84986 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes; Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
PROCESS FOR PRODUCING TRICHLOROSILANE WITH STRUCTURE-OPTIMISED SILICON PARTICLES
#2HYDROGEN CHLORIDE DEHYDRATION METHOD
#3PROCESS FOR PRODUCING TRICHLOROSILANE WITH STRUCTURE-OPTIMISED SILICON PARTICLES
#4Iron catalyzed hydrochlorination of silicon tetrachloride to trichlorosilane
#5Production method for trichlorosilane, and pipe
#6TRICHLOROSILANE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING TRICHLOROSILANE
#7Purification system of trichlorosilane and silicon crystal
#8Primary distillation boron reduction
#9Fluidized bed reactor for preparing chlorosilanes
#10Method of preparing trichlorosilan
#11Method for producing chlorosilane gas using continuous tubular reactor
#12HYDROCHLORINATION REACTOR
#13Method for surface-modifying metal silicide, and method and apparatus for preparing trichlorosilane using surface-modified metal silicide
#14Preparation of trichlorosilane
#15Bubble size minimizing internals for fluidized bed reactors
#16Process for operating a fluidized bed reactor
#17Compositional analysis of a gas or gas stream in a chemical reactor and method for preparing chlorosilanes in a fluidized bed reactor
#18METHOD OF PREPARING TRICHLOROSILANE
#19TEMPERATURE MANAGEMENT IN CHLORINATION PROCESSES AND SYSTEMS RELATED THERETO
#20Method for producing trichlorosilane
#21METHOD FOR PREPARING TRICHLOROSILANE
#22TRICHLOROSILANE PRODUCTION
#23PROCESS FOR PREPARING TRICHLOROSILANE
#24Hydrogen chloride gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
#25Production of polycrystalline silicon in substantially closed-loop systems
#26Method for purifying chlorosilanes
#27Method for production of trichlorosilane and silicon for use in the production of trichlorosilane
#28METHOD FOR PRODUCING TRICHLOROSILANE WITH REDUCED BORON COMPOUND IMPURITIES
#29CLOSED LOOP PROCESS FOR PREPARING TRICHLOROSILANE FROM METALLURGICAL SILICON
#30Method for producing trichlorosilane
#31Process for producing trichlorosilane
#32PROCESS AND PLANT FOR PREPARING TRICHLOROSILANE
#33Apparatus for producing trichlorosilane and method for producing trichlorosilane
#34Production of Polycrystalline Silicon in Substantially Closed-loop Processes
#35Production of polycrystalline silicon in substantially closed-loop systems
#36METHOD FOR PRODUCING TRICHLOROSILANE WITH REDUCED BORON COMPOUND IMPURITIES
#37METHOD AND SYSTEM FOR THE PRODUCTION OF PURE SILICON
#38Fluidized bed process for synthesizing trichlorosilane and a trichlorosilane synthesizer
#39Apparatus for producing trichlorosilane and method for producing trichlorosilane
#40Method for producing trichlorosilane
#41Apparatus for producing trichlorosilane
#42Method of producing trichlorosilane (TCS) rich product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
#43Effluent gas recovery process for silicon production
#44EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION
#45EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION
#46Hydrogen chloride gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
#47Apparatus for producing trichlorosilane
#48PROCESS FOR PRODUCING TRICHLOROSILANE
#49Silicon and catalyst material preparation in a process for producing trichlorosilane
#50Recycling of high-boiling compounds within an integrated chlorosilane system
#51Method for production of trichlorosilane and silicon for use in the production of trichlorosilane
#52Process for preparing trichloromonosilane
#53Method for producing chlorosilanes