ClassID:

119999

C23C14/0057 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material; Reactive sputtering or evaporation; Reactive sputtering using reactive gases other than O, HO, N, NH or CH

Recent Application in this class:
#1
20260093060
2026-04-02

MIRROR LAYER AND MIRROR FOR A LITHOGRAPHIC APPARATUS

#2
20250171888
2025-05-29

METHOD FOR PRODUCING AN OPTICAL LAYER SYSTEM, AND AN OPTICAL LAYER SYSTEM PRODUCED THEREWITH

#3
20240278213
2024-08-22

PHOTOCATALYTIC LAYER ARRANGEMENT AND METHOD FOR PRODUCING SUCH A LAYER ARRANGEMENT

#4
20240043988
2024-02-08

GAS MIXTURE AS CO-GAS FOR ION IMPLANT

#5
20230135238
2023-05-04

TiCN having reduced growth defects by means of HiPIMS

#6
20230131985
2023-04-27

TRANSPARENT CONDUCTIVE LAYER AND TRANSPARENT CONDUCTIVE SHEET

#7
20230013146
2023-01-19

Sputtering apparatus and method of fabricating magnetic memory device using the same

#8
20230012781
2023-01-19

Sanitary equipment part

#9
20230005725
2023-01-05

METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER COATED SUBSTRATES AND APPARATUS

#10
20220363947
2022-11-17

Packaging Material And Methods Of Manufacture

#11
20220259717
2022-08-18

METHOD FOR FORMING A LAYER OF ALUMINA AT THE SURFACE OF A METALLIC SUBSTRATE

#12
20220195585
2022-06-23

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#13
20220106677
2022-04-07

High performance tool coating for press hardening of coated and uncoated ultrahigh strength steel sheet metals

#14
20220056571
2022-02-24

Film Forming Method

#15
20220042168
2022-02-10

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#16
20220042167
2022-02-10

Method for preparing ammonium thiomolybdate-porous amorphous carbon composite superlubricity film

#17
20210404053
2021-12-30

ARGON-HELIUM BASED COATING

#18
20210396200
2021-12-23

Assembly for fuel injector and coating method for the same

#19
20210395879
2021-12-23

Coated member, electronic device, and method for manufacturing the coated member

#20
20210317569
2021-10-14

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition Plasma Source For Depositing Diamond and Diamond-Like Films

#21
20210201947
2021-07-01

Magnetic recording medium, method of manufacturing magnetic recording medium and magnetic storage device

#22
20210198782
2021-07-01

METHOD FOR PREPARING BACTERICIDAL FILM HAVING SILICON NITRIDE BINDING LAYER ON SILICONE

#23
20210189548
2021-06-24

PVD process for the deposition of AlOand a coated cutting tool with at least one layer of AlO

#24
20210124100
2021-04-29

Decorative member and method for preparing same

#25
20210115553
2021-04-22

Sputtering a layer on a substrate using a high-energy density plasma magnetron

#26
20210115552
2021-04-22

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#27
20210102284
2021-04-08

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#28
20210079517
2021-03-18

Sputtering apparatus and method of fabricating magnetic memory device using the same

#29
20200340117
2020-10-29

Film formation apparatus and film formation method

#30
20200340097
2020-10-29

METHOD FOR PRODUCING SPUTTERED SILICON OXIDE ELECTROLYTE

#31
20200239999
2020-07-30

Transparent nanolayered structure having improved wear-resistant and flexibility

#32
20200208257
2020-07-02

COATING WITH DIAMOND-LIKE CARBON BY MEANS OF A PECVD MAGNETRON METHOD

#33
20200095666
2020-03-26

ABRADABLE COATING

#34
20200056281
2020-02-20

Coating material sputtered in presence of argon-helium based coating

#35
20190326628
2019-10-24

Solid electrolyte battery

#36
20190323115
2019-10-24

Color film and method of forming the same

#37
20190292654
2019-09-26

Anti-aging periodic variable reaction black chromium coating film and forming method thereof

