ClassID:

120035

C23C14/0694 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material Halides

Recent Application in this class:
#1
20260146313
2026-05-28

System and Method For a Spatially-resolved Thin Film Linear Deposition

#2
20260029563
2026-01-29

OPTICAL FILTER

#3
20250361606
2025-11-27

METAL-FLUORIDE THIN FILMS AND DEPOSITION METHODS

#4
20250361594
2025-11-27

METHOD OF COATING A SUBSTRATE INCLUDING A MULTI-LAYER COATING

#5
20250354061
2025-11-20

LEAD-FREE YTTERBIUM-DOPED DOUBLE PEROVSKITE THIN FILMS

#6
20250353757
2025-11-20

MATERIAL FOR FILM FORMATION AND METHOD FOR PRODUCING COATING FILM

#7
20250305111
2025-10-02

193NM FILM WITH LOW LOSS AND HIGH REFLECTIVITY AND ITS PREPARATION METHOD

#8
20250241084
2025-07-24

METHOD OF MANUFACTURING AN OPTOELECTRONIC OR PHOTOVOLTAIC DEVICE, AND DEVICE PRODUCED BY THIS METHOD

#9
20250210701
2025-06-26

COMPOSITE SOLID ELECTROLYTE LAYER, METHOD FOR PREPARING THE SAME, AND ALL-SOLID SECONDARY BATTERY

#10
20250188587
2025-06-12

RADICAL SPECIES RECOMBINATION IN SUBSTRATE PROCESSING SYSTEMS

#11
20250033990
2025-01-30

METHODS AND APPARATUS FOR STABILIZING VANADIUM COMPOUNDS

#12
20250029830
2025-01-23

VAPOR PHASE TRANSPORT SYSTEM AND METHOD FOR DEPOSITING PEROVSKITE SEMICONDUCTORS

#13
20250029792
2025-01-23

Methods for Perovskite Device Processing by Vapor Transport Deposition

#14
20250011917
2025-01-09

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPONENT, AND PLASMA PROCESSING APPARATUS

#15
20240352575
2024-10-24

PLASMA BASED FILM MODIFICATION FOR SEMICONDUCTOR DEVICES

#16
20240240304
2024-07-18

METAL OXY-FLUORIDE COATING FOR CHAMBER COMPONENTS AND METHOD OF COATING THEREOF

#17
20240231240
2024-07-11

Immersion exposure tool

#18
20240011146
2024-01-11

METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTS MANUFACTURED BY SUCH METHODS

#19
20230380216
2023-11-23

MANUFACTURING METHOD OF DISPLAY DEVICE AND EVAPORATION DEVICE

#20
20230324592
2023-10-12

OPTICAL FILTER

#21
20230242812
2023-08-03

METHOD FOR DEPOSITING AN INORGANIC PEROVSKITE LAYER

#22
20230228914
2023-07-20

OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR

#23
20230215701
2023-07-06

Forming method of plasma resistant oxyfluoride coating layer

#24
20230207279
2023-06-29

PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER

#25
20230193452
2023-06-22

ANTI-REFLECTIVE COATINGS FOR IR-TRANSMITTING SUBSTRATES

#26
20230170156
2023-06-01

Preparation method for perovskite film, and related perovskite film and solar cell

#27
20230141782
2023-05-11

PROTECTIVE METAL OXY-FLUORIDE COATINGS

#28
20230082682
2023-03-16

Methods for perovskite device processing by vapor transport deposition

#29
20230029787
2023-02-02

METAL MATERIAL, METHOD OF PRODUCING METAL MATERIAL, METHOD OF PASSIVATING SEMICONDUCTOR PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING FILLED CONTAINER

#30
20230028949
2023-01-26

FILTERING STRUCTURE FOR AN INFRARED CUT FILTER

#31
20230025296
2023-01-26

Methods for preparing void-free coatings for plasma treatment components

#32
20220413186
2022-12-29

Method for manufacturing optical lens provided with anti-reflection film

#33
20220325398
2022-10-13

Method Of Forming A Halide-Containing Perovskite Film

#34
20220259721
2022-08-18

Deposition Processing Systems Having Active Temperature Control and Associated Methods

#35
20220259717
2022-08-18

METHOD FOR FORMING A LAYER OF ALUMINA AT THE SURFACE OF A METALLIC SUBSTRATE

#36
20220251699
2022-08-11

Corrosion-resistant member

#37
20220243072
2022-08-04

Corrosion-resistant member

#38
20220236646
2022-07-28

Immersion exposure tool

#39
20220235448
2022-07-28

METHOD FOR VACUUM COATING A COLORFUL FILM

#40
20220146723
2022-05-12

Filtering structure for an infrared cut filter

#41
20220076948
2022-03-10

VAPOR PHASE TRANSPORT SYSTEM AND METHOD FOR DEPOSITING PEROVSKITE SEMICONDUCTORS

#42
20210395279
2021-12-23

Method of forming a crystalline or polycrystalline layer of an organic-inorganic metal halide perovskite

#43
20210331935
2021-10-28

Methods and apparatus for stabilizing vanadium compounds

#44
20210172049
2021-06-10

Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus

#45
20210148004
2021-05-20

METHOD FOR FABRICATING EPITAXIAL HALIDE PEROVSKITE FILMS AND DEVICES

#46
20210143007
2021-05-13

Vapor phase transport systems for depositing perovskite semiconductors

#47
20210115551
2021-04-22

Evaporation cell for vacuum evaporation chamber and associated evaporation method

#48
20210074865
2021-03-11

Photoactive devices and materials

#49
20210020383
2021-01-21

Method for producing a film of light-absorbing material with a perovskite-like structure

#50
20200341170
2020-10-29

Optical device and manufacturing method therefor

#51
20200328077
2020-10-15

Vapor phase transport system and method for depositing perovskite semiconductors

#52
20200283881
2020-09-10

Powder for film formation and material for film formation

#53
20200209448
2020-07-02

Optical filter

#54
20200131619
2020-04-30

Functionally integrated coating structures

#55
20200081141
2020-03-12

Scintillator plate, radiation imaging apparatus, and method of manufacturing scintillator plate

#56
20200064519
2020-02-27

Antireflection hard coating film and preparation method thereof

#57
20200064518
2020-02-27

Antireflection hard coating film and preparation method thereof

#58
20200048792
2020-02-13

Device and Method for Improving Perovskite Film Formation Uniformity

#59
20190390321
2019-12-26

FILM-FORMATION METHOD

#60
20190338408
2019-11-07

COATING FOR PERFORMANCE ENHANCEMENT OF SEMICONDUCTOR APPARATUS

#61
20190326101
2019-10-24

PLASMA PROCESSING APPARATUS AND MEMBER OF PLASMA PROCESSING CHAMBER

#62
20190218657
2019-07-18

System and method for fabricating perovskite film for solar cell applications

#63
20190211453
2019-07-11

Method based on multi-source deposition for fabricating perovskite film

#64
20190185989
2019-06-20

Deposition processing systems having active temperature control and associated methods

#65
20190169739
2019-06-06

AN INTERFERENCE COATING OR ITS PART CONSISTING LAYERS WITH DIFFERENT POROSITY

#66
20180334742
2018-11-22

Method of forming a self-cleaning film system

#67
20180306949
2018-10-25

Optical thin film and manufacturing method of optical element

#68
20180247769
2018-08-30

Formation of lead-free perovskite film

#69
20180230589
2018-08-16

Process for making of glass articles with optical and easy-to-clean coatings

#70
20180212077
2018-07-26

Photoactive devices and materials

#71
20180080116
2018-03-22

Ion assisted deposition top coat of rare-earth oxide

#72
20180030839
2018-02-01

Article for high temperature service

#73
20180030589
2018-02-01

Ion assisted deposition top coat of rare-earth oxide

#74
20170372897
2017-12-28

High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors

#75
20170363752
2017-12-21

Apparatus and method of manufacturing radiation detection panel

#76
20170363751
2017-12-21

Apparatus and method of manufacturing radiation detection panel

#77
20170363563
2017-12-21

Carbon nanotube based reference electrodes and all-carbon electrode assemblies for sensing and electrochemical characterization

#78
20170323772
2017-11-09

Protective metal oxy-fluoride coatings

#79
20170320772
2017-11-09

3D DIFFRACTION COATING PROCESS

#80
20170175245
2017-06-22

Durable MgO—MgF2 composite film for infrared anti-reflection coatings

#81
20170148579
2017-05-25

Two-step deposition process

#82
20160320096
2016-11-03

Spectrally selective semiconductor dielectric photonic solar thermal absorber

#83
20160299258
2016-10-13

Photonic crystal structure, method of manufacturing the photonic crystal structure, reflective color filter, and display apparatus employing the photonic crystal structure

#84
20160254472
2016-09-01

Perovskite thin films having large crystalline grains

#85
20160032445
2016-02-04

Plasma processing apparatus and plasma processing method

#86
20150368783
2015-12-24

DEPOSITION APPARATUS WITH GAS SUPPLY AND METHOD FOR DEPOSITING MATERIAL

#87
20150299845
2015-10-22

FILM AND METHOD FOR PREPARING THE SAME

#88
20150241605
2015-08-27

Durability coating for oxide films for metal fluoride optics

#89
20150197844
2015-07-16

Depositing calcium fluoride template layers for solar cells

#90
20150153462
2015-06-04

Scintillator plate

#91
20150140206
2015-05-21

HIGH ENERGY MATERIALS FOR A BATTERY AND METHODS FOR MAKING AND USE

#92
20150129771
2015-05-14

Method for preparing bismuth iodide article and method for manufacturing radiation detecting element

#93
20150064471
2015-03-05

Seed for Metal Dichalcogenide Growth by Chemical Vapor Deposition

#94
20150037511
2015-02-05

Alternate materials and mixtures to minimize phosphorus buildup in implant applications

#95
20150021486
2015-01-22

Radiation imaging apparatus, method of manufacturing the same, and radiation inspection apparatus

#96
20140318949
2014-10-30

Method of making, and, analyte sensor

#97
20140295062
2014-10-02

Apparatus and method of manufacturing radiation detection panel

#98
20140199800
2014-07-17

Luminescent materials that emit light in the visible range or the near infrared range and methods of forming thereof

#99
20140154510
2014-06-05

FILM STRUCTURE AND METHOD FOR PRODUCING SAME

#100
20130063821
2013-03-14

PHOTONIC CRYSTAL STRUCTURE, METHOD OF MANUFACTURING THE PHOTONIC CRYSTAL STRUCTURE, REFLECTIVE COLOR FILTER, AND DISPLAY APPARATUS EMPLOYING THE PHOTONIC CRYSTAL STRUCTURE

#101
20130015054
2013-01-17

METHOD OF CONTROLLING LITHIUM UNIFORMITY

#102
20120318663
2012-12-20

Methods for forming metal fluoride film and for manufacturing optical device

#103
20120307353
2012-12-06

DURABLE MgO-MgF2 COMPOSITE FILM FOR INFRARED ANTI-REFLECTION COATINGS

#104
20120294425
2012-11-22

Radiation image conversion panel and radiation image detector using same

#105
20120288673
2012-11-15

Depositing Calcium Fluoride Template Layers for Solar Cells

#106
20120255855
2012-10-11

METHOD OF CONTROLLING LITHIUM UNIFORMITY

#107
20120193543
2012-08-02

Radiological image detection apparatus and method for manufacturing the same

#108
20120171416
2012-07-05

Coated article and method for making the same

#109
20120082828
2012-04-05

Laser pattern mask and method for fabricating the same

#110
20120068074
2012-03-22

Method of manufacturing scintillator panel, scintillator panel, and radiation image detector

#111
20120040116
2012-02-16

DEVICE HOUSING AND METHOD FOR MAKING THE SAME

#112
20110205643
2011-08-25

Extending the stability of UV curable adhesives in 193NM laser systems

#113
20110204247
2011-08-25

Scintillator panel, radiation detector, and method for manufacturing the same

#114
20110180757
2011-07-28

LUMINESCENT MATERIALS THAT EMIT LIGHT IN THE VISIBLE RANGE OR THE NEAR INFRARED RANGE AND METHODS OF FORMING THEREOF

#115
20110031110
2011-02-10

Methods of making, and, analyte sensor

#116
20110017913
2011-01-27

Radiation image conversion panel and production method thereof

#117
20100305684
2010-12-02

Biodegradable stent and method for manufacturing the same

#118
20100078311
2010-04-01

Aluminum Floride Thin Film Deposition Method

#119
20100068379
2010-03-18

Method of making vapor deposited oxygen-scavenging particles

#120
20100055350
2010-03-04

Luminescent materials that emit light in the visible range or the near infrared range

#121
20090200159
2009-08-13

REACTIVE SPUTTERING METHOD

#122
20090152102
2009-06-18

TRANSPARENT OPTICAL FILM AND METHOD OF FORMING THE SAME

#123
20090098280
2009-04-16

VAPOR DEPOSITION APPARATUS AND METHOD OF VAPOR DEPOSITION MAKING USE THEREOF

#124
20080318033
2008-12-25

Coated Substrate with a Temporary Protective Layer and Method for Production Thereof

#125
20080286461
2008-11-20

VACUUM EVAPORATION METHOD

#126
20080268178
2008-10-30

Method of producing encapsulated nanopowders and installation for its realization

#127
20080149852
2008-06-26

MANUFACTURING METHOD OF SCINTILLATOR PANEL, SCINTILLATOR PANEL AND VACUUM EVAPORATION APPARATUS

#128
20080023648
2008-01-31

Scintillator plate

#129
20080014463
2008-01-17

Luminescent materials that emit light in the visible range or the near infrared range

#130
20080006779
2008-01-10

Radiation image conversion panel production process and radiation image conversion panel obtained thereby

#131
20070243313
2007-10-18

Method of manufacturing radiographic image conversion panel

#132
20070170397
2007-07-26

Method of preparing storage phosphors from dedicated precursors

#133
20070098881
2007-05-03

Method of preparing stabilized storage phosphor panels

#134
20070098880
2007-05-03

Method of vaporization of phosphor precursor raw materials

#135
20070095661
2007-05-03

Method of making, and, analyte sensor

#136
20070054035
2007-03-08

Method for preparing radiation image storage panel

#137
20070036893
2007-02-15

Method for reproducible manufacturing of storage phosphor plates

#138
20070003718
2007-01-04

Reflector, heating crucible equipped with reflector and process for preparation of radiation image storage panel

#139
20060216951
2006-09-28

Method of making an encapsulated plasma sensitive device

#140
20060162663
2006-07-27

Vapor deposition apparatus

#141
20060141267
2006-06-29

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

#142
20060141169
2006-06-29

Method and apparatus for vacuum deposition

#143
20060141168
2006-06-29

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

#144
20060137614
2006-06-29

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

#145
20060065863
2006-03-30

Phosphor panel

#146
20060065862
2006-03-30

Phosphor panel

#147
20060065861
2006-03-30

Radiation image storage panel

#148
20060033078
2006-02-16

Method of making vapour deposited oxygen-scavenging particles

#149
20060013966
2006-01-19

Crucible for evaporation of raw materials

#150
20050279285
2005-12-22

Phosphor sheet manufacturing apparatus

#151
20050217567
2005-10-06

Covering assembly for crucible used for evaporation of raw materials

#152
20050160979
2005-07-28

Method and apparatus for applying a polycrystalline film to a substrate

#153
20050120959
2005-06-09

Vacuum deposition device and pretreatment method for vacuum deposition

#154
20050103273
2005-05-19

Vacuum evaporation crucible and phosphor sheet manufacturing apparatus using the same

#155
20050072669
2005-04-07

Deposition apparatus, deposition method, optical element, and optical system

#156
20050066901
2005-03-31

Vacuum deposition method and vacuum deposition device

#157
20050056798
2005-03-17

Process and apparatus for producing evaporated phosphor sheets and an evaporated phosphor sheet produced by means of such process and apparatus

#158
20050051097
2005-03-10

Covering assembly for crucible used for evaporation of raw materials

#159
20050031799
2005-02-10

Process for preparing radiation image storage panel

#160
20050023131
2005-02-03

Method and apparatus for forming fluoride thin film

#161
20050023130
2005-02-03

Reactive sputtering method

#162
20050000448
2005-01-06

Vapor deposition apparatus

#163
14579922
2017-08-01

Doped cesium barium halide scintillator films