PARTICLE TRANSFER APPARATUS AND METHODS

AMORPHOUS CARBON COATING METHOD FOR RUBBER ROLLER

METAL SUBSTRATE COATINGS

ELECTRON BEAM DEVICE FOR SURFACE TREATMENT

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

ION BEAM DEPOSITION

ION BEAM SPUTTERING APPARATUS AND METHOD

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPONENT, AND PLASMA PROCESSING APPARATUS

METHOD FOR FORMING AN OHMIC CONTACT ON A GERMANIUM-TIN BASED LAYER

METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY FOR THE DUV WAVELENGTH RANGE

NANO-TWINNED ULTRA-THIN METALLIC FILM STRUCTURE AND METHODS FOR FORMING THE SAME

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

REFLECTIVE MASK BLANK, REFLECTIVE MASK, REFLECTIVE MASK MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

REFLECTION TYPE MASK BLANK AND PRODUCTION METHOD THEREFOR, AND REFLECTIVE LAYER-INCLUDING SUBSTRATE FOR SAID MASK BLANK

TANTALA-RING-RESONATOR-BASED PHOTONIC DEVICE AND FREQUENCY-COMB GENERATION METHOD

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

Ion beam deposition target life enhancement

Wafer scanning apparatus and method for focused beam processing

Ion beam sputtering with ion assisted deposition for coatings on chamber components

PROTECTIVE METAL OXY-FLUORIDE COATINGS

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USING ANGLED BEAMS

Manufacture of particulate reference materials

Method for joining transparent substrates

SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS

Pattern enhancement using a gas cluster ion beam

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

Oxide superconducting wire

Oxide superconducting wire

Substrate processing apparatus and substrate processing method

Single beam plasma source

Manufacture of particulate reference materials

Wafer scanning apparatus and method for focused beam processing

Pattern enhancement using a gas cluster ion beam

Techniques and apparatus for selective shaping of mask features using angled beams

3D IDENTIFICATION FILTER

Substrate with water-and-oil repellent layer, vapor deposition material, and method for producing substrate with water-and-oil repellent layer

Techniques and apparatus for selective shaping of mask features using angled beams

Ribbon beam plasma enhanced chemical vapor deposition system for anisotropic deposition of thin films

Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus

Ion beam sputtering apparatus and method

Apparatus for depositing a substrate and deposition system having the same

METHOD FOR BONDING SUBSTRATE, TRANSPARENT SUBSTRATE LAMINATE, AND DEVICE PROVIDED WITH SUBSTRATE LAMINATE

SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER

PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DISTAL ENDS

Substrate processing apparatus and substrate processing method

Method of making thin films

DIRECTED PLASMA NANOSYNTHESIS (DPNS) METHODS, USES AND SYSTEMS

Metal plating of grids for ion beam sputtering

Ion beam etching chamber with etching by-product redistributor

Techniques for selective deposition using angled ions

OXIDE SUPERCONDUCTING WIRE

Optical element with high scratch resistance

Method and system for fabrication of crystals using laser-accelerated particle beams or secondary sources

Method for manufacturing reflective mask blank, and method for manufacturing reflective mask

Composite material device

Planetary gear assembly for sputtering multiple balloon catheter distal ends

Silicide alloy film for semiconductor device electrode, and production method for silicide alloy film

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Sliding member and method for producing the same

Ion assisted deposition top coat of rare-earth oxide

Ion assisted deposition top coat of rare-earth oxide

Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Protective metal oxy-fluoride coatings

Passivation of laser facets and systems for performing the same

Composite high index layers for anti reflective stacks

Oxide superconducting wire

Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device

Orthopaedic implants having self-lubricated articulating surfaces designed to reduce wear, corrosion, and ion leaching

Method of manufacturing a plurality of through-holes in a layer of first material

RAMAN EDGE FILTER IN DEEP-UV RANGE AND METHOD OF MANUFACTURING THE SAME

MULTILAYER COATINGS ON SUBSTRATES

Apparatus and method for carbon film deposition profile control

ANODE LAYER ION SOURCE AND ION BEAM SPUTTER DEPOSITION MODULE

Apparatus and method for multilayer deposition

Ion assisted deposition top coat of rare-earth oxide

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Methods of forming molybdenum sputtering targets

METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN ENERGETIC PARTICLE BEAM

Piezoelectric thin film and method for producing the same

Open air plasma deposition method

Ion beam sample preparation and coating apparatus and methods

Method for manufacturing reflective mask blank, and method for manufacturing reflective mask

OPTICAL ELEMENT WITH HIGH SCRATCH RESISTANCE

Hard surfacing non-metallic slip components for downhole tools

Ion assisted deposition top coat of rare-earth oxide

CHAMBER COMPONENT WITH FLUORINATED THIN FILM COATING

Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their production

Method for increased target utilization in ion beam deposition tools

High aspect ratio structure analysis

Identifying an original object in a forgery-proof way

SPUTTER COATING A WORK PIECE

Method of manufacturing a device

Interchangeable sputter gun head

Formation of an alignment film for a liquid crystal on a substrate

Ion beam sputtering with ion assisted deposition for coatings on chamber components

Methods of depositing thin films using molybdenum sputtering targets

SYSTEMS AND METHODS FOR HIGH AND ULTRA-HIGH VACUUM PHYSICAL VAPOR DEPOSITION WITH IN-SITU MAGNETIC FIELD

Intaglio printing plate coating apparatus

Nano-parts fabrication method

Alkali resistant optical coatings for alkali lasers and methods of production thereof

