84374 ⎘
Halogens; Halogen acids Inter-halogen compounds
METHOD FOR PRODUCING BROMINE PENTAFLUORIDE
#2Substrate processing gas, storage container, and substrate processing method
#3Fluorinating agent
#4Feeding process of chlorine fluoride
#5Method for purifying fluorine compound gas
#6Composition, fluorinating reagent, and method for producing fluorinated organic compound
#7Fluorinating agent
#8IF-derived iodine fluoride compound recovery method and recovery device
#9Method for Manufacturing Oxygen-Containing Halogenated Fluoride
#10STABILIZING AQUEOUS SOLUTION OF IODINE CHLORIDE BY ADDING SODIUM CHLORIDE
#11Method for producing oxygen-containing halogenated fluoride
#12METHOD OF MANUFACTURING FLUORINATED GAS COMPOUNDS AND APPARATUS FOR MANUFACTURING THE SAME
#13Method for production of iodine heptafluoride
#14Process for production of iodine pentafluoride
#15Apparatus and method for purification of corrosive gas streams
#16Device and method for producing chlorine trifluoride and system for etching semiconductor substrates using this device
#17Azeotrope-like compositions of iodine heptafluoride and hydrogen fluoride