LAMINATED BODY, SOLAR CELL, MULTI-JUNCTION SOLAR CELL, SOLAR CELL MODULE, PHOTOVOLTAIC POWER GENERATION SYSTEM, AND MANUFACTURING METHOD FOR LAMINATED BODY

SYSTEMS AND METHODS FOR PHYSICAL VAPOR DEPOSITION OF SUPERCONDUCTORS

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

FILM FORMING APPARATUS AND METHOD FOR MANUFACTURING PART HAVING FILM CONTAINING SILICON

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Coated articles with optical coatings having residual compressive stress

FILM FORMING APPARATUS AND FILM FORMING METHOD

NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS

Optical film, sputtering target, and method of producing optical film

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

Coated articles with optical coatings having residual compressive stress

Reactive particles supply system

Methods, devices, and code for controlling a coating process

Film forming apparatus and method for manufacturing part having film containing silicon

Coating control using forward parameter correction and adapted reverse engineering

Monolayer-by-monolayer growth of MgO layers using mg sublimation and oxidation

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor

Vacuum pump system

Al—Cr-based ceramic coatings with increased thermal stability

Monolayer-by-monolayer growth of MgO layers using Mg sublimation and oxidation

Monolayer-by-monolayer growth of MgO layers using Mg sublimation and oxidation

Coated articles with optical coatings having residual compressive stress

THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FORMING THIN FILM

Coated body and method for production of the body

SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING FILM

METHOD AND SYSTEM OF ADJUSTING PROCESS GAS FLOW OF VACUUM COATING EQUIPMENT

Film formation apparatus

Method of forming internal stress control film

METHOD FOR GRADED ANTI-REFLECTIVE COATINGS BY PHYSICAL VAPOR DEPOSITION

COATING FOR OPTICAL AND ELECTRONIC APPLICATIONS

Extensible barrier films, articles employing same and methods of making same

High mobility doped metal oxide thin films and reactive physical vapor deposition methods of fabricating the same

REACTIVE SPUTTERING APPARATUS AND REACTIVE SPUTTERING METHOD

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

Transparent conductive film

ENGINEERING THE OPTICAL PROPERTIES OF AN INTEGRATED COMPUTATIONAL ELEMENT BY ION IMPLANTATION

METHOD FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, CONTROLLER FOR CONTROLLING A GAS SUPPLY TO A PROCESS CHAMBER, AND APPARATUS

Filling a cavity in a substrate using sputtering and deposition

Method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes

Forming electrode active materials

Method and system for producing coated steel components

Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

Decorative HIPIMS hard material layers

Film deposition apparatus and film deposition method

Engineering the optical properties of an integrated computational element by ion implantation

Method for controlling a gas supply to a process chamber, controller for controlling a gas supply to a process chamber, and apparatus

CREEP RESISTANT REFLECTIVE STRUCTURE IN MEMS DISPLAY

Multilayer thin film, method of manufacturing the same, and electronic product including the same

Target age compensation method for performing stable reactive sputtering processes

Hard material layers with selected thermal conductivity

Thin film forming method

Nonvolatile memory element and method of manufacturing the same

Optically tuned hardmask for multi-patterning applications

Method for manufacturing puncture needle

Method for controlling semiconductor deposition operation

High-rate reactive sputtering of dielectric stoichiometric films

Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

Deposition systems and methods

Sputtering device and sputtering method

Closed loop control

Method for graded anti-reflective coatings by physical vapor deposition

System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes

Optically tuned hardmask for multi-patterning applications

Plasma emission monitor and process gas delivery system

REACTIVE SPUTTERING METHOD AND REACTIVE SPUTTERING APPARATUS

Bilayer chromium nitride coated articles and related methods

Solar selective absorber based on double nitride composite material and process for its preparation

Magnetron sputtering process

Antiwetting coating for liquid metal bearing and method of making same

Transparent conductive film

Multifunctional electrode

Method for producing cubic zirconia layers

METHOD OF FORMING ATO WITH HIGH THROUGHPUT AND ELLIPSOMETRY DIAGNOSTIC METHOD FOR THE TCO PROCESS

Sputtering apparatus

Method for manufacturing acoustic wave device

METHOD OF CONTROLLING LITHIUM UNIFORMITY

Closed loop sputtering controlled to enhance electrical characteristics in deposited layer

METHOD OF CONTROLLING LITHIUM UNIFORMITY

Method for manufacturing magnetic recording medium, and magnetic recording/reproducing apparatus

DEVICE HOUSING AND METHOD FOR MAKING SAME

Housing and method for making the same

Housing and method for making the same

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHOD FOR DETERMINING PROCESS-SPECIFIC DATA OF A VACUUM DEPOSITION PROCESS

Electrochromic tungsten oxide film deposition

Method for coating a substrate in a vacuum chamber having a rotating magnetron

Optical member, plastic lens for eyeglasses, and method for manufacturing the same

Deposition system with a rotating drum

Film forming apparatus and film forming method

Sputtering apparatus having gas supply system

PROCESS FOR FORMING A BACK REFLECTOR FOR PHOTOVOLTAIC DEVICES

Process for the deposition of an anti-reflection film on a substrate

Reactive sputtering method and reactive sputtering apparatus

TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING THE SAME

Method for controlling a reactive-high-power pulsed magnetron sputter process and corresponding device

Method of forming an indium-containing transparent conductive oxide film, metal targets used in the method and photovoltaic devices utilizing said films

Techniques for depositing transparent conductive oxide coatings using dual C-MAG sputter apparatuses

SPUTTER DEPOSITION METHOD AND SYSTEM FOR FABRICATING THIN FILM CAPACITORS WITH OPTICALLY TRANSPARENT SMOOTH SURFACE METAL OXIDE STANDOFF LAYER

Closed-loop sputtering controlled to enhance electrical characteristics in deposited layer

Ion gun system, vapor deposition apparatus, and method for producing lens

METHOD OF MAKING A TMR SENSOR HAVING A TUNNEL BARRIER WITH GRADED OXYGEN CONTENT

Partial pressure measuring method and partial pressure measuring apparatus

TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING THE SAME

Transparent and Conductive Oxide Layer and Method of Making Same and Using it in a Thin-Film Solar Cell

Optical element, optical device, and method of producing optical element

System and method for sputtering a tensile silicon nitride film

Gas barrier film, method of producing the same and stimulable phosphor panel

Method for reactive sputter deposition of an ultra-thin metal oxide film

Method for producing silicon oxide film and method for producing optical multilayer film

Method for coating substrates in inline installations

Functional fiber sheet

Device for reactive sputtering

Reactive sputtering method and device

Photomask blank, photomask, methods of manufacturing the same and methods of forming micropattern

System and method for feedforward control in thin film coating processes

Process for producing transparent conductive laminate

Transparent conductive oxides

Optimizing cadmium (CD) alloy solar cells with sputtered copper-dopped zinc telluride (ZNTE:CU) back contacts in the presence of hydrogen