86969 ⎘
Other methods of shaping glass by gas- or vapour- phase reaction processes Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
Sub-classes:TUBULAR COMPOSITE BODY OF QUARTZ GLASS AND METHOD FOR PRODUCING AND USING THE SAME
#2SILICA GLASS SUBSTRATE
#3TITANIA-SILICA GLASS WITH UNIFORM HYDROXYL CONCENTRATION
#4METHOD FOR MAKING HALOGEN DOPED OPTICAL ELEMENT
#5SILICA GLASS POROUS BODY AND MANUFACTURING METHOD THEREFOR
#6Quartz glass with low content of hydroxyl and high purity and method for preparing the same
#7Process for the preparation of fluorinated quartz glass
#8Additive manufacturing processes and manufactured article
#9Method for modification of surface of optical fiber preform
#10Method and device for homogenizing glass
#11Optical tube waveguide lasing medium and related method
#12Ultralow expansion titania-silica glass
#13LAYERED GLASS STRUCTURES
#14Additive manufacturing processes and manufactured article
#15Laser system and method forming an edge section of a high purity fused silica glass sheet
#16GLASS SUBSTRATES COMPRISING RANDOM VOIDS AND DISPLAY DEVICES COMPRISING THE SAME
#17Method for producing an optical blank from synthetic quartz glass
#18OPTICAL COMPONENT MADE OF QUARTZ GLASS FOR USE IN ArF EXCIMER LASER LITHOGRAPHY AND METHOD FOR PRODUCING THE COMPONENT
#19METHOD FOR PRODUCING GLASS PREFORM FOR OPTICAL FIBER
#20Device for manufacturing SiO-TiObased glass
#21METHOD OF MAKING HALOGEN DOPED OPTICAL ELEMENT
#22Ultralow expansion titania-silica glass
#23Layered glass structures
#24Bromine-doped optical fiber
#25Mirror blank for EUV lithography without expansion under EUV radiation
#26Ultralow expansion titania-silica glass
#27Silica-containing sheet and related system and methods
#28Method for producing titanium-doped silica glass for use in EUV lithography and blank produced in accordance therewith
#29Doped ultra-low expansion glass and methods for making the same
#30Low scattering silica glass and method for heat-treating silica glass
#31High hydroxyl TiO-SiOglass
#32Method for producing a blank of fluorine-doped and titanium-doped glass having a high silicic-acid content and a blank produced according to the method
#33Method for the manufacture of doped quartz glass
#34Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component
#35Blank of TiO-SiOglass for a mirror substrate for use in EUV lithography and method for the production thereof
#36Blank made of titanium-doped silica glass and method for the production thereof
#37Heat treatment method of synthetic quartz glass
#38Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof
#39Manufacturing method for SiO—TiObased glass, manufacturing method for plate-shaped member made of SiO—TiObased glass, manufacturing device, and manufacturing device for SiO—TiObased glass
#40Locally-sintered porous soot parts and methods of forming
#41EUV lithography member, making method, and titania-doped quartz glass
#42Black synthetic quartz glass with transparent layer and method for producing the same
#43Heat treatment method for synthetic quartz glass
#44Nanoimprint mold-forming synthetic quartz glass and making method
#45Titania-doped quartz glass and making method
#46High purity synthetic silica and items such as semiconductor jigs manufactured therefrom
#47Copper-containing silica glass, method for producing the same, and xenon flash lamp using the same
#48Substrate for EUVL optical member
#49SILICA GLASS CONTAINING TIO2
#50Optical member for deep ultraviolet and process for producing same
#51Treatment of silica based soot or an article made of silica based soot
#52Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof
#53Synthesized silica glass for optical component
#54Method for producing TiO-SiOglass body, method for heat-treating TiO-SiOglass body, TiO-SiOglass body, and optical base for EUVL
#55Titania-doped quartz glass member and making method
#56METHOD FOR PRODUCING TIO2-SIO2 GLASS BODY, METHOD FOR HEAT-TREATING TIO2-SIO2 GLASS BODY, TIO2-SIO2 GLASS BODY, AND OPTICAL BASE FOR EUVL
#57Titania-doped quartz glass and making method
#58Near net fused silica articles and method of making
#59PROCESS FOR PRODUCING SYNTHETIC QUARTZ GLAS, JIG FOR SYNTHETIC-QUARTZ-GLASS PRODUCTION, AND SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER
#60METHOD FOR PRODUCTION OF SYNTHETIC QUARTZ GLASS
#61METHOD FOR PRODUCTION OF SYNTHETIC QUARTZ GLASS
#62Expansivity in Low Expansion Silica-Titania Glasses
#63Low expansivity, high transmission titania doped silica glass
#64TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD
#65Synthetic silica glass with uniform fictive temperature
#66Method for the production of a cylinder made from quartz glass using a retaining device, and retaining device
#67TiO-containing silica glass for optical member for EUV lithography
#68TiO-containing silica glass and optical member for lithography using the same
#69TiO-containing silica glass and optical member for EUV lithography using the same
#70TiO-containing silica glass and optical member for EUV lithography using high energy densities as well as special temperature controlled process for its manufacture
#71Roll-to-roll glass soot sheet sintering method and apparatus
#72TIO-containing silica glass and optical member for lithography using the same
#73Synthetic opaque quartz glass and method for producing the same
#74Method for producing a cylinder from synthetic quartz glass
#75TiO-containing silica glass
#76SYNTHETIC SILICA GLASS TUBE FOR THE PRODUCTION OF A PREFORM
#77Method of producing synthetic quartz glass for excimer laser
#78Optical member comprising TiO-containing silica glass
#79High purity fused silica with low absolute refractive index
#80REDUCED STRIAE LOW EXPANSION GLASS AND ELEMENTS, AND A METHOD FOR MAKING SAME
#81COPPER-CONTANING SILICA GLASS, METHOD FOR PRODUCING THE SAME, AND XENON FLASH LAMP USING THE SAME
#82METHOD FOR REDUCING INCLUSIONS IN SILICA-TITANIA GLASS