#38
20190271070
2019-09-05

Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source

#39
20190256969
2019-08-22

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#40
20190256963
2019-08-22

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

#41
20190249293
2019-08-15

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films

#42
20190181279
2019-06-13

METHOD FOR PREPARING LAMINATED FILM AND LAMINATED FILM

#43
20190169493
2019-06-06

Fabrication of photochromic device

#44
20190136363
2019-05-09

TiCN having reduced growth defects by means of HiPIMS

#45
20190122873
2019-04-25

Ion Source Device, Sputtering Apparatus and Method

#46
20190119806
2019-04-25

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

#47
20190064651
2019-02-28

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#48
20180363128
2018-12-20

Intermediate layer formed between base material and DLC layer and film-forming method thereof

#49
20180350922
2018-12-06

High mobility doped metal oxide thin films and reactive physical vapor deposition methods of fabricating the same

#50
20180273423
2018-09-27

Process and plant for obtaining colored glazing

#51
20180245197
2018-08-30

CERAMIC METALLIC COATINGS

#52
20180195164
2018-07-12

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#53
20180158973
2018-06-07

Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing same

#54
20180142343
2018-05-24

Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor deposition

#55
20180127307
2018-05-10

Heat treatable coated article with carbon-doped zirconium based layer(s) in coating

#56
20180037981
2018-02-08

TEMPERATURE-CONTROLLED CHALCOGEN VAPOR DISTRIBUTION APPARATUS AND METHOD FOR UNIFORM CIGS DEPOSITION

#57
20170372897
2017-12-28

High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors

#58
20170288628
2017-10-05

Acoustic resonator including monolithic piezoelectric layer having opposite polarities

#59
20170285458
2017-10-05

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#60
20170226624
2017-08-10

Laminate film and electrode substrate film, and method of manufacturing the same

#61
20170218498
2017-08-03

PROCESS FOR DEPOSITING METAL OR METALLOID CHALCOGENIDES

#62
20170178912
2017-06-22

Capacitive coupled plasma source for sputtering and resputtering

#63
20170175253
2017-06-22

Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films

#64
20170175248
2017-06-22

Magnetically enhanced low temperature-high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond like films

#65
20170166753
2017-06-15

Fluorinated and hydrogenated diamond-like carbon materials for anti-reflective coatings

#66
20170152592
2017-06-01

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

#67
20170140906
2017-05-18

Cooling water jet pack for high power rotary cathodes

#68
20170074400
2017-03-16

Ti—Si—C—N piston ring coatings

#69
20170067148
2017-03-09

Method for modifying a TCO coating

#70
20160369386
2016-12-22

Decorative HIPIMS hard material layers

#71
20160313473
2016-10-27

Optical multilayer coating, optical lens, and method of manufacturing optical multilayer coating

#72
20160184877
2016-06-30

Coatings for forming tools

#73
20160115417
2016-04-28

Grey cast iron-doped diamond-like carbon coatings and methods for depositing same

#74
20150332900
2015-11-19

Method and table assembly for applying coatings to spherical components

#75
20150299845
2015-10-22

FILM AND METHOD FOR PREPARING THE SAME

#76
20150284837
2015-10-08

Coated cutting tool and method for the production thereof

#77
20150034477
2015-02-05

Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made therefrom

#78
20140363685
2014-12-11

Process for producing laminate, and laminate

#79
20140287214
2014-09-25

Coating material for aluminum die casting mold and method for manufacturing the same

#80
20140197408
2014-07-17

Thin-film transistor

#81
20140120341
2014-05-01

Process for manufacturing glazing comprising a porous layer

#82
20140090974
2014-04-03

TEMPERABLE AND NON-TEMPERABLE TRANSPARENT NANOCOMPOSITE LAYERS

#83
20140037943
2014-02-06

COATED ARTICLE AND METHOD FOR MAKING SAME

#84
20140008214
2014-01-09

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

#85
20130248353
2013-09-26

DEEP-UV OPTICAL COATING PREPARATION METHOD USING SPUTTERING DEPOSITION WITH PURE METAL TARGET

#86
20130243967
2013-09-19

FTO THIN FILM PREPARATION USING MAGNETRON SPUTTERING DEPOSITION WITH PURE TIN TARGET

#87
20130214493
2013-08-22

VEHICLE PISTON RING HAVING MULTI-LAYER COATING

#88
20130209767
2013-08-15

Coated article of martensitic steel and a method of forming a coated article of steel

