84988 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes Halogenated silanes obtained by disproportionation and molecular rearrangement of halogenated silanes
METHOD FOR PRODUCING HALOTRISILANE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES USING THE SAME
#2Synthesis of 1,1,1-trichlorodisilane
#3METHOD FOR FABRICATING TRIHALODISILANE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
#4Transsilylation catalysis
#5METHODS OF HYDROGENATING A HALOSILANE
#6Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane and plant for production of monosilane
#7METHOD FOR PRODUCING TRICHLOROSILANE
#8DISTILLATION PROCESS
#9Method for purifying halogenated oligosilanes
#10Process for the cleavage of silicon-silicon bonds and/or silicon-chlorine bonds in mono-, poly- and/or oligosilanes
#11Process for preparing octachlorotrisilane and higher polychlorosilanes with utilization of hexachlorodisilane
#12Neutral complex of cyclic silane, manufacturing method therefor, and method for manufacturing cyclic hydrogenated silane or cyclic organic silane
#13Process for the preparation of hexachlorodisilane by cleavage of higher polychlorosilanes such as octachlorotrisilane
#14Process and apparatus for preparation of octachlorotrisilane
#15Method and device for producing polychlorosilanes
#16METHOD FOR PRODUCING HIGHER SILANES WITH IMPROVED YIELD
#17PROCESS FOR PREPARING TRICHLOROSILANE
#18Monochlorosilane, process and apparatus for the preparation thereof
#19Selective splitting of high order silanes
#20Process for preparing hydridosilanes
#21Process for preparing higher halosilanes and hydridosilanes
#22Production of polycrystalline silicon in substantially closed-loop systems
#23Nanowires made of novel precursors and method for the production thereof
#24FLOW TUBE REACTOR FOR CONVERSION OF SILICON TETRACHLORIDE TO TRICHLOROSILANE
#25Method for producing hexachlorodisilane
#26CHLORIDE-CONTAINING SILICON
#27Method for producing hydridosilanes
#28Process and use of amino-functional resins for dismutating halosilanes and for removing extraneous metals
#29PROCESS FOR TREATING CATALYST PRECURSORS
#30Process for hydrogenation of a silicon tetrahalide and silicon to trihalosilane
#31Hybrid TCS-siemens process equipped with 'turbo charger' FBR; method of saving electricity and equipment cost from TCS-siemens process polysilicon plants of capacity over 10,000 MT/YR
#32Production of Polycrystalline Silicon in Substantially Closed-loop Processes
#33METHOD FOR COLLECTION OF HEXACHLORODISILANE AND PLANT FOR THE METHOD
#34Method of producing trichlorosilane (TCS) rich chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor -II
#35METHOD AND SYSTEM FOR THE PRODUCTION OF PURE SILICON
#36Chlorosilane production method
#37METHODS FOR REDUCING THE DEPOSITION OF SILICON ON REACTOR WALLS USING PERIPHERAL SILICON TETRACHLORIDE
#38Fluidized bed reactor systems and distributors for use in same
#39Method of producing trichlorosilane (TCS) rich product stably from hydrogenation of silicon tetra chloride (STC) in fluidized gas phase reactor (FBR) and the structure of the reactor
#40Method for producing polycrystalline silicon
#41CATALYST AND METHOD FOR DISMUTATION OF HALOSILANES CONTAINING HYDROGEN
#42Method of producing trichlorosilane (TCS) rich Chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
#43PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING HIGH PURITY SILICON
#44Method for producing polycrystalline silicon, and facility for producing polycrystalline silicon
#45Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane
#46PROCESS FOR CONTINUOUSLY PRODUCING MONOSILANE
#47Process for producing monosilane
#48Silicon Production method
#49Process for preparing Si-H-containing silanes
#50Apparatus and process for preparing silanes