#83OPTICAL COMPONENT MADE FROM SYNTHETIC QUARTZ GLASS WITH ENHANCED RADIATION RESISTANCE, AND METHOD FOR PRODUCING THE COMPONENT
#84Substrate for EUV mask blanks
#85Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
#86Titania-doped quartz glass member and making method
#87Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
#88Three pressure hydrogen loading cycle for fused silica
#89PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2
#90Optical component quartz glass
#91Halide free glasses having low OH, OD concentrations
#92SYNTHETIC SILICA GLASS OPTICAL MATERIAL HAVING HIGH RESISTANCE TO LASER INDUCED DAMAGE
#93Synthetic quartz glass substrate for excimer lasers and making method
#94Method for producing a semifinished product from synthetic quartz glass
#95DEUTEROXYL-DOPED SILICA GLASS, OPTICAL MEMBER AND LITHOGRAPHIC SYSTEM COMPRISING SAME AND METHOD OF MAKING SAME
#96Hydrogen loading of near net shape optics
#97Manufacture of Large Articles in Synthetic Vitreous Silica
#98BLACK SYNTHETIC QUARTZ GLASS WITH A TRANSPARENT LAYER
#99Fused silica having low OH, OD levels and method of making
#100Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the component
#101Titania-doped quartz glass for nanoimprint molds
#102SYNTHETIC QUARTZ GLASS WITH FAST AXES OF BIREFRINGENCE DISTRIBUTED IN CONCENTRIC-CIRCLE TANGENT DIRECTIONS AND PROCESS FOR PRODUCING THE SAME
#103SYNTHETIC QUARTZ GLASS WITH RADIAL DISTRIBUTION OF FAST AXES OF BIREFRINGENCE AND PROCESS FOR PRODUCING THE SAME
#104Glasses having low OH, OD levels
#105Process and apparatus for making glass sheet
#106Synthetic quartz glass substrate for excimer lasers and making method
#107Quartz glass having excellent resistance against plasma corrosion and method for producing the same
#108Quartz glass substrate and process for its production
#109F-doped silica glass and process of making same
#110PROCESS FOR PRODUCING SYNTHETIC QUARTZ AND SYNTHETIC QUARTZ GLASS FOR OPTICAL MEMBER
#111Process for producing synthetic quartz glass
#112Process for producing synthetic quartz glass and synthetic quartz glass for optical member
#113Quartz Glass Component For A Uv Radiation Source And Method For Producing And Testing The Aptitude Of Such A Quartz Glass Component
#114Method and Device for Producing a Hollow Quartz-Glass Cylinder
#115Reduced striae low expansion glass and elements, and a method for making same
#116Method for producing synthetic quartz glass with predetermined hydroxyl group content
#117Method for Producing a Hollow Cylinder From Synthetic Quartz Glass, Using a Retaining Device
#118PROCESS FOR PRODUCING SILICA GLASS CONTAINING TIO2, AND OPTICAL MATERIAL FOR EUV LITHOGRAPHY EMPLOYING SILICA GLASS CONTAINING TIO2
#119Reduced striae low expansion glass and elements, and a method for making same
#120Reduced striae low expansion glass and elements, and a method for making same
#121Titania-doped quartz glass and making method, EUV lithographic member and photomask substrate
#122Method and apparatus for making fused silica
#123Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same
#124Deuteroxyle-doped silica glass, optical member and lithographic system comprising same and method of making same
#125Fused silica glass and method for making the same
#126Synthetic quartz glass substrate for excimer lasers and making method
#127Silica glass containing TiOand process for its production
#128Silica glass
#129Photomask substrate made of synthetic quartz glass and photomask
#130Optical component of quartz glass, method for producing said component, and method for exposing a substrate
#131Synthetic quartz glass and process for producing a quartz glass body
#132Synthetic silica glass tube for the production of a preform, method for producing the same in a vertical drawing process and use of said tube
#133Synthetic quartz glass for optical member and its production method
#134Optical synthetic quartz glass and method for producing the same
#135Adjusting expansivity in doped silica glasses
#136Method for the production of a hollow cylinder made of synthetic quartz glass with the aid of a holding device, and appropriate holding device for carrying out said method
#137Synthetic silica having low polarization-induced birefringence, method of making same and lithographic device comprising same
#138High refractive index homogeneity fused silica glass and method of making same
#139High transmission synthetic silica glass and method of making same
#140Methods and apparatus for processing soot articles
#141Method for manufacturing synthetic silica glass substrate for photomask and synthetic silica glass substrate for photomask manufactured thereby
#142Production process of synthetic quartz glass
#143Photolithography methods and systems
#144Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member
#145Quartz glass having excellent resistance against plasma corrosion and method for producing the same
#146Method of manufacturing fluorine doped silica glass article, and method of manufacturing optical fiber preform and optical fiber using the method, and optical fiber made by such method
#147Jacket tube made of synthetically produced quartz glass and optical fibres produced using said jacket tube
#148Optical component of quartz glass, method for producing the optical component, and use thereof
#149Synthetic silica glass optical material having high resistance to laser induced damage
#150Synthetic quartz glass
#151Method for the production of a cylindrical quartz glass body having a low oh content
#152Method of forming optical fiber preforms
#153Substantially dry, silica-containing soot, fused silica and optical fiber soot preforms, apparatus, methods and burners for manufacturing same
#154Process for making low-OH glass articles and low-OH optical resonator
#155Laser sintering system and method for forming high purity, low roughness silica glass