119993 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material; Reactive sputtering or evaporation Activation or excitation of reactive gases outside the coating chamber
Sub-classes:Method for formation of a transition metal dichalcogenide (TMDC) material layer
#2Filling a cavity in a substrate using sputtering and deposition
#3In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-selenide by nitrogen plasma
#4In situ nitrogen doping of co-evaporated copper-zinc-tin-sulfo-selenide by nitrogen plasma
#5Radical generator and molecular beam epitaxy apparatus
#6Luminescent materials that emit light in the visible range or the near infrared range and methods of forming thereof
#7Vapor Deposition of Ceramic Coatings
#8LUMINESCENT MATERIALS THAT EMIT LIGHT IN THE VISIBLE RANGE OR THE NEAR INFRARED RANGE AND METHODS OF FORMING THEREOF
#9Oxide coated cutting insert
#10Oxide coated cutting insert
#11GROUP III-V NITRIDE LAYER AND METHOD FOR PRODUCING THE SAME
#12Group-III metal nitride and preparation thereof
#13Charge-free low-temperature method of forming thin film-based nanoscale materials and structures on a substrate
#14Method and apparatus for producing semiconductor films and related devices
#15Charge-free method of forming nanostructures on a substrate
#16Charge-free low-temperature method of forming thin film-based nanoscale materials and structures on a substrate
#17Method and apparatus for manufacturing a zinc oxide thin film at low temperatures
#18Film growth at low pressure mediated by liquid flux and induced by activated oxygen
#19Hybrid beam deposition system and methods for fabricating metal oxide-ZnO films, p-type ZnO films, and ZnO-based II-VI compound semiconductor devices
#20Sp3 bond boron nitride emitting light in ultraviolet region, its producing method, and functional material using same
#21Semiconductor structures and methods of fabricating semiconductor structures comprising hafnium oxide modified with lanthanum, a lanthanide-series metal, or a combination thereof