#89
20130171464
2013-07-04

Composite insulating layer and manufacturing method thereof

#90
20130157043
2013-06-20

COATED ARTICLE AND METHOD FOR MANUFACTURING SAME

#91
20130106266
2013-05-02

METHOD FOR MAKING DEVICE HOUSING AND DEVICE HOUSING MADE BY SAME

#92
20130075247
2013-03-28

METHOD AND SYSTEM FOR FORMING CHALCOGENIDE SEMICONDUCTOR MATERIALS USING SPUTTERING AND EVAPORATION FUNCTIONS

#93
20130015057
2013-01-17

CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM

#94
20120318663
2012-12-20

Methods for forming metal fluoride film and for manufacturing optical device

#95
20120276371
2012-11-01

Coated article and method for manufacturing same

#96
20120251714
2012-10-04

Methods of rejuvenating sputtering targets

#97
20120234719
2012-09-20

Device housing and method for making same

#98
20120234046
2012-09-20

Method for producing polarizing element

#99
20120183764
2012-07-19

COATED ARTICLE AND METHOD FOR MAKING THE SAME

#100
20120171474
2012-07-05

COATED ARTICLE AND METHOD FOR MAKING SAME

#101
20120171422
2012-07-05

COATED ARTICLE AND METHOD FOR MAKING THE SAME

#102
20120171421
2012-07-05

COATED ARTICLE AND METHOD FOR MAKING THE SAME

#103
20120171416
2012-07-05

Coated article and method for making the same

#104
20120160663
2012-06-28

Sputter Deposition and Annealing of High Conductivity Transparent Oxides

#105
20120121349
2012-05-17

Product and method for its manufacture within material processing

#106
20120094429
2012-04-19

Sodium salt containing CIG targets, methods of making and methods of use thereof

#107
20120094428
2012-04-19

Manufacturing method of compound semiconductor solar cell

#108
20120090671
2012-04-19

MODIFIED BAND GAP WINDOW LAYER FOR A CIGS ABSORBER CONTAINING PHOTOVOLTAIC CELL AND METHOD OF MAKING THEREOF

#109
20120088081
2012-04-12

COATED ARTICLE AND METHOD OF MAKING THE SAME

#110
20120070653
2012-03-22

COATED ARTICLE AND METHOD FOR MAKING THE SAME

#111
20120045640
2012-02-23

Article and method for manufacturing same

#112
20120024380
2012-02-02

INTERMIXING OF CADMIUM SULFIDE LAYERS AND CADMIUM TELLURIDE LAYERS FOR THIN FILM PHOTOVOLTAIC DEVICES AND METHODS OF THEIR MANUFACTURE

#113
20120019913
2012-01-26

Lens Manufacturing Method and Lens

#114
20110259418
2011-10-27

Manufacturing apparatus and method for large-scale production of thin-film solar cells

#115
20110244621
2011-10-06

Methods of forming a conductive transparent oxide film layer for use in a cadmium telluride based thin film photovoltaic device

#116
20110209982
2011-09-01

Methods for depositing a layer on a substrate using surface energy modulation

#117
20110177357
2011-07-21

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

#118
20110091662
2011-04-21

COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION

#119
20110068402
2011-03-24

THIN FILM TRANSISTOR AND METHOD FOR PRODUCING THIN FILM TRANSISTOR

#120
20110031107
2011-02-10

Method of burying metal and apparatus of depositing metal in concave portion

#121
20110011460
2011-01-20

Chalcogenide-based photovoltaic devices and methods of manufacturing the same

#122
20100320456
2010-12-23

Method for Fabricating a Doped and/or Alloyed Semiconductor

#123
20100278683
2010-11-04

Manufacturing Apparatus and Method for Large-Scale Production of Thin-Film Solar Cells

