SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF DEPOSITING A MATERIAL ON A SUBSTRATE

PHYSICAL VAPOR DEPOSITION APPARATUS

CATHODIC ARC SOURCE

DEPOSITION APPARATUS

SPUTTERING APPARATUS

DEPOSITION SYSTEM AND METHOD

SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WITH MAGNETIC BIASING

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF DEPOSITING A MATERIAL ON A SUBSTRATE

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Deposition system and method

DEPOSITION DEVICE HAVING CONTACT STRUCTURE AND DEPOSITION SYSTEM HAVING SAME

Electromagnet pulsing effect on PVD step coverage

Physical vapor deposition apparatus and method thereof

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

Deposition apparatus and deposition method using the same

PHYSICAL VAPOR DEPOSITION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Sputtering system with a plurality of cathode assemblies

Tilted PVD source with rotating pedestal

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

Device and method for producing layers with improved uniformity in coating systems with horizontally rotating substrate and additional plasma sources

Physical vapor deposition of piezoelectric films

SPUTTER DEPOSITION

SPUTTER DEPOSITION APPARATUS AND METHOD

Methods and apparatus for processing a substrate

Apparatus for generating magnetic fields during semiconductor processing

Methods for shaping magnetic fields during semiconductor processing

Physical vapor deposition apparatus and method thereof

Apparatus and method for physical vapor deposition

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

METHOD OF FABRICATING SUPERCONDUCTING WIRE

CATHODIC ARC SOURCE

Sputtering device with microwave heating mechanism

BIAS MAGNETIC FIELD CONTROL METHOD, MAGNETIC THIN FILM DEPOSITION METHOD,CHAMBER, AND APPARATUS

Substrate treating apparatus and substrate treating method

Sputtering system with a plurality of cathode assemblies

Deposition system with a multi-cathode

SYSTEMS AND METHODS FOR A MAGNETRON WITH A SEGMENTED TARGET CONFIGURATION

Deposition system and method

Methods and apparatus for extended chamber for through silicon via deposition

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Magnetron sputtering source and coating system arrangement

Deposition apparatus and deposition method using the same

HIGH DENSITY PLASMA PROCESSING APPARATUS

METHOD FOR GENERATING AND PROCESSING A UNIFORM HIGH DENSITY PLASMA SHEET

Deposition method of a metallic layer on a substrate of a resonator device

Sputtering apparatus

Convertible magnetics for rotary cathode

Magnet unit for magnetron sputtering apparatus

COATING APPARATUS AND METHOD FOR USE THEREOF

Film forming apparatus and method

Physical vapor deposition of piezoelectric films

Method and apparatus for depositing a material

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPOR DEPOSITION PROCESSES

Methods and apparatus for depositing aluminum by physical vapor deposition (PVD)

Apparatus and method for processing, coating or curing a substrate

Double-Sided Vacuum Coating Device For Continuously Coating A Film Back And Forth

ANTI-REFLECTION COMPOSITE LAYER AND THE MANUFACTURING METHOD THEREOF

Physical vapor deposition apparatus and method thereof

METHODS AND APPARATUS FOR UNIFORMITY CONTROL IN SELECTIVE PLASMA VAPOR DEPOSITION

Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition

Grain Size Tuning for Radiation Resistance

Deposition system with a multi-cathode

HOUSING OF ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING HOUSING

Hard mask films with graded vertical concentration formed using reactive sputtering in a radio frequency deposition chamber

Nanowires and process for their production

Magnetic thin film deposition chamber and thin film deposition apparatus

Cathode unit for sputtering apparatus

SLIDING ELEMENT WITH MAX PHASE COATING

Substrate processing chamber having improved process volume sealing

FILM-FORMING METHOD AND SPUTTERING APPARATUS

INVERTED MAGNETRON FOR PROCESSING OF THIN FILM MATERIALS

Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

APPARATUS FOR TRANSPORTATION OF A SUBSTRATE, APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR MAINTENANCE OF A MAGNETIC LEVITATION SYSTEM

Film-forming apparatus and film-forming method

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

Magnetic recording medium, with carbide segregant, method for manufacturing same and magnetic recording and reproducing apparatus

Semiconductor device and manufacturing method of the same

APPARATUS FOR PHYSICAL VAPOR DEPOSITION REACTIVE PROCESSING OF THIN FILM MATERIALS

Laterally adjustable return path magnet assembly and methods

Methods and apparatus for controlling ion fraction in physical vapor deposition processes

Method of sputtering and sputter system

Ultra-thin doped noble metal films for optoelectronics and photonics applications

Apparatus and method for coating inner wall of metal tube

Apparatus and a method for deposition of material to form a coating

DEPOSITION OF THICK MAGNETIZABLE FILMS FOR MAGNETIC DEVICES

Grain Size Tuning for Radiation Resistance

Semiconductor device and manufacturing method of the same

Method and apparatus for depositing a material

RADIO-FREQUENCY SPUTTERING SYSTEM WITH ROTARY TARGET FOR FABRICATING SOLAR CELLS

METHOD FOR SPUTTERING SYSTEM AND USING COUNTERWEIGHT

Interchangeable magnet pack

Oxide and method for forming the same

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Optically tuned hardmask for multi-patterning applications

