SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

Microchannel plate and method of making the microchannel plate with metal contacts selectively formed on one side of channel openings

Semiconductor Device, Method and Machine of Manufacture

PVD DIRECTIONAL DEPOSITION FOR ENCAPSULATION

SPUTTERING APPARATUS

Microchannel plate and method of making the microchannel plate with metal contacts selectively formed on one side of channel openings

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION THEREOF

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USING ANGLED BEAMS

SYSTEM FOR FASTENING OPTICAL COMPONENTS

Semiconductor device, method and machine of manufacture

Techniques and device structure based upon directional seeding and selective deposition

Substrate processing method

Method for vacuum deposition of a coating on the front face of a support, support and corresponding security document

Techniques and apparatus for selective shaping of mask features using angled beams

Sputtering apparatus

Techniques and apparatus for selective shaping of mask features using angled beams

Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films

Oblique deposition for quantum device fabrication

Coatings of non-planar substrates and methods for the production thereof

Semiconductor memory device and semiconductor memory manufacturing apparatus

Method For Manufacturing A Humidity Sensor And Humidity Sensor

PVD directional deposition for encapsulation

Semiconductor device, method and machine of manufacture

Scintillator plate, radiation imaging apparatus, and method of manufacturing scintillator plate

Film-forming device

Method of forming wiring on side portion of substrate

Vapor phase deposition system

Methods of forming metal silicide layers and metal silicide layers formed therefrom

Techniques for selective deposition using angled ions

Film forming system and method for forming film on substrate

Semiconductor memory device and semiconductor memory manufacturing apparatus

Processing apparatus and collimator

Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers

Nanostructure Lithium Ion Battery

Silver reflector, and manufacture method and examination method therefor

Depositing apparatus and method for manufacturing organic light emitting diode display using the same

Control of lift ejection angle

Method for producing a coating and optoelectronic semiconductor component having a coating

Directed surface functionalization on selected surface areas of topographical features with nanometer resolution

Metal mask substrate, metal mask substrate control method, metal mask, and metal mask production method

Block copolymer pattern formation method and diffraction limited optical element

Coatings of non-planar substrates

Apparatus and method of manufacturing radiation detection panel

Apparatus and method of manufacturing radiation detection panel

Processing apparatus and collimator

Method for open-air pulsed laser deposition

Method for producing a coating and optoelectronic semiconductor component having a coating

Vapor phase deposition system

Apparatus and method for carbon film deposition profile control

Mask blank and transfer mask

Apparatus, device and process for coating of articles

Phase difference element having birefringent film containing titanium oxide tantalum oxide

Method of manufacturing tunnel magnetoresistive effect element and sputtering apparatus

Sputtering apparatus and method thereof

Alignment method and liquid crystal display panel

Vacuum processing apparatus

Method and an apparatus for depositing a layer onto a workpiece using plasma

Formation of an alignment film for a liquid crystal on a substrate

Movable evaporation source

Mask blank, transfer mask, and methods of manufacturing the same

Nanofluidic sensor comprising spatially separated functional sensing components

Directed surface functionalization on selected surface areas of topographical features with nanometer resolution

Nanofluidic sensor comprising spatially separated functional sensing components

Directed surface functionalization on selected surface areas of topographical features with nanometer resolution

Sputtering apparatus and recording medium for recording control program thereof

Liquid crystal device, method for manufacturing liquid crystal device, and electronic apparatus

Sputtering apparatus and sputtering method

DONOR SHEET AND METHOD FOR LIGHT INDUCED FORWARD TRANSFER MANUFACTURING

Method for forming thin film and method for fabricating organic light-emitting diode (OLED) display using the same

Film forming method, film forming apparatus and control unit for the film forming apparatus

Apparatus and method of manufacturing radiation detection panel

Nanostructure lithium ion battery

Apparatus and method for making OLED lighting device

Diffractive optical element and manufacturing method for the same

Film deposition assisted by angular selective etch on a surface

Sputtering apparatus

Multifunctional electrode

Apparatus for forming gas blocking layer and method thereof

Process for producing metamaterial

SPUTTERING DEVICE

PROCESS FOR PRODUCING WIRE-GRID POLARIZER, AND LIQUID CRYSTAL DISPLAY DEVICE

Deposition apparatus and deposition method

Phase-difference element having birefringent film containing TiO2 and Ta2O5

FILM FORMING METHOD BY SPUTTERING APPARATUS AND SPUTTERING APPARATUS

Diffractive optical element and manufacturing method for the same

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHODS OF PRODUCING COUNTERMEASURE DECOYS HAVING TAILORED EMISSION SIGNATURES

Method of manufacturing a bit patterned media on a magnetic media disk

EVAPORATION SYSTEM AND METHOD

SEGMENTED FILM DEPOSITION

Method and device for preparing compound semiconductor film

FILM FORMING METHOD, FILM FORMING APPARATUS AND CONTROL UNIT FOR THE FILM FORMING APPARATUS

Sputtering apparatus

OPTICAL THIN-FILM VAPOR DEPOSITION APPARATUS AND OPTICAL THIN-FILM PRODUCTION METHOD

Angled sputtering physical vapor deposition apparatus with wafer holder and wafer holder for an angled sputtering physical vapor deposition apparatus

Oblique vapor deposition substrate, liquid crystal device, method for manufacturing liquid crystal device, and projection display device

VAPOR PHASE DEPOSITION SYSTEM

METHOD FOR MANUFACTURING DEVICE AND MANUFACTURING APPARATUS

Optical thin-film vapor deposition apparatus and optical thin-film production method

METHOD OF MANUFACTURING MAGNETORESISTANCE ELEMENT AND STORAGE MEDIUM USED IN THE MANUFACTURING METHOD

Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium

WIRE-GRID POLARIZER AND PROCESS FOR PRODUCING THE SAME

MAGNETORESISTANCE ELEMENT, METHOD OF MANUFACTURING THE SAME, AND STORAGE MEDIUM USED IN THE MANUFACTURING METHOD

Dielectric film with hafnium aluminum oxynitride film

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PROGRAM THEREOF

METHOD FOR FORMING DEPOSITED FILM

Spinulose titanium nanoparticulate surfaces

Magnetic main write pole

Three-dimensional indium-tin-oxide electrode, method of fabricating the same, device of fabricating the same, and method of fabricating solar cell comprising the same

WIRE GRID POLARIZER WITH COMBINED FUNCTIONALITY FOR LIQUID CRYSTAL DISPLAYS

Nanostructure arrays and fabrication methods therefor

Method for producing a polycrystalline ceramic film on a substrate using a shutter

Biaxial birefringent component, liquid crystal projector, and method for manufacturing biaxial birefringent component

Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride

High-frequency sputtering device

VACUUM THIN FILM FORMING APPARATUS

MANUFACTURING METHOD OF A BORIDE FILM, AND MANUFACTURING METHOD OF AN ELECTRON-EMITTING DEVICE

FILM FORMING METHOD AND PRODUCTION PROCESS OF LIQUID CRYSTAL DISPLAY DEVICE

Method and apparatus for depositing mixed layers

Sputtering apparatus and film deposition method

SPUTTERING APPARATUS AND FILM FORMING METHOD

Multi-component deposition

Method of making thin film structures and compositions thereof

OBLIQUE VACUUM DEPOSITION FOR ROLL-ROLL COATING OF WIRE GRID POLARIZER LINES ORIENTED IN A DOWN-WEB DIRECTION

NanoEmbossed shapes and fabrication methods of wire grid polarizers

SPUTTERING METHOD AND SPUTTERING APPARATUS

Film forming method by sputtering and sputtering apparatus thereof

Method of manufacturing screen and screen

INLINE CO-SPUTTER APPARATUS

SPUTTERING APPARATUS AND MANUFACTURING APPARATUS FOR LIQUID CRYSTAL DEVICE

Film Forming Apparatus and Method of Forming Film

Method of Making Thin Film Structures and Compositions thereof

Sputtering apparatus and method of manufacturing solar battery and image display device by using the same

Method and Apparatus for Coating Curved Surfaces

SPUTTERING APPARATUS FOR DEPOSITING A HIGHER PERMITTIVITY DIELECTRIC FILM

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

Method and apparatus for coating a curved surface

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

METHOD OF SPUTTERING A HIGH-K DIELECTRIC MATERIAL

Perpendicular magnetic medium with shields between tracks

System and apparatus for patterned media with reduced magnetic trench material

FILM FORMING METHOD AND FILM FORMING APPARATUS

Alignment film forming apparatus and method

Apparatus, system, and method for DNA shadow nanolithography

EVAPORATION APPARATUS WITH INCLINED CRUCIBLE

Front Surface Mirror

Orthopaedic implants having self-lubricated articulating surfaces designed to reduce wear, corrosion, and ion leaching

Oriented-film formation apparatus and oriented film

Enhanced bio-assays by using gradient nanotopgraphy

Piezoelectric Thin Film Resonator

Thin film producing method

Process for forming thin film and system for forming thin film

Deposition apparatus, deposition method, method of manufacturing liquid crystal device

Methods and apparatuses for directing an ion beam source

Deposition apparatus and deposition method

Sputter deposition method for forming integrated circuit

Vapour deposition method

Shaving/cutting device with directly deposited razor structures

Edge coating in continuous deposition line

APPARATUS AND METHOD FOR FORMING ANTIREFLECTION FILM

Fabricating method of single electron transistor (SET) by employing nano-lithographical technology in the semiconductor process

Mask and method of manufacturing the same

Manufacturing method and apparatus of phase shift mask blank

Method for forming a superhard amorphous carbon coating in vacuum

Controlled multi-step magnetron sputtering process

Protective offset sputtering

Protective offset sputtering

Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask

Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography

Manufacturing apparatus for oriented film, liquid crystal device, and electronic device

Vacuum evaporation apparatus and method of producing electro-optical device

Wafer Holder And Method Of Holding A Wafer

METHOD OF MANUFACTURING A LIQUID CRYSTAL ALIGNMENT FILM UTILIZING LONG-THROW SPUTTERING

Method for magnetron sputter deposition

Substrate processing method and substrate processing apparatus

Ion gun deposition and alignment for liquid-crystal applications

Method of depositing material on a substrate for a device

Sputtering device

Method for making a photonic structure

Porous coatings for biomedical implants

Method of depositing a higher permittivity dielectric film

Thin-film coating for wheel rims

Controlled multi-step magnetron sputtering process

Biaxially-textured film deposition for superconductor coated tapes

Display cell, in particular liquid crystal, or photovoltaic cell comprising means for connection to an electronic control circuit

Mask and method for making full color display

Multi-component deposition

Process for producing oxide superconductive thin-film

Mask blank manufacturing method and sputtering target for manufacturing the same

Device for targeted application of deposition material to a substrate

Sputtering device

Method for sputtering magnetic recording media

Multi-cathode ionized physical vapor deposition system

System method and collimator for oblique deposition

System, method and aperture for oblique deposition

Multi-step magnetron sputtering process

Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers

Fabrication method for small-scale structures with non-planar features