120130 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes; Pretreatment of the material to be coated by cleaning or etching by etching with a reactive gas
CIRCULAR BEAM TELECOMMUNICATIONS WAVELENGTH EDGE-EMITTING SEMICONDUCTOR LASER
#2TRANSITION METAL DICHALCOGENIDE