C01B23/0021 - CPC Classification Index

ClassID:

84772 ⎘

C01B23/0021 - CPC Classification

Classification description:

Noble gases; Compounds thereof; Purification or separation processes of noble gases; Chemical processing only by oxidation

Recent Application in this class:

20230183068

2023-06-15

NOVEL METHOD FOR PRETREATING AND RECOVERING A RARE GAS FROM A GAS CONTAMINANT STREAM EXITING AN ETCH CHAMBER

20220363540

2022-11-17

Method for pretreating and recovering a rare gas from a gas contaminant stream exiting an etch chamber

20210354987

2021-11-18

HELIUM PURIFICATION PROCESS AND UNIT

20200385269

2020-12-10

Helium purification process and unit

20180050912

2018-02-22

Method for refining argon gas and recovering and refining apparatus for argon gas

20160325996

2016-11-10

Method for recovering and purifying argon gas from silicon single crystal manufacturing apparatus and apparatus for recovering and purifying argon gas

20160228813

2016-08-11

Integrated process and apparatus for recovery of helium rich streams

20130149226

2013-06-13

Inert gas recovery and recycle for silicon crystal growth pulling process

20100247395

2010-09-30

Gas purifying process and device

#10

20090104101

2009-04-23

Purification of noble gases using online regeneration of getter beds

#11

20060165573

2006-07-27

Gas purifying process and device