creating a functional interface between a nanoparticle, nanotube or nanowire, and a biological molecule or system

Opto-electronic memory element on the basis of organic metalloporphyrin molecules

Optics for generation of high current density patterned charged particle beams

Imprint lithography

Process for producing structure, structure thereof, and magnetic recording medium

Imprint lithography

Imprint lithography

Polymerization initated at sidewalls of carbon nanotubes

Method for preparing supported catalysts from metal loaded carbon nanotubes

Methods for preparing catalysts supported on carbon nanotube networks

MTJ elements with high spin polarization layers configured for spin-transfer switching and spintronics devices using the magnetic elements

Electron beam lithography method using new material

Photomasks and methods of manufacturing the same

Lithographic apparatus, device manufacturing method, and optical component

Nanocontact printing

Nanostructure and manufacturing method therefor

Method for making carbon nanotubes

Method for producing fullerene

Mild methods for generating patterned silicon surfaces

Charged-particle beam exposure apparatus and method

Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern

Imprint lithography

Stamp for soft lithography, in particular micro contact printing and a method of preparing the same

Laser pyrolysis method for producing carbon nano-spheres

Substrate for a display and method for manufacturing the same

Mask for electromagnetic radiation and method of fabricating the same

Method of forming a porous metal catalyst on a substrate for nanotube growth

Method for forming carbon nanotube thin film

Fluoropolymer film made by printing

Method for producing carbon nanotubes and/or nanofibres

Apparatus and method for manufacturing nano carbon

System and method for patterning both sides of a substrate utilizing imprint lithography

Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate

Wafer-scale microcolumn array using low temperature co-fired ceramic substrate

Particles

Method and system for making a nano-plate for imprint lithography

Method of vertically aligning carbon nanotubes using electrophoresis

Method and apparatus for imprint pattern replication

Highly aromatic compounds and polymers as precursors to carbon nanotube and metal nanoparticle compositions in shaped solids

Method for selective deposition of a thin self-assembled monolayer

Devices having vertically-disposed nanofabric articles and methods of making the same

Method and system for providing a highly textured magnetoresistance element and magnetic memory

Method of manufacturing a magnetic tunnel junction device

Forming a capping layer for a EUV mask and structures formed thereby

Method of manufacturing a device with a magnetic layer-structure

Method for producing containing fullerene and apparatus for producing same

Methods and apparatus for selective, oxidative patterning of a surface

Method for producing carbon nanotubes using a DC non-transferred thermal plasma torch

System and method of measuring molecular interactions

Method for manufacturing light guide plate

Interferometric analysis for the manufacture of nano-scale devices

Method to improve the flow rate of imprinting material employing an absorption layer

Method for producing a spin valve transistor with stabilization

Electron beam exposure method and system therefor

Energetic neutral particle lithographic apparatus and process

Method for fast filling of templates for imprint lithography using on template dispense

Method for exposing a substrate with a beam

Mass production of carbon nanostructures

Thin film and method for manufacturing same

System for controlling a volume of material on a mold

Method for dual damascene integration of ultra low dielectric constant porous materials

ELECTRORIC DEVICE, INTEGRATED CIRCUIT, AND METHOD OF MANUFACTURING THE SAME

Lithography systems and methods for operating the same

Charged beam drawing data creation method, charged beam drawing method, charged beam drawing apparatus and semiconductor device manufacturing method

Projection electron beam lithography apparatus and method employing an estimator

Patterning method

Methods of exposure for the purpose of thermal management for imprint lithography processes

Method for forming pattern of organic insulating film

Method for patterning thin film, method and apparatus for fabricating flat panel display

Electron beam exposure mask, electron beam exposure method, and electron beam exposure system

Method of producing a mask blank for photolithographic applications, and mask blank

Process and applications of carbon nanotube dispersions

Method for producing carbon nanotube

Film and method for producing nano-particles for magnetoresistive device

Interferometric analysis method for the manufacture of nano-scale devices

Color filter process

Eliminating printability of sub-resolution defects in imprint lithography

Methods for aligning semiconductor fabrication molds and semiconductor substrates

Composition to reduce adhesion between a conformable region and a mold

Nanorods and other materials from condensed phase conversion and growth instead of from vapor

Direct imprinting of etch barriers using step and flash imprint lithography

Cut-and-paste imprint lithographic mold and method therefor

Magnetic sensing element with improved magnetic sensitivity stability and method for producing the same

Method of manufacturing tubular carbon molecule and tubular carbon molecule, method of manufacturing field electron emission device and field electron emission device, and method of manufacturing display unit and display unit

Hot embossing lithography method

Method to reduce adhesion between a conformable region and a mold

Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems

Charged beam exposure apparatus, charged beam control method and manufacturing method of semiconductor device

Electron beam exposure method and electron beam exposure apparatus

Method and apparatus for multiple charged particle beams

Pneumatic method and apparatus for nano imprint lithography having a conforming mask

Method of depositing material on a substrate for a device

Method and apparatus for fabricating flat panel display

Charge perturbation detection system for DNA and other molecules

Producing method and apparatus of carbon nanofibers

CVD synthesis of carbon nanotubes

Optical elements formed by inducing changes in the index of refraction by utilizing electron beam radiation

Spin scattering and heat assisted switching of a magnetic element

Device and method for imaging a multiple particle beam on a substrate

Corrector for correcting first-order chromatic aberrations of the first degree

Phase shift mask fabrication method thereof and fabrication method of semiconductor apparatus

Methods of forming nanoparticle based monolayer films with high particle density and devices including the same

