ClassID:

120033

C23C14/0682 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material Silicides

Recent Application in this class:
#1
20260093060
2026-04-02

MIRROR LAYER AND MIRROR FOR A LITHOGRAPHIC APPARATUS

#2
20250361599
2025-11-27

TUNGSTEN SILICIDE TARGET AND METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING TUNGSTEN SILICIDE FILM

#3
20250264795
2025-08-21

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

#4
20240352575
2024-10-24

PLASMA BASED FILM MODIFICATION FOR SEMICONDUCTOR DEVICES

#5
20240175116
2024-05-30

CR-SI FILM

#6
20240060169
2024-02-22

Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device

#7
20230192554
2023-06-22

INTERMEDIATE COATING FOR HIGH TEMPERATURE ENVIRONMENTS

#8
20230117294
2023-04-20

ANTIMICROBIAL PLASTIC FILM AND WINDING COATING METHOD THEREOF

#9
20220403505
2022-12-22

Methods and apparatus for processing a substrate

#10
20220102614
2022-03-31

Silicide passivation of niobium

#11
20220042159
2022-02-10

Apparatus for manufacturing display device, method of manufacturing mask assembly, and method of manufacturing display device

#12
20220017424
2022-01-20

Cr—Si sintered body

#13
20210025049
2021-01-28

Tungsten Silicide Target Member And Method For Manufacturing Same, And Method For Manufacturing Tungsten Silicide Film

#14
20200310016
2020-10-01

Coloring pattern structure and method of manufacturing the same

#15
20200071232
2020-03-05

Tungsten silicide target and method of manufacturing same

#16
20200024722
2020-01-23

Method of forming nickel silicide materials

#17
20190371610
2019-12-05

Process integration method to tune resistivity of nickel silicide

#18
20190311908
2019-10-10

Methods of forming metal silicide layers and metal silicide layers formed therefrom

#19
20190237614
2019-08-01

Silanized ITO electrode with ITO nanoparticles for aqueous sulfide detection

#20
20190081190
2019-03-14

Transparent electrode, device employing the same, and manufacturing method of the device

#21
20190071765
2019-03-07

METHOD FOR PRODUCING PVD ANTI-BACTERIAL FILM ON PLASTIC

#22
20190027479
2019-01-24

Fabricating method of cobalt silicide layer coupled to contact plug

#23
20180366328
2018-12-20

Process integration method to tune resistivity of nickel silicide

#24
20180245202
2018-08-30

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#25
20180129130
2018-05-10

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#26
20180033703
2018-02-01

Silicon carbide single crystal substrate, silicon carbide semiconductor device, and method for manufacturing silicon carbide semiconductor device

#27
20170333978
2017-11-23

CASTING SYSTEM FOR INVESTMENT CASTING PROCESS

#28
20170292194
2017-10-12

Light weight housing for internal component and method of making

#29
20170231229
2017-08-17

Antimicrobial glass coating

#30
20170088939
2017-03-30

Mo—Si—B layers and method for the production thereof

#31
20170009335
2017-01-12

Process for producing a target formed of a sintering-resistant material of a high-melting point metal alloy, silicide, carbide, nitride or boride

#32
20160177436
2016-06-23

TiSiN layers and their production

#33
20160040280
2016-02-11

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#34
20160032447
2016-02-04

Nickel-chromium-silicon based coatings

#35
20140305123
2014-10-16

Solar-thermal conversion member, solar-thermal conversion device, and solar thermal power generation device comprising a β-FeSi2 phase material

#36
20140128298
2014-05-08

Sliding component coated with metal-comprising carbon layer for improving wear and friction behavior by tribological applications under lubricated conditions

#37
20130295391
2013-11-07

Mirror with optional protective paint layer, and/or methods of making the same

#38
20130157046
2013-06-20

PLASTIC ARTICLE AND METHOD FOR MANUFACTURING THE SAME

#39
20120282485
2012-11-08

OXIDE-FORMING PROTECTIVE COATINGS FOR NIOBIUM-BASED MATERIALS

#40
20120152729
2012-06-21

Method for producing thermoelectric layers

#41
20120063947
2012-03-15

Molybdenum-based target and process for producing a target by thermal spraying

#42
20120052659
2012-03-01

Manufacturing method and apparatus for semiconductor device

#43
20120006785
2012-01-12

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#44
20110256652
2011-10-20

Method for forming a transducer

#45
20110165435
2011-07-07

SANITARY OBJECT

#46
20110146848
2011-06-23

Oxide-forming protective coatings for niobium-based materials

#47
20110097589
2011-04-28

ARTICLE FOR HIGH TEMPERATURE SERVICE

#48
20110002833
2011-01-06

Thin film of metal-silicon compound and process for producing the thin film of the metal-silicon compound

#49
20100155866
2010-06-24

High temperature resistant solid state pressure sensor

#50
20100065934
2010-03-18

Transducer with fluidly isolated connection

#51
20090258238
2009-10-15

SILICIDE FORMATION UTILIZING NI-DOPED COBALT DEPOSITION SOURCE

#52
20090229975
2009-09-17

Target formed of sintering-resistant material of high-melting point metal alloy, high-melting point metal silicide, high-melting point metal carbide, high-melting point metal nitride, or high-melting point metal boride, process for producing the target, assembly of the sputtering target-backing plate, and process for producing the same

#53
20090203163
2009-08-13

Method for making a transducer

#54
20090194898
2009-08-06

Hafnium silicide target for forming gate oxide film, and method for preparation thereof

#55
20090127519
2009-05-21

TI and W containing transparent oxide electrode film

#56
20090108382
2009-04-30

Transducer for use in harsh environments

#57
20080223715
2008-09-18

Coating of optical substrates using closed field system

#58
20080090159
2008-04-17

Photomask blank, photomask, and method of manufacture

#59
20070284255
2007-12-13

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#60
20070256928
2007-11-08

Silicon alloy coating of insulated wire

#61
20070013014
2007-01-18

High temperature resistant solid state pressure sensor

#62
20070009810
2007-01-11

Phase shifter film and process for the same

#63
20060249847
2006-11-09

Substrate with adhesive bonding metallization with diffusion barrier

#64
20060196765
2006-09-07

Metallization target optimization method providing enhanced metallization layer uniformity

#65
20060051596
2006-03-09

Nickel silicides formed by low-temperature annealing of compositionally modulated multilayers

#66
20050155675
2005-07-21

Amorphous ferrosilicide film exhibiting semiconductor characteristics and method of for producing the same

#67
20050061250
2005-03-24

Installation for electron-ray coatication of coatings