Method of HIPIMS sputtering and HIPIMS sputter system

Method for continuously forming noble metal film and method for continuously manufacturing electronic component

Method of manufacturing a magnetic film having high coercivity for use as a hot seed in a magnetic write head

Rotation plus vibration magnet for magnetron sputtering apparatus

Ternary metal nitride formation by annealing constituent layers

Interchangeable sputter gun head

Optical fiber and optical fiber manufacturing method

Semiconductor device and manufacturing method of the same

Source magnet for improved resputtering uniformity in direct current (DC) physical vapor deposition (PVD) processes

Method for manufacturing patterned layer and method for manufacturing electrochromic device

Thin-film formation method, thin-film formation device, object to be processed having coating film formed thereof, die and tool

Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device

In-situ sputtering apparatus

Variable radius dual magnetron

PVD RF DC open/closed loop selectable magnetron

Multi-Piece Target and Magnetron to Prevent Sputtering of Target Backing Materials

Bilayer chromium nitride coated articles and related methods

New Magnet Design Which Improves Erosion Profile for PVD Systems

High coercivity magnetic film for use as a hot seed in a magnetic write head and method to grow it

Magnet module having epicyclic gearing system and method of use

MAGNETRON SPUTTERING SYSTEM

Magnetic-field-generating apparatus for magnetron sputtering

Substrate processing apparatus

MAGNETRON SPUTTERING DEVICE, METHOD FOR CONTROLLING MAGNETRON SPUTTERING DEVICE, AND FILM FORMING METHOD

Rotation plus vibration magnet for magnetron sputtering apparatus

Multi coil target design

High density TiN RF/DC PVD deposition with stress tuning

Crystalline orientation and overhang control in collision based RF plasmas

Method of switching magnetic flux distribution

Magnetic field generator, magnetron cathode and spattering apparatus

Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing

Sputter gun having variable magnetic strength

SPUTTER GUN SHUTTER

Masking method and apparatus

Magnetic Confinement and Directionally Driven Ionized Sputtered Films For Combinatorial Processing

Magnetic Field Configuration For Energetic Plasma Surface Treatment and Energetic Deposition Conditions

Method and Apparatus for Enhanced Film Uniformity

Apparatus for processing work piece by pulsed electric discharges in solid-gas plasma

MAGNET ARRAY FOR A PHYSICAL VAPOR DEPOSITION SYSTEM

FILM FORMATION APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Film formation apparatus

Deposition of Material to Form a Coating

FILM FORMATION APPARATUS AND FILM FORMING METHOD

CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLASMA DEPOSITION AND RESPUTTERING UNIFORMITY

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Apparatus for Forming Electronic Material Layer

Processes and device for the deposition of films on substrates

Substrate processing apparatus and apparatus and method of manufacturing magnetic device

Sputtering apparatus and sputtering method

Magnetron Plasma Sputtering Apparatus

Magnetic lensing to improve deposition uniformity in a physical vapor deposition (PVD) process

Plasma processing apparatus, magnetoresistive device manufacturing apparatus, magnetic thin film forming method, and film formation control program

SPUTTER DEPOSITION SYSTEM AND METHOD

COATING APPARATUS AND COATING METHOD

System and apparatus to facilitate physical vapor deposition to modify non-metal films on semiconductor substrates

Method for manufacturing a treated surface and vacuum plasma sources

SUBSTRATE STAGE, SPUTTERING APPARATUS PROVIDED WITH SAME, AND FILM FORMING METHOD

Sputtering apparatus, sputter deposition method, and analysis apparatus

SPUTTERING APPARATUS AND FILM FORMING METHOD

Methods and apparatus for forming diamond-like coatings

LOW DAMAGE SPUTTERING SYSTEM AND METHOD

Methods for forming a titanium nitride layer

Processes and device for the deposition of films on substrates

Reactive sputtering method

CHALCOGENIDE TARGET AND METHOD

SPUTTERING SYSTEM CARRIER

Method of arc ion plating and target for use therein

Sputtering of thermally resistive materials including metal chalcogenides

Coating Apparatus for the Coating of a Substrate and also Method for Coating

Manufacturing method of a transparent conductive film, a manufacturing method of a transparent electrode of an organic electroluminescence device, an organic electroluminescence device and the manufacturing method

Magnetron Sputtering Device In which Two Modes Of Magnetic Flux Distribution (Balanced Mode/Unbalanced Mode) Can Be Switched From One To The Other And Vice Versa, A Film Formation Method For Forming A Film From An Inorganic Film Formation Material Using The Device, And A Dual Mode Magnetron Sputtering Device And Film Formation Method For Forming A Film From An Inorganic Film Formation Material At A Low Temperature Using The Device

Magnetron based wafer processing

Work piece processing by pulsed electric discharges in solid-gas plasma

High throughput deposition apparatus with magnetic support

Method for forming a barrier layer in an integrated circuit in a plasma with source and bias power frequencies applied through the workpiece

[PHYSICAL VAPOR DEPOSITION PROCESS AND APPARATUS THEREFOR]

Processes and device for the deposition of films on substrates

Sputtering cathode and device and method for coating a substrate with several layers