SYSTEM AND METHOD FOR PROCESSING SUBSTRATE

PHYSICAL VAPOR DEPOSITION MODULE AND SYSTEM INCLUDING SAME

SUBSTRATE LOADING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND SUBSTRATE PROCESSING METHOD USING THE SAME

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES

ROUTING CHAMBER

SHUTTER DISK SYSTEM

INLINE SYSTEM FOR COATING INDIVIDUAL SUBSTRATES OR GROUPS OF SUBSTRATES AND METHOD FOR COATING INDIVIDUAL SUBSTRATES OR SUBSTRATE GROUPS IN AN INLINE COATING SYSTEM

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES

SURFACE TREATMENT APPARATUS

PRESSING TOOL AND METHOD FOR PRODUCING A PRESS PLATE

MANUFACTURING DEVICE OF DISPLAY DEVICE

SEMICONDUCTOR PROCESS EQUIPMENT

VOLUME FILLING CASSETTE FOR LOAD LOCK

SEMICONDUCTOR PROCESS EQUIPMENT

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CONTROL ASSEMBLY, AND METHOD OF CONTROLLING PARTIAL PRESSURE OF A GAS IN A VACUUM PROCESSING CHAMBER

Substrate flipping in vacuum for dual sided PVD sputtering

Multi-chamber Configuration

MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS

Deposition Apparatus and Methods for Sequential Coating

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

VACUUM SYSTEM CLUSTER TOOL

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA HIGH VACCUM PROCESSES

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENSES AND METHOD OF COATING SPECTACLE LENSES

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES

METHOD OF OPERATING A PVD APPARATUS

Substrate flipping in vacuum for dual sided PVD sputtering

SUBSTRATE PROCESSING SYSTEM AND METHOD OF TEACHING TRANSFER DEVICE

Load lock device having optical measuring device for acquiring distance

System and method to evaporate an OLED layer stack in a vertical orientation

Multi-chamber substrate processing platform

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

DEVICE FOR SEALING A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND METHOD OF MONITORING A LOAD LOCK SEAL

Apparatus and method for manufacturing metal gate structures

IRON NITRIDE MAGNETIC MATERIAL INCLUDING COATED NANOPARTICLES

Rotating shaft sealing device and processing apparatus for semiconductor substrate using the same

Inverted cylindrical magnetron (ICM) system and methods of use

CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES

Method for cleaning a vacuum system used in the manufacture of OLED devices, method for vacuum deposition on a substrate to manufacture OLED devices, and apparatus for vacuum deposition on a substrate to manufacture OLED devices

Gas supply member with baffle

Method and device for decreasing generation of surface oxide of aluminum nitride

Coating processes for vacuum chamber arrangements and apparatus thereof

Deposition apparatus methods for sequential workpiece coating

System with dual-motion substrate carriers

Film forming apparatus and film forming method

Film forming system, magnetization characteristic measuring device, and film forming method

SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM

APPARATUS AND SYSTEM FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE

Hybrid system architecture for thin film deposition

VACUUM PROCESS APPARATUS AND VACUUM PROCESS METHOD

Substrate positioning apparatus and methods

Vacuum arrangement and method

DEVICE FOR PRODUCING SEMICO NDUCTOR BUMP METAL LAYER

In-line coater for vacuum deposition of thin film coatings

Thin film coating method and the manufacturing line for its implementation

HIGH THROUGHPUT CONTINUOUS OPERATION REACTOR SYSTEM

METHOD FOR DETECTION OF SATURATED PIXELS IN AN IMAGE

WEB SUBSTRATE TREATING SYSTEM

Gas supply member with baffle

Substrate processing apparatus

VACUUM CHAMBER ARRANGEMENT

Device for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system

APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE

Deposition apparatus and physical vapor deposition chamber

Continuous system

System architecture for combined static and pass-by processing

SPUTTERING APPARATUS

Apparatus for Evaporating a Material

Method for operating an inline coating system and inline coating system

Substrate processing device

Sputtering apparatus, sputtering target, and method for forming semiconductor film with the sputtering apparatus

Inverted cylindrical magnetron (ICM) system and methods of use

System for depositing one or more layers on a substrate supported by a carrier and method using the same

Deposition apparatus

Iron nitride magnetic material including coated nanoparticles

Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers

Gas systems and methods for chamber ports

Thin film coating method and the manufacturing line for its implementation

SPUTTERING DEVICE AND METHOD FOR REPLACING FILM ROLL IN SPUTTERING DEVICE

Apparatus and method of manufacturing display device

System for glass sheet semiconductor coating and resultant product

Vacuum process apparatus and vacuum process method

Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide

Ferroelectric ceramics, electronic component and manufacturing method of ferroelectric ceramics

Oxide and method for forming the same

Reactor device with removable deposition monitor

Apparatus for in situ deposition of multilayer structures via atomic layer deposition and ultra-high vacuum physical or chemical vapor deposition

