84964 ⎘
Silicon; Compounds thereof; Silicon; Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
POLYSILICON ROD AND METHOD FOR MANUFACTURING POLYSILICON ROD
#2METHOD FOR MANUFACTURING SILICON ROD
#3POLYSILICON ROD AND METHOD FOR MANUFACTURING POLYSILICON ROD
#4POLYCRYSTAL SILICON ROD, POLYCRYSTAL SILICON ROD PRODUCTION METHOD, AND POLYCRYSTAL SILICON THERMAL PROCESSING METHOD
#5SILICON-CARBON COMPOSITE MATERIALS WITH ENHANCED ELECTROCHEMICAL PROPERTIES
#6SILICON-CARBON COMPOSITES
#7POLYCRYSTALLINE SILICON ROD AND PROCESS OF MANUFACTURING POLYCRYSTALLINE SILICON ROD
#8METHOD FOR PRODUCING AND CLASSIFYING POLYCRYSTALLINE SILICON
#9APPARATUS FOR MANUFACTURING POLYSILICON ROD AND METHOD FOR MANUFACTURING POLYSILICON ROD
#10APPARATUS AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON, AND POLYCRYSTALLINE SILICON
#11Polycrystalline Silicon Rod and Method for Manufacturing Same
#12PROTECTIVE STRUCTURE FOR SILICON ROD AND METHOD FOR MANUFACTURING SILICON ROD
#13ROD-SHAPED BODY, JIG, DETACHMENT METHOD AND METHOD FOR MANUFACTURING SILICON ROD
#14Silicon core wire for depositing polycrystalline silicon and production method therefor
#15METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
#16PRODUCTION METHOD FOR POLYCRYSTALLINE SILICON
#17Process for producing polycrystalline silicon
#18Method for producing polycrystalline silicon
#19Polycrystalline Silicon Material
#20Unloading jig, unloading method, and method for producing silicon rod
#21Particulate composite materials
#22Polycrystalline silicon rod
#23Apparatus for manufacturing polysilicon rod
#24POLYSILICON ROD AND METHOD FOR MANUFACTURING POLYSILICON ROD
#25Method for preventing contamination of base plate
#26CORE WIRE HOLDER, APPARATUS FOR PREPARING SILICON, AND METHOD FOR PREPARING SILICON
#27Electrode for depositing polycrystalline silicon
#28Hammer
#29Polycrystalline silicon rod manufacturing method, and reactor
#30Polycrystalline silicon manufacturing apparatus
#31Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
#32Silicon core wire
#33APPARATUS FOR PRODUCING POLYCRYSTALLINE SILICON AND POLYCRYSTALLINE SILICON
#34Method for producing polycrystalline silicon
#35Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
#36Polycrystalline silicon bar, polycrystalline silicon rod, and manufacturing method thereof
#37Process for preparing polycrystalline silicon
#38Device and method for the removal of polycrystalline silicon rods from a reactor
#39CLEANING DEVICE AND CLEANING METHOD
#40REACTOR AND METHOD FOR PRODUCTION OF SILICON
#41Method for producing polysilicon
#42Method for producing polycrystalline silicon processed article
#43Polysilicon manufacturing apparatus
#44Core wire for use in silicon deposition, method for producing said core wire, and method for producing polycrystalline silicon
#45POLYCRYSTALLINE SILICON ROD
#46Method to prevent grounding from a silicon rod to a plate in polycrystalline silicon reactor
#47Method for producing polycrystalline silicon
#48Polycrystalline silicon rod and method for producing same
#49APPARATUS AND METHOD FOR MANAGING A TEMPERATURE PROFILE USING REFLECTIVE ENERGY IN A THERMAL DECOMPOSITION REACTOR
#50Polycrystalline silicon rod and method for producing single crystal silicon
#51Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline silicon
#52Polycrystalline silicon rod and method for producing polycrystalline silicon rod
#53Silicon-carbon composite powder
#54Controlled silicon polymer treatment method
#55Reactor for polycrystalline silicon production and method for producing polycrystalline silicon
#56Process for producing polycrystalline silicon mass
#57CHEMICAL VAPOR DEPOSITION METHOD AND APPARATUS
#58Reactor for depositing polycrystalline silicon
#59Hydrogen gas recovery system and hydrogen gas separation and recovery method
#60Polysilicon manufacturing apparatus
#61Resin material, vinyl bag, polycrystalline silicon rod, polycrystalline silicon mass
#62Device for insulating and sealing electrode holders in CVD reactors
#63Primary distillation boron reduction
#64Process and plant that decomposes monosilane
#65Polycrystalline silicon ingot, polycrystalline silicon bar, and method for producing single crystal silicon
#66Method for deinstallation of rod pairs of polysilicon produced by the Siemens process
#67Process for producing polycrystalline silicon
#68POLYSILICON FILAMENT BONDING DEVICE USING POLYSILICON FRAGMENTS
#69Polycrystalline silicon rod, production method therefor, and FZ silicon single crystal
#70REACTOR FOR THE DEPOSITION OF POLYCRYSTALLINE SILICON
#71Core wire holder and method for producing silicon
#72Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
#73Method for stabilizing filaments in a chemical vapor deposition reactor
#74Device for insulating and sealing electrode holders in CVD reactors
#75Method for producing polycrystalline silicon
#76Cutting apparatus
#77Process for producing silicon single crystal
#78Poly-silicon manufacturing apparatus and method using high-efficiency hybrid horizontal reactor
#79METHOD OF MAKING LARGE SURFACE AREA FILAMENTS FOR THE PRODUCTION OF POLYSILICON IN A CVD REACTOR
#80Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
#81METHOD FOR MANUFACTURING POLYCRYSTALLINE SILICON BAR AND POLYCRYSTALLINE SILICON BAR
#82Reactor For Producing Polycrystalline Silicon and Method For Removing A Silicon-Containing Layer On A Component Of Such A Reactor
#83SILICON CORE WIRE FOR PRODUCING POLYCRYSTALLINE SILICON ROD, AND DEVICE FOR PRODUCING POLYCRYSTALLINE SILICON ROD
#84SURFACE TEMPERATURE CALCULATION METHOD AND CONTROL METHOD FOR POLYCRYSTALLINE SILICON ROD, METHOD FOR PRODUCTION OF POLYCRYSTALLINE SILICON ROD, POLYCRYSTALLINE SILICON ROD, AND POLYCRYSTALLINE SILICON INGOT
#85Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon mass
#86Device for manufacturing polysilicon using horizontal reactor and method for manufacturing same
#87POLYCRYSTALLINE SILICON ROD, METHOD FOR PRODUCING POLYCRYSTALLINE SILICON ROD, AND SINGLE-CRYSTALLINE SILICON
#88Process for producing polycrystalline silicon
#89HYDROCHLORINATION REACTOR
#90Method for producing polycrystalline silicon
#91Method for producing polycrystalline silicon
#92High throughput chemical vapor deposition electrode
#93DEVICE FOR RECEIVING AND TRANSPORTING A SILICON ROD, AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
#94APPARATUS FOR PRODUCING POLYCRYSTALLINE SILICON AND METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
#95Polycrystalline silicon deposition method
#96APPARATUS FOR MANUFACTURING POLYSILICON
#97Process for producing polycrystalline silicon
#98Process for producing polycrystalline silicon
#99Apparatus and method for managing a temperature profile using reflective energy in a thermal decomposition reactor
#100Process for producing polycrystalline silicon
#101Reactor for producing polycrystalline silicon and method for removing a silicon-containing layer on a component of such a reactor
#102Process for the preparation of polycrystalline silicon
#103Gas distributor for a Siemens reactor
#104Cleaning of CVD production spaces
#105DEVICE FOR PROTECTING AN ELECTRODE SEAL IN A REACTOR FOR THE DEPOSITION OF POLYCRYSTALLINE SILICON
#106Reactive depletion of reactor deposits in harvesting polycrystalline silicon rods
#107Conical graphite electrode with raised edge
#108Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon
#109Method and apparatus for consolidation of granular silicon and measuring non-metals content
#110Reactor filament assembly with enhanced misalignment tolerance
#111System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
#112Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon
#113Radiation shielding for a CVD reactor
#114Method for producing high-purity polycrystalline silicon
#115Polycrystalline silicon rod and process for production thereof
#116Polycrystalline silicon rod
#117Polysilicon manufacturing device
#118Cold filament ignition system and method of silicon rods
#119Method and apparatus of manufacturing silicon seed rods
#120Method for manufacturing polysilicon
#121Polycrystalline silicon rod and method for producing polysilicon
#122Production method for polycrystalline silicon, and reactor for polycrystalline silicon production
#123Method of manufacturing an electrode for vapor deposition
#124Chemical vapor deposition reactor having ceramic lining for production of polysilicon
#125Methods and systems for stabilizing filaments in a chemical vapor deposition reactor
#126Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing method
#127Apparatus and method for comminuting a polycrystalline silicon rod
#128Method for selecting polycrystalline silicon rod, and method for producing single crystalline silicon
#129SILICON CORE WIRE HOLDER AND POLYCRYSTALLINE SILICON MANUFACTURING METHOD
#130Polycrystalline silicon rod
#131Polycrystalline silicon portion and method for breaking a silicon body
#132Apparatus for producing polycrystalline silicon and method for producing polycrystalline silicon
#133Polycrystalline silicon rod and process for production thereof
#134Method and apparatus for manufacturing silicon seed rods
#135Apparatus for producing polycrystalline silicon
#136Apparatus and method for supplying electric power to a CVD-reactor
#137Rod-type polysilicon having improved breaking properties
#138Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon
#139Method and apparatus for igniting silicon rods outside a CVD-reactor
#140Low-dopant polycrystalline silicon chunk
#141Process for determining surface contamination of polycrystalline silicon
#142Polycrystalline silicon
#143Systems and methods for producing silicon slim rods
#144POLYCRYSTALLINE SILICON PRODUCTION
#145Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod
#146Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar
#147Apparatus for deposition of polycrystalline silicon comprising uniformly spaced filament rods and gas inlet orifices, and process for deposition of polycrystalline silicon using same
#148Methods and systems for monitoring and controlling silicon rod temperature
#149PROTECTIVE DEVICE FOR ELECTRODE HOLDERS IN CVD REACTORS
#150Process for producing polysilicon
#151Electrode and method for supplying current to a reactor
#152Methods and Systems For Controlling SiIicon Rod Temperature
#153Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compounds by venting the system with an inert gas
#154System and method for manufacturing polycrystal silicon
#155Reactor for polycrystalline silicon and polycrystalline silicon production method
#156PROCESS FOR PRODUCTION OF POLYSILICON AND SILICON TETRACHLORIDE
#157Arrangement for ground-fault detection in an AC circuit and power supply arrangement with ground-fault detection
#158REACTOR AND METHOD FOR PRODUCTION OF SILICON
#159Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor
#160Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon
#161Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rod
#162System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
#163Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon
#164CVD APPARATUS
#165MANUFACTURING APPARATUS FOR DEPOSITING A MATERIAL AND AN ELECTRODE FOR USE THEREIN
#166CVD APPARATUS WITH ELECTRODE
#167SEED RETAINING MEMBER AND METHOD OF MANUFACTURING POLHYCRYSTALLINE SILICON USING THE SEED RETAINING MEMBER
#168Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compounds by forming phosphorus-boron compounds
#169Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compounds by venting the system with an inert gas
#170POLYCRYSTALLINE SILICON MASS AND PROCESS FOR PRODUCING POLYCRYSTALLINE SILICON MASS
#171Chuck for chemical vapor deposition systems and related methods therefor
#172FLUIDIZED BED REACTOR FOR PRODUCTION OF HIGH PURITY SILICON
#173METHOD AND DEVICE FOR PRODUCING THIN SILICON RODS
#174METHODS AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY SILICON
#175Clamping and contacting device for thin silicon rods
#176METHOD FOR PRODUCING POLYCRYSTALLINE SILICON RODS
#177Reactor and method for production of silicon
#178Production of polycrystalline silicon in substantially closed-loop systems
#179MECHANICALLY FLUIDIZED REACTOR SYSTEMS AND METHODS, SUITABLE FOR PRODUCTION OF SILICON
#180PROCESSES AND AN APPARATUS FOR MANUFACTURING HIGH PURITY POLYSILICON
#181METHOD FOR PRODUCING THIN SILICON RODS
#182Process for producing polycrystalline silicon
#183Process for production of polycrystalline silicon
#184Hermetic Container for Thermal Conversion Reaction
#185ARRANGEMENT AND METHOD FOR MEASUREMENT OF THE TEMPERATURE AND OF THE THICKNESS GROWTH OF SILICON RODS IN A SILICON DEPOSITION REACTOR
#186SYSTEM AND METHOD OF SEMICONDUCTOR MANUFACTURING WITH ENERGY RECOVERY
#187Reactor for producing polycrystalline silicon using the monosilane process
#188METHOD AND APPARATUS FOR THE PRODUCTION OF CHLOROSILANES
#189POLY SILICON DEPOSITION DEVICE
#190POLYCRYSTALLINE SILICON ROD AND APPARATUS FOR PRODUCING THE SAME
#191Apparatus for producing polycrystalline silicon
#192Method of making large surface area filaments for the production of polysilicon in a CVD reactor
#193Process for producing polycrystalline silicon
#194METHOD AND SYSTEM FOR THE PRODUCTION OF PURE SILICON
#195Method of washing polycrystalline silicon, apparatus for washing polycrystalline silicon, and method of producing polycrystalline silicon
#196BELL JAR FOR SIEMENS REACTOR INCLUDING THERMAL RADIATION SHIELD
#197Closed-loop silicon production
#198TETRAHALOSILANE CONVERTER
#199Infrared ray transmissive optical member and manufacturing method thereof, optical device, and optical apparatus
#200Method for producing crack-free polycrystalline silicon rods
#201Graphite electrode
#202SYSTEM AND METHOD FOR POLYCRYSTALLINE SILICON DEPOSITION
#203Conical graphite electrode with raised edge
#204Apparatus and method of manufacturing silicon seed rod
#205CVD-Siemens Reactor Process Hydrogen Recycle System
#206CHUCK AND BRIDGE CONNECTION POINTS FOR TUBE FILAMENTS IN A CHEMICAL VAPOR DEPOSITION REACTOR
#207Silicon production with a fluidized bed reactor integrated into a Siemens-type process
#208GOLD-COATED POLYSILICON REACTOR SYSTEM AND METHOD
#209Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactor
#210Systems and methods for distributing gas in a chemical vapor deposition reactor
#211CVD REACTOR WITH ENERGY EFFICIENT THERMAL-RADIATION SHIELD
#212Method for producing polycrystalline silicon
#213Nano-structured lithium-sulfur battery and method of making same
#214Rod-type polysilicon having improved breaking properties
#215System and Method for Controlling the System for the Production of Polycrystalline Silicon
#216Reactor for the Production of Polycrystalline Silicon
#217Method for producing polycrystalline silicon
#218Manufacturing apparatus for depositing a material and an electrode for use therein
#219Manufacturing apparatus for depositing a material and an electrode for use therein
#220Fluidized bed reactor for production of high purity silicon
#221Polycrystalline silicon producing method
#222PROCESS AND APPARATUS FOR PRODUCING POLYSILICON SHEETS
#223Process for improved chemcial vapor deposition of polysilicon
#224Polycrystalline silicon reactor
#225PROCESSES AND AN APPARATUS FOR MANUFACTURING HIGH PURITY POLYSILICON
#226Device for the ignition and the start-up of silicon rods
#227Manufacturing apparatus of polycrystalline silicon
#228Methods for preparation of high-purity polysilicon rods using a metallic core means
#229Polycrystalline silicon and method for the production thereof
#230Fluidized bed reactor for production of high purity silicon
#231Method for producing polycrystalline silicon, and facility for producing polycrystalline silicon
#232Method of growing silicon and method of manufacturing solar cell using the same
#233HIGH TEMPERATURE AND HIGH VOLTAGE ELECTRODE ASSEMBLY DESIGN
#234Polycrystalline Germanium-Alloyed Silicon And A Method For The Production Thereof
#235Electrode, Chemical Vapor Deposition Apparatus Including the Electrode and Method of Making
#236ELECTRODE AND CHEMICAL VAPOR DEPOSITION APPARATUS EMPLOYING THE ELECTRODE
#237Deposition of high-purity silicon via high-surface area gas-solid interfaces and recovery via liquid phase
#238METHOD AND APPARATUS FOR LOW COST PRODUCTION OF POLYSILICON USING SIEMEN'S REACTORS
#239Apparatus for manufacturing seeds for polycrystalline silicon manufacture
#240Method of refining carbon parts for production of polycrystalline silicon
#241Manufacturing apparatus of polycrystalline silicon
#242APPARATUS FOR HARVESTING POLYCRYSTALLINE SILICON RODS AND METHODS OF USING THE SAME
#243Methods for preparation of high-purity polysilicon rods using a metallic core means
#244APPARATUS AND METHODS FOR PREPARATION OF HIGH-PURITY SILICON RODS USING MIXED CORE MEANS
#245Apparatus for producing polycrystalline silicon
#246Apparatus for producing trichlorosilane, and method for producing trichlorosilane
#247Silicon Film Deposition Method Utilizing a Silent Electric Discharge
#248Method of manufacturing polycrystalline silicon rod
#249Polymer inactivation method for polycrystalline silicon manufacturing device
#250Polycrystalline silicon manufacturing apparatus
#251Polycrystalline silicon reactor
#252Device and method for producing a uniform temperature distribution in an object during a precipitation process
#253PROCESS FOR PRODUCING HIGH-PURITY SILICON AND APPARATUS
#254METHOD AND APPARATUS FOR SIMPIFIED STARTUP OF CHEMICAL VAPOR DEPOSITION OF POLYSILICON
#255Process for depositing polycrystalline silicon
#256Silicon seed rod assembly of polycrystalline silicon, method of forming the same, polycrystalline silicon producing apparatus, and method of producing polycrystalline silicon
#257EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION
#258Polycrystalline silicon manufacturing apparatus and manufacturing method
#259Apparatus and methods for preparation of high-purity silicon rods using mixed core means
#260Silicon Production method
#261Reactor for polycrystalline silicon and polycrystalline silicon production method
#262Method for producing trichlorosilane and method for producing polycrystalline silicon
#263Method for producing trichlorosilane and method for producing polycrystalline silicon
#264Polycrystalline silicon rod for zone reflecting and a process for the production thereof
#265Production Of Polycrystalline Silicon
#266Method for manufacturing polycrystalline silicon, and polycrystalline silicon for solar cells manufactured by the method
#267Silicon production with a fluidized bed reactor integrated into a siemens-type process
#268Method and device for producing high purity polycrystalline silicon with a reduced dopant content
#269Increased polysilicon deposition in a CVD reactor
#270Reactor and Method for Manufacturing Silicon
#271Production of silicon through a closed-loop process
#272Process for producing silicon
#273Set of processes for removing impurities from a silcon production facility
#274Process for producing high-purity silicon and apparatus
#275Reaction apparatus for producing silicon