C01B2210/0056 - CPC Classification Index

ClassID:

85365 ⎘

C01B2210/0056 - CPC Classification

Classification description:

Purification or separation of specific gases; Impurity removed; Hydrogen halides Hydrogen fluoride

Recent Application in this class:

20230183068

NOVEL METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMINANT STREAM EXITING AN ETCH CHAMBER

20220363540

Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber

20120079939

Recovering of xenon by adsorption process