METHOD FOR THE DEPOSITION OF GROUP IIIA METAL NITRIDE FILMS

ALUMINUM NITRIDE THIN FILM DEPOSITION USING SPUTTERING

FILM FORMING APPARATUS AND FILM FORMING METHOD

DEPOSITION METHOD, SPUTTERING APPARATUS, AND ROTARY TARGET

SELECTIVE ETCHING OF SILICON NITRIDE DIELECTRICS WITH MICROWAVE OXIDATION

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

SOLAR-CONTROL COATING WITH IMPROVED BENDABILITY

METHOD FOR MANUFACTURING AN ALUMINUM NITRIDE OPTICAL WAVEGUIDE, AND ALUMINUM NITRIDE OPTICAL WAVEGUIDE

CUTTING TOOL

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

WEAR-RESISTANT COATING OF AlTiN-WS2 AND PREPARATION METHOD THEREOF

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

P-type gallium oxide film, and preparation method and application thereof

LAMINATE AND METHOD FOR MANUFACTURING SAME

FILM FORMING APPARATUS

AIN Layer, Its Fabrication Process and Epitaxial Wafer

SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING THE SAME, APPARATUS FOR MANUFACTURING THE SAME, AND TEMPLATE SUBSTRATE

PROCESS FOR THE PREPARATION OF ALUMINUM SCANDIUM NITRIDE FILMS

COATED TOOL

SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEPOSITION IN THE SAME CHAMBER

Multilayer film structure and method for producing same

SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURING THE SAME, APPARATUS FOR MANUFACTURING THE SAME, AND TEMPLATE SUBSTRATE

ALTIN-CRN-BASED COATING FOR FORMING TOOLS

HARD CUBIC AL-RICH ALTIN COATING LAYERS PRODUCED BY PVD FROM CERAMIC TARGETS

MANUFACTURING METHOD OF GALLIUM NITRIDE FILM

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

EPITAXIAL STRUCTURE AND METHOD OF MANUFACTURING THE SAME

LITHIUM BATTERY AND MANUFACTURING METHOD THEREOF

HYBRID CHEMICAL AND PHYSICAL VAPOR DEPOSITION OF TRANSITION-METAL-ALLOYED PIEZOELECTRIC SEMICONDUCTOR FILMS

CUTTING TOOL PART HAVING AN ADDITIVELY MANUFACTURED CUTTING PORTION WITH INTEGRALLY FORMED GUIDE PADS AND METHOD OF MANUFACTURING SAME

LAMINATED FILM, STRUCTURE INCLUDING LAMINATED FILM, SEMICONDUCTOR ELEMENT, ELECTRONIC DEVICE, AND METHOD FOR PRODUCING LAMINATED FILM

NITRIDE LAMINATE AND MANUFACTURING METHOD OF THE SAME

Surface-coated cutting tool

Optical interference filter

OPTICAL INTERFERENCE FILTER

METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS

Method for growing a GaN single crystal film on a buffer layer on a ScAlMgO4 substrate and performing cooling so that the GaN film is peeled from the ScAlMgO4 substrate

Surface-coated cutting tool

METHODS OF FORMING GROUP III PIEZOELECTRIC THIN FILMS VIA SPUTTERING

Molecular Beam Epitaxial Growth Apparatus, Crystal Growth Method And Method For Manufacturing Light Emitter

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

A METHOD OF CONTROLLED N-DOPING OF GROUP III-V MATERIALS GROWN ON (111) SI

Coated cutting tool

SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEPOSITION IN THE SAME CHAMBER

HOUSING ASSEMBLY AND PREPARATION METHOD THEREOF, AND ELECTRONIC DEVICE

Method of manufacturing a piezoelectric thin film

Coated cutting tool

SYSTEMS AND METHODS FOR UNPRECEDENTED CRYSTALLINE QUALITY IN PHYSICAL VAPOR DEPOSITION-BASED ULTRA-THIN ALUMINUM NITRIDE FILMS

METHOD OF DEPODITING AlN THIN FILM

Vacuum system and method to deposit a compound layer

MBE system with direct evaporation pump to cold panel

Surface-coated cutting tool

Coated cutting tool

Cubic Al-rich AlTiN coatings deposited from ceramic targets

COLORED GLASS AND PREPARATION METHOD THEREOF

Aluminum nitride film, method of manufacturing aluminum nitride film, and high withstand voltage component

DC magnetron sputtering

Cutting tool

Cutting tool including substrate and coating layer

Cemented carbide and coated cemented carbide, and tool including same

Method and apparatus for depositing a material

SURFACE MODIFICATION METHOD OF ALUMINUM NITRIDE CERAMIC SUBSTRATE

Coated cutting tool and a method for coating the cutting tool

Solar selective coating for mid-high temperature solar thermal applications

Sputtering method

GROUP 13 ELEMENT NITRIDE LAYER, FREE-STANDING SUBSTRATE, FUNCTIONAL ELEMENT, AND METHOD OF PRODUCING GROUP 13 ELEMENT NITRIDE LAYER

Method for labeling products with a transparent photoluminescent label, and transparent photoluminescent label

Method of deposition

Compound semiconductor and method for manufacturing same

Sputtering target and manufacturing method thereof

Method for producing a coated cutting tool and a coated cutting tool

Surface-coated cutting tool

Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films

Asymmetric wafer bow compensation by physical vapor deposition

Methods of forming group III piezoelectric thin films via sputtering

COMPOSITE COATING LAYER HAVING IMPROVED EROSION RESISTANCE AND TURBINE COMPONENT INCLUDING THE SAME

Coating

Heat treatable coated article having titanium nitride and nickel chrome based IR reflecting layers

Surface-coated cutting tool

VACUUM COATING APPARATUS

Method for growing gallium nitride based on graphene and magnetron sputtered aluminum nitride

Piezoelectric layer and piezoelectric device comprising the piezoelectric layer

Coated drill

Surface-coated cutting tool providing excellent chipping resistance and wear resistance in heavy intermittent cutting

ALUMINUM NITRIDE FILM, METHOD OF MANUFACTURING ALUMINUM NITRIDE FILM, AND HIGH WITHSTAND VOLTAGE COMPONENT

EVAPORATION VESSEL APPARATUS AND METHOD

Memory cell switch device

Method for labeling products with a transparent photoluminescent label, and transparent photoluminescent label

Method for forming film and method for forming aluminum nitride film

Meta-optical device and method of manufacturing the same

Diamond like carbon (DLC) coating for ethanol-blended fuel injector applications

Coating

Heat treatable coated article having titanium nitride and nickel chrome based IR reflecting layers

Apparatus for manufacturing a second substrate on a first substrate including removal of the first substrate

Film forming method and aluminum nitride film forming method for semiconductor apparatus

Composite diamond body and composite diamond tool

UV light emitting devices and systems and methods for production

Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device

Piezoelectric thin film and piezoelectric vibrator

DC magnetron sputtering

Acoustic resonator including monolithic piezoelectric layer having opposite polarities

Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus

Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers

UV light emitting devices and systems and methods for production

Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

Method and apparatus for depositing a material

Evaporation vessel apparatus and method

Method for depositing aluminum on a permanent Nd—Fe—B magnet

METHOD OF MANUFACTURING MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING APPARATUS OF THE SAME

Method for producing piston a ring

Micro-sensor body and method for manufacturing the same, as well as micro-sensor

Anti-erosion structure for aircrafts

Surface-coated cutting tool

SURFACE-COATED BORON NITRIDE SINTERED BODY TOOL

Film forming method, method of manufacturing semiconductor light-emitting device, semiconductor light-emitting device, and illuminating device

Piezoelectric member that achieves high sound speed, acoustic wave apparatus, and piezoelectric member manufacturing method

Scratch-resistant coatings, substrates having scratch-resistant coatings and methods for producing same

Ti—Al—Ta-based coating exhibiting enhanced thermal stability

Composite transparent electrodes

Method for depositing a group III nitride semiconductor film

Mold base material, production method for mold base material, mold production method, and mold

Epitaxial film forming method, sputtering apparatus, manufacturing method of semiconductor light-emitting element, semiconductor light-emitting element, and illumination device

Device and method for precipitating a layer on a substrate

Aluminum titanium nitride coating with adapted morphology for enhanced wear resistance in machining operations and method thereof

Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation

Solar selective absorber based on double nitride composite material and process for its preparation

PVD ALN film with oxygen doping for a low etch rate hardmask film

Method of forming a laminated magnetic core with sputter deposited and electroplated layers

SiCAlNsubstrate, and epitaxial wafer

Sputtering target for magnetic recording film, and process for producing same

DEVICE AND METHOD FOR PRECIPITATING A LAYER ON A SUBSTRATE

Coated article and method for making said article

Sputtering target

Method of fabricating piezoelectric materials with opposite C-axis orientations

COATED ARTICLE AND METHOD FOR MAKING SAME

NITRIDE SEMICONDUCTOR STRUCTURE

Manufacturing method of piezoelectric-body film, and piezoelectric-body film manufactured by the manufacturing method

Manufacturing method and apparatus for semiconductor device

Surface-coated cutting tool

OPTOELECTRONIC SEMICONDUCTOR COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

Method for manufacturing group III nitride semiconductor layer, method for manufacturing group III nitride semiconductor light-emitting device, and group III nitride semiconductor light-emitting device, and lamp

Method of fabricating piezoelectric material with selected c-axis orientation

Method for manufacturing group III nitride semiconductor layer, method for manufacturing group III nitride semiconductor light-emitting device, and group III nitride semiconductor light-emitting device, and lamp

Thermally conductive, electrically insulating composite film and stack chip package structure utilizing the same

PROCEDURE FOR OBTAINING FILMS OF INTERMEDIATE BAND SEMICONDUCTOR MATERIALS

Method for producing group III nitride semiconductor light-emitting device, group III nitride semiconductor light-emitting device, and lamp

Process for producing SiCAlNbase material, process for producing epitaxial wafer, SiCAlNbase material, and epitaxial wafer

Method of manufacturing a SiCAlNsubstrate, method of manufacturing an epitaxial wafer, SiCAlNsubstrate, and epitaxial wafer

PULSED LASER DEPOSITION OF HIGH QUALITY PHOTOLUMINESCENT GaN FILMS

Amorphous group III-V semiconductor material and preparation thereof

Method and apparatus

TOP PLATE FOR COOKING APPLIANCE AND PROCESS FOR PRODUCING THE SAME

Method for producing a polycrystalline ceramic film on a substrate using a shutter

GROUP III-V NITRIDE LAYER AND METHOD FOR PRODUCING THE SAME

Group-III metal nitride and preparation thereof

Nitride semiconductor structure

Sputtering deposition apparatus and backing plate for use in sputtering deposition apparatus

Control of crystal orientation and stress in sputter deposited thin films

Stress adjustment in reactive sputtering

Stress adjustment in reactive sputtering

GROUP-III NITRIDE COMPOUND SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREOF, GROUP-III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE AND PRODUCTION METHOD THEREOF, AND LAMP

Piezoelectric deposition for BAW resonators

Sputtering Target

Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof

Ultrasound Transducers

Pulsed laser deposition of high quality photoluminescent GaN films

Piezoelectric Thin Film Resonator

Method for Producing Gan Film, Semiconductor Device, Method for Generating Thin Film of Nitride of Group III Element and Semiconductor Device Having Thin Film of Nitride of Group III Element

APPARATUS FOR MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, METHOD OF MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, AND LAMP

Method and apparatus for fabricating nanostructure multi-element compound

PRODUCTION APPARATUS FOR PRODUCING GALLIUM NITRIDE FILM SEMICONDUCTOR AND CLEANING APPARATUS FOR EXHAUST GAS

Sputtering method and sputtering device

Protective coating on a substrate and method of making thereof

Organic EL element, organic EL display device and method for fabricating them

Coating structure and method

Protective coating on a substrate and method of making thereof

Superalloy article having corrosion resistant coating thereon

Nanolayered coated cutting tool and method for making the same

Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas

Method and system for vacuum vapor deposition of functional thin film coatings onto an elongate substrate in space

Cubic phase refractory coatings and applications thereof

Reactive gas modulation for group III/IV compound deposition systems