Small Feature Size Fabrication Using a Shadow Mask Deposition Process

METHODS FOR ADDRESSING INBOARD-OUTBOARD ASYMMETRY IN SUBSTRATE PROCESSING

Generating a highly ionized plasma in a plasma chamber

Ion beam generator and ion beam plasma processing apparatus

Film Deposition Apparatus and Film Deposition Method

Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly

METHODS OF GAS CONFINEMENT WITHIN THE VOIDS OF CRYSTALLINE MATERIAL AND ARTICLES THEREOF

Method for synthesis of cubic boron nitride

Low energy ion beam etch

Carbon thin film, mold for molding optical element, and method for manufacturing optical element

Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam

Lid for use in ion beam assisted deposition

Open air plasma deposition system

Coated article and method for manufacturing same

IBAD apparatus and IBAD method

Alkali resistant optical coatings for alkali lasers and methods of production thereof

Underlying layer of alignment film for oxide superconducting conductor and method of forming same, and device for forming same

Methods of forming molybdenum sputtering targets

Process for forming a ceramic layer

Tape-shaped base for superconducting wire, and superconducting wire

Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blank

ION BEAM GENERATING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

ION BEAM DISTRIBUTION

CERAMIC COATING, ARTICLE COATED WITH COATING, AND METHOD FOR MANUFACTURING ARTICLE

Ion beam sputter target and method of manufacture

PROCESS OF FORMING INSULATING LAYER BY PARTICLES HAVING LOW ENERGY

Method for producing a magnetic tunnel junction and magnetic tunnel junction thus obtained

MEDICAL DEVICES AND METHODS OF MAKING THE SAME

Room-temperature bonding method and room-temperature bonding apparatus including sputtering

Ion beam source

METHOD FOR PRODUCING A MULTICOMPONENT, POLYMER- AND METAL-CONTAINING LAYER SYSTEM, DEVICE AND COATED ARTICLE

Method of using nitrogen based compounds to reduce contamination in beam-induced thin film deposition

PROCESSES FOR FORMING ELECTRONIC DEVICES AND ELECTRONIC DEVICES FORMED BY SUCH PROCESSES

Method for manufacturing organic electroluminescence device

Medical devices and methods of making the same

Protective coating for semiconductor substrates

ZnO-containing semiconductor layer and device using the same

Method for the production of quantum dots embedded in a matrix, and quantum dots embedded in a matrix produced using the method

DEPOSITION SYSTEMS AND METHODS

Ion deposition apparatus having rotatable carousel for supporting a plurality of targets

Bi-axial texturing of high-K dielectric films to reduce leakage currents

Room temperature bonding using sputtering

PLASMA FILM FORMING APPARATUS AND FILM MANUFACTURING METHOD

Method of producing zinc oxide semiconductor crystal

CAPILLARITRON ION BEAM SPUTTERING SYSTEM AND THIN FILM PRODUCTION METHOD

VACUUM DEPOSITION METHOD

METHODS OF GAS CONFINEMENT WITHIN THE VOIDS OF CRYSTALLINE MATERIAL AND ARTICLES THEREOF

Method for manufacturing magnetic recording medium

Method and apparatus for surface processing of a substrate using an energetic particle beam

FILM DEPOSITION APPARATUS AND METHOD OF FILM DEPOSITION

Alignment film forming apparatus and method

METHOD FOR DEPOSITION OF AN ANTI-SCRATCH COATING

Sputter-enhanced evaporative deposition apparatus and method

Film and method for producing nano-particles for magnetoresistive device

Process for forming a ceramic layer

Method of Deposition with Reduction of Contaminants in An Ion Assist Beam and Associated Apparatus

Orthopaedic implants having self-lubricated articulating surfaces designed to reduce wear, corrosion, and ion leaching

METHOD FOR MANUFACTURING A MAGNETIC TUNNEL JUNCTION SENSOR USING ION BEAM DEPOSITION

THIN FILM FORMING APPARATUS

Method and apparatus for fabricating nanostructure multi-element compound

Deposition apparatus and deposition method

Modified surfaces for attachment of biological materials

Nonvolatile memory device, layer deposition apparatus and method of fabricating a nonvolatile memory device using the same

Medical devices and methods of making the same

Method and apparatus for deposition of low-k dielectric materials

APPARATUS FOR REACTIVE SPUTTERING

Deposition on charge sensitive materials with ion beam deposition

ARTICLE WITH MULTILAYER DIAMOND-LIKE CARBON FILM AND METHOD FOR MANUFACTURING THE SAME

Ion beam sputtering apparatus and film deposition method for a multilayer for a reflective-type mask blank for EUV lithography

Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography

Attenuated phase shift mask blank and photomask

Reflective-type mask blank for EUV lithography and method for producing the same

Biased target ion bean deposition (BTIBD) for the production of combinatorial materials libraries

Method of forming inorganic orientation film, inorganic orientation film, substrate for electronic devices, liquid crystal panel, and electronic equipment

Processes for forming electronic devices and electronic devices formed by such processes

Bi-axial texturing of high-K dielectric films to reduce leakage currents

Film and method for producing nano-particles for magnetoresistive device

Method of fabricating a capacitor

Molybdenum sputtering targets

Method for manufacturing of a mask blank for EUV photolithography and mask blank

Superconductor fabrication processes

Treatment process for improving the mechanical, catalytic, chemical, and biological activity of surfaces and articles treated therewith

Planarization of substrate pits and scratches

Attenuating phase shift mask blank and photomask

Sample mount for performing sputter-deposition in a focused ion beam (FIB) tool

System and method for performing sputter etching using independent ion and electron sources and a substrate biased with an a-symmetric bi-polar DC pulse signal