#124
20100276282
2010-11-04

Manufacturing Apparatus and Method for Large-Scale Production of Thin-Film Solar Cells

#125
20100247928
2010-09-30

Method of coating a surface of an article against aquatic bio fouling

#126
20100135738
2010-06-03

Coated cutting tool and a method of making thereof

#127
20100109058
2010-05-06

Conductive oxynitride and method for manufacturing conductive oxynitride film

#128
20100078311
2010-04-01

Aluminum Floride Thin Film Deposition Method

#129
20100065418
2010-03-18

REACTIVE MAGNETRON SPUTTERING FOR THE LARGE-SCALE DEPOSITION OF CHALCOPYRITE ABSORBER LAYERS FOR THIN LAYER SOLAR CELLS

#130
20100006425
2010-01-14

Methods of forming a layer for barrier applications in an interconnect structure

#131
20090227105
2009-09-10

Methods of forming a layer for barrier applications in an interconnect structure

#132
20090214787
2009-08-27

Erosion Resistant Coatings

#133
20090200159
2009-08-13

REACTIVE SPUTTERING METHOD

#134
20090152102
2009-06-18

TRANSPARENT OPTICAL FILM AND METHOD OF FORMING THE SAME

#135
20090145746
2009-06-11

Manufacturing apparatus and method for large-scale production of thin-film solar cells

#136
20090145744
2009-06-11

Method of forming film, film forming apparatus and storage medium

#137
20090068082
2009-03-12

Synthesis and characterization of a highly stable amorphous silicon hydride as the product of a catalytic hydrogen plasma reaction

#138
20080271779
2008-11-06

Methods of forming sputtering targets

#139
20080264203
2008-10-30

Cutting tool insert

#140
20080237033
2008-10-02

Osteointegration process for surgical prosthesis

#141
20080158680
2008-07-03

Optical element, optical device, and method of producing optical element

#142
20070251815
2007-11-01

Method for manufacturing diamond-like carbon film

#143
20070212893
2007-09-13

System and method for sputtering a tensile silicon nitride film

#144
20070158182
2007-07-12

Silicon dot forming method and apparatus

#145
20070087185
2007-04-19

Erosion resistant coatings

#146
20070063183
2007-03-22

Substrate having silicon dots

#147
20060096852
2006-05-11

Process and apparatus for applying optical coatings

#148
20060091000
2006-05-04

Thiosilicate phosphor compositions and deposition methods using barium-silicon vacuum deposition sources for deposition of thiosilicate phosphor films

#149
20060076233
2006-04-13

Magnetic recording medium and method for production thereof

#150
20060011469
2006-01-19

Coating system for coating a mold

#151
20050202162
2005-09-15

Reactive metal sources and deposition method for thioaluminate phosphors

#152
20050178652
2005-08-18

Scratch resistant coated glass article including carbide layer(s) resistant to fluoride-based etchant(s)

#153
20050136656
2005-06-23

Process for depositing composite coating on a surface

#154
20050109392
2005-05-26

Manufacturing method for large-scale production of thin-film solar cells

#155
20050072669
2005-04-07

Deposition apparatus, deposition method, optical element, and optical system

#156
20050040034
2005-02-24

Coating method and coating

#157
20050023579
2005-02-03

Semiconductor device and method of fabricating the same

#158
20050023131
2005-02-03

Method and apparatus for forming fluoride thin film

#159
20050023130
2005-02-03

Reactive sputtering method

#160
19009396
2025-09-09

Optimizing cadmium (CD) alloy solar cells with sputtered copper-dopped zinc telluride (ZNTE:CU) back contacts in the presence of hydrogen

#161
16114525
2019-12-03

Film-forming method, production method for product with ceramic film, and product with ceramic film