C01B21/0835 - CPC Classification Index

ClassID:

84708 ⎘

C01B21/0835 - CPC Classification

Classification description:

Nitrogen; Compounds thereof; Compounds containing nitrogen and non-metals and optionally metals containing one or more halogen atoms; Binary compounds of nitrogen with halogens Nitrogen trifluoride

Sub-classes:

C01B21/0837 » {Purification} 9

Recent Application in this class:

20220411949

2022-12-29

Electrode production method

20220135516

2022-05-05

Process of fluorinating inorganic compounds by direct fluorination

20210147993

2021-05-20

ELECTRODE AND PRODUCTION METHOD THEREFOR, AND PRODUCTION METHOD FOR REGENERATED ELECTRODE

20210053911

2021-02-25

Process of fluorinating inorganic or organic compounds by direct fluorination

20180358220

2018-12-13

Metal doped carbon based hard mask removal in semiconductor fabrication

20110097253

2011-04-28

FLUORINE PURIFICATION

20100239485

2010-09-23

METHOD OF MANUFACTURING FLUORINATED GAS COMPOUNDS AND APPARATUS FOR MANUFACTURING THE SAME

20090280051

2009-11-12

Method and apparatus for producing nitrogen trifluoride

20090068083

2009-03-12

PROCESS FOR SYNTHESIS OF HALOGENATED NITROGEN

#10

20080292516

2008-11-27

METHOD AND APPARATUS FOR LOCAL FLUORINE AND NITROGEN TRIFLUORIDE PRODUCTION

#11

20070031315

2007-02-08

Method and apparatus for manufacturing nitrogen trifluoride

#12

20060280642

2006-12-14

Method of storing nitrogen trifluoride

#13

20060062711

2006-03-23

Process for the production of nitrogen trifluoride

#14

20050224093

2005-10-13

Method and apparatus for local fluorine and nitrogen trifluoride production