Carbon nanotubes: high solids dispersions and nematic gels thereof

Electron beam apparatus and a device manufacturing method by using said electron beam apparatus

Electron beam control method, electron beam drawing apparatus and method of fabricating a semiconductor device

Method and apparatus for forming optical elements by inducing changes in the index of refraction by utilizing electron beam radiation

Method of forming a compliant template for UV imprinting

Method for determining an optimal absorber stack geometry of a lithographic reflection mask

Method and device for manufacturing nanofilter media

Process for producing monolayer carbon nanotube with uniform diameter

Stitching of AFM and channeling layers for in-stack biasing CPP

Method of forming an improved AP1 layer for a TMR device

Scanning probe-based lithography method

Fullerene crystal and method for producing same

Method for patterning large scale nano-fibrous surfaces using capillography

System for using a two part cover for and a box for protecting a reticle

Substrate conveyor apparatus, substrate conveyance method and exposure apparatus

System and method for growing nanostructures from a periphery of a catalyst layer

Decal transfer lithography

Thermal interface incorporating nanotubes

Method for forming catalyst metal particles for production of single-walled carbon nanotube

Compensation of reflective mask effects in lithography systems

Process for obtaining a thin, insulating, soft magnetic film of high magnetization

Parallel, individually addressable probes for nanolithography

Spin transfer magnetic element with free layers having high perpendicular anisotropy and in-plane equilibrium magnetization

Low-k dielectric functional imprinting materials

Electrochemical miniaturization of organic micro-and nanostructures

Polygonal nanostructures of polynucleic acid multi-crossover molecules and assembly of lattices based on double crossover cohesion

Lithographic mask alignment

Carbon fibrous structure

Method for forming a carbon nanotube and a plasma CVD apparatus for carrying out the method

Synthesis of small and narrow diameter distributed carbon single walled nanotubes

System and method for reticle protection and transport

Magnetic detector including antiferromagnetic layer, amorphous barrier layer, base layer, and hard layer arranged in that order and method for manufacturing magnetic detector

Step and repeat imprint lithography systems

Step and repeat imprint lithography processes

Nanotube based multi-level memory structure

Charged particle beam processing apparatus

Variable rectangle-type electron beam exposure apparatus and pattern exposure-formation method

Electron beam irradiating method and manufacturing method of magnetic recording medium

System, method and a program for correcting conditions for controlling a charged particle beam for lithography and observation, and a program and method for manufacturing a semiconductor device

Mask inspection apparatus, mask inspection method, and electron beam exposure system

Compositions containing modified fullerenes

Process and apparatus for producing single-walled carbon nanotube

Molding system having a micro heating element for molding a micro pattern structure

Carbon nanotube foam and method of making and using thereof

Method for manufacturing magnetic disk apparatus

Electron beam method and apparatus for reducing or patterning the birefringence of halogenated optical materials

Application of static light to a fluid of CNTs for purposes of sorting the CNTs

Method for manufacturing isotope-doped carbon nanotubes

Magnetic recording medium and method for manufacturing the same

Laminated magnetic thin film and method of manufacturing the same

Method for making an aligned carbon nanotube

Method of synthesising carbon nano tubes

Methods and devices for growth and/or assembly of nanostructures

Magnetoresistive effect element, magnetic head and magnetic reproducing apparatus

Fabrication of 3d photopolymeric devices

Method of and apparatus for fabricating nano-sized carbon material

Imprint apparatus and imprint method

Method of patterning surfaces while providing greater control of recess anisotropy

Reduction of a feature dimension in a nano-scale device

Pattern reversal employing thick residual layers

Exposure parameter obtaining method, exposure parameter evaluating method, semiconductor device manufacturing method, charged beam exposure apparatus, and method of the same

Method for preparing multilayer of nanocrystals, and organic-inorganic hybrid electroluminescence device comprising multilayer of nanocrystals prepared by the method

Carbon nanotube structures, carbon nanotube devices using the same and method for manufacturing carbon nanotube structures

Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor

Formation of discontinuous films during an imprint lithography process

Process for purifying carbon nanotubes made on refractory oxide supports

Ultrathin carbon fibers

Method of preparation for carbon nanotube material

Flaky carbonaceous particle and production method thereof

Method of preparing carbon nanocages

Polymer micro-ring resonator device and fabrication method

Multilayer film reflector and X-ray exposure system

GMR device having an improved free layer

Synthetic pattern exchange configuration for side reading reduction

Surface enhanced Raman spectroscopy (SERS) substrates exhibiting uniform high enhancement and stability

Variably shaped beam EB writing system

Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection

Measurement method of electron beam current, electron beam writing system and electron beam detector

Ink composition for etching resist, method of forming etching resist pattern using the same, and method of forming microchannel using the ink composition

Reverse tone patterning on surfaces having planarity perturbations

Manufacturing apparatus of magnetoresistance elements

Polymer-coated magnetic particle and magnetic material for absorbing electromagnetic waves

Spintronic device having a carbon nanotube array-based spacer layer and method of forming same

Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC

Aligned and open-ended nanotube structure and method for making the same

Telescoped multiwall nanotube and manufacture thereof

Patterning carbon nanotube coatings by selective chemical modification

Rhenium catalysts and methods for production of single-walled carbon nanotubes

Carbon nano-fibrous rod, fibrous nanocarbon, and method and apparatus for producing fibrous nanocarbon

Polymer-coated carbon nanotube

Synthesis of boron carbide nanoparticles

Producing apparatus and producing method for manufacturing carbon structure

Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal