120072 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Sputtering Applying energy to the substrate during sputtering
Sub-classes:SPUTTERING APPARATUS AND DEPOSITION METHOD OF TUNGSTEN FILM
#2METHOD FOR SURFACE COATING ACCORDING TO THE SPUTTERING PRINCIPLE
#3P-type gallium oxide film, and preparation method and application thereof
#4METHOD FOR CONTROLLING RESISTIVITY AND CRYSTALLINITY OF LOW-RESISTANCE MATERIAL THROUGH PVD
#5Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber
#6Systems for printing conformal materials on component edges at high resolution
#7Apparatus and method for preparing glow discharge sputtering samples for material microscopic characterization
#8Supplemental energy for low temperature processes
#9PLASMA FILM FORMING APPARATUS AND PLASMA FILM FORMING METHOD
#10Methods for printing conformal materials on component edges at high resolution
#11DEPOSITION APPARATUS FOR COATING A FLEXIBLE SUBSTRATE, METHOD OF COATING A FLEXIBLE SUBSTRATE AND FLEXIBLE SUBSTRATE HAVING A COATING
#12Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) with controlled cooling
#13SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER
#14Methods and apparatus for filling a feature disposed in a substrate
#15Physical vapor deposition system and processes
#16Physical vapor deposition system and processes
#17Physical vapor deposition system and processes
#18Film-forming device
#19METHOD FOR PREPARING HIGH-HARDNESS ANTI-BACTERIAL PVD FILM
#20Sputtering showerhead
#21COATED ARTICLE INCLUDING METAL ISLAND LAYER(S) FORMED USING STOICHIOMETRY CONTROL, AND/OR METHOD OF MAKING THE SAME
#22Target and process for producing a target
#23Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus
#24APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLUIDIZED PARTICLE BEDS
#25Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film
#26Plasma processing apparatus and plasma processing method
#27METHODS OF MAGNETICALLY ENHANCED PHYSICAL VAPOR DEPOSITION
#28PLASMA PROCESSING APPARATUS
#29Off-angled heating of the underside of a substrate using a lamp assembly
#30Off-angled heating of the underside of a substrate using a lamp assembly
#31Method for manufacturing acoustic wave device
#32METHOD OF FABRICATING LIGHT RECEIVING ELEMENT AND APPARATUS FOR FABRICATING LIGHT RECEIVING ELEMENT
#33Off-angled heating of the underside of a substrate using a lamp assembly
#34THIN FILM DEPOSITING APPARATUS
#35THIN FILM DEPOSITING APPARATUS
#36Method and apparatus to prepare a substrate for molecular detection
#37Pulsed laser micro-deposition pattern formation
#38METHOD AND APPARATUS FOR HIGH-PRESSURE ATOMIC-BEAM LASER INDUCED DEPOSITION/ETCHING
#39Method of forming phase change memory devices in a pulsed DC deposition chamber