84718 ⎘
Nitrogen; Compounds thereof; Compounds containing nitrogen and non-metals and optionally metals containing one or more hydrogen atoms containing also one or more halogen atoms
Sub-classes:Si-containing film forming precursors and methods of using the same
#2Si-containing film forming precursors and methods of using the same
#3Si-CONTAINING FILM FORMING PRECURSORS AND METHODS OF USING THE SAME
#4Si-containing film forming precursors and methods of using the same
#5SiH-free vinyldisilanes
#6Si-containing film forming precursors and methods of using the same
#7Si-containing film forming precursors and methods of using the same
#8Purified hydrogen bis(fluorosulfonyl)imide (HFSI) products, methods of purifying crude HFSI, and uses of purified HFSI products