Ion beam sample preparation and coating apparatus and methods

Deposition apparatus and use methods

In-line type film forming apparatus and method of manufacturing magnetic recording medium using the same

Method of manufacturing EL display device

Gas apparatus, systems, and methods for chamber ports

Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device

Application of coating materials

Method and device for continuously coating substrates

Inverted cylindrical magnetron (ICM) system and methods of use

Machine for painting and line for finishing small three-dimensional objects and related methods

Gate valve unit, substrate processing device and substrate processing method thereof

Narrow source for physical vapor deposition processing

System architecture for combined static and pass-by processing

Vacuum processing apparatus, vacuum processing method, and electronic device manufacturing method

LOAD LOCK CONTROL METHOD AND APPARATUS

MACHINE AND METHOD FOR METALLIZATION OF THREE-DIMENSIONAL OBJECTS OF SMALL SIZES

Coating methods and apparatus

VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD

THIN-FILM FORMATION SYSTEM AND ORGANIC EL DEVICE MANUFACTURING SYSTEM

REACTOR DEVICE WITH REMOVABLE DEPOSITION MONITOR

Substrate depositing system and depositing method using the same

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

METHOD AND APPARATUS FOR CONTINUOUS THIN FILM DEPOSITION PROCESS IN VACUUM

Test glass changing system

VACUUM PROCESSING APPARATUS

PROCESSING METHOD AND FABRICATION METHOD OF SEMICONDUCTOR DEVICE

Method for manufacturing semiconductor element and deposition apparatus

VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD

VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Lock device for adding and removing containers to and from a vacuum treatment chamber

Substrate processing system having improved substrate transport system

PROCESS AND APPARATUS FOR THE INTRODUCTION AND REMOVAL OF A SUBSTRATE INTO AND FROM A VACUUM COATING UNIT

Manufacturing apparatus and manufacturing method of lighting device

Stacked load-lock apparatus and method for high throughput solar cell manufacturing

Sluice system for a vacuum facility

Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems

Multiple slot load lock chamber and method of operation

Dual substrate loadlock process equipment

METHOD AND DEVICE FOR COATING SUBSTRATES

TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

FILM AND METHOD FOR PRODUCING THE SAME

COATING SYSTEM AND METHOD FOR COATING A SUBSTRATE

SUBSTRATE PROCESSING MODULE EXCHANGE UNIT, VACUUM COATING INSTALLATION, METHOD OF EXCHANGING A SUBSTRATE PROCESSING MODULE FOR A VACUUM COATING INSTALLATION, AND USE OF A SUBSTRATE PROCESSING MODULE EXCHANGE UNIT

Apparatus for mass-producing silicon-based thin film and method for mass-producing silicon-based thin film

Vacuum film formation method for inorganic layer, barrier laminate, device, and optical component

Coating apparatus with rotation module

Transfer chamber for a vacuum processing apparatus, and a vacuum processing apparatus

Substrate processing system having improved substrate transport system

Deposition methods for barrier and tungsten materials

Apparatus for depositing protective layer and depositing method using the apparatus

Semiconductor substrate processing apparatus with horizontally clustered vertical stacks

Gas manifold directly attached to substrate processing chamber

Method for glass sheet semiconductor coating

COATING PLANT WITH A CHARGING LOCK AND DEVICE THEREFOR

Integrated substrate processing in a vacuum processing tool

APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES

Vacuum processing device

Substrate holding device, substrate processing system and liquid crystal display device

Multiple slot load lock chamber and method of operation

Cleanroom-Capable Coating System

Sluice System For A Vaccum Facility

Method and apparatus for manufacturing a functional layer consisting of at least two components

Vacuum processing apparatus

High-throughput deposition system for oxide thin film growth by reactive coevaportation

DUAL SUBSTRATE LOADLOCK PROCESS EQUIPMENT

Device for carrying out a surface treatment of substrates under vacuum

MOVABLE TRANSFER CHAMBER AND SUBSTRATE-TREATING APPARATUS INCLUDING THE SAME

Perimeter partition-valve with protected seals and associated small size process chambers and multiple chamber systems

Integrated PVD system using designated PVD chambers

Substrate movement and process chamber scheduling

Gravity-fed in-line continuous processing system and method

Gravity-fed in-line continuous processing system and method

Oscillating magnet in sputtering system

Rotating pallet in sputtering system

Apparatus for vacuum coating of substrates of various sizes

Coating plant with a charging lock and device therefor

Transfer chamber for vacuum processing system

Modification method of surface layer of molded resin article, and modification apparatus of surface layer of molded resin article

Arrangement and method for the production of gas-impermeable layers

Lock chamber device for vacuum treatment unit and procedures for its operation

Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluice

Method for operating an in-line coating installation

Plasma processing apparatus

Vacuum processing apparatus and method for producing an object to be processed

Installation for electron-ray coatication of coatings

Gravity-fed in-line continuous processing system and method

Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers

Dual substrate loadlock process equipment

Load lock with variable conductance valve

Continuous web apparatus and method using an air to vacuum seal and accumulator