86964 ⎘
Other methods of shaping glass by gas- or vapour- phase reaction processes Reactant delivery systems
Sub-classes:POROUS GLASS BASE MATERIAL MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING GLASS BASE MATERIAL
#2Method for manufacturing glass ingot
#3Parallel slit torch for making optical fiber preform
#4Method and apparatus for producing fused quartz from a polymerizable polyalkylsiloxane compound with membrane filter as cleaning device
#5Device for manufacturing SiO-TiObased glass
#6Process for producing synthetic quartz glass using a cleaning device
#7Titania-doped quartz glass and making method
#8Mirror blank for EUV lithography without expansion under EUV radiation
#9Titania-doped quartz glass and making method
#10Evaporator and method for producing synthetic fused quartz
#11Method for the manufacture of synthetic quartz glass
#12Method and device for producing rod lenses
#13Method for producing titanium-doped synthetic quartz glass
#14Low expansion silica-titania articles with a Tgradient by compositional variation
#15Manufacturing method for SiO-TiObased glass and manufacturing method for photomask substrate made of SiO-TiObased glass
#16METHOD FOR PRODUCING CYLINDERS OF QUARTZ GLASS
#17Manufacturing method for SiO—TiObased glass, manufacturing method for plate-shaped member made of SiO—TiObased glass, manufacturing device, and manufacturing device for SiO—TiObased glass
#18Method for producing synthetic quartz glass
#19Method for manufacturing soot glass deposit body
#20Method for producing synthetic quartz glass
#21Method for producing synthetic quartz glass
#22Atomizing method for producing synthetic quartz glass
#23Method for producing synthetic quartz glass
#24Manufacture of synthetic silica glass
#25Titania-doped quartz glass and making method
#26Substrate for EUVL optical member
#27Titania doped quartz glass and making method
#28Low expansivity, high transmission titania doped silica glass
#29METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS
#30Apparatus for particle synthesis
#31TiO-containing silica glass and optical member for EUV lithography using high energy densities as well as special temperature controlled process for its manufacture
#32Substrate for EUV mask blanks
#33Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
#34Silica glass containing TiOand process for its production
#35Silica glass containing TiOand process for its production
#36Optical materials and optical devices
#37QUARTZ-TYPE GLASS AND PROCESS FOR ITS PRODUCTION
#38Apparatus for particle synthesis
#39Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
#40Deuteroxyle-doped silica glass, optical member and lithographic system comprising same and method of making same
#41Method for charging particles in a material manufacturing process
#42Silica glass
#43Adjusting expansivity in doped silica glasses
#44Multilayered optical structures
#45Method for the production of synthetic silica glass
#46Method for vaporizing a liquid reactant in manufacturing a glass preform
#47Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
#48Silica glass containing TiOand process for its production
#49Method for the preparation of doped oxide material
#50Method of forming optical fiber preforms
#51Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
#52Optical materials and optical devices
#53High rate deposition for the formation of high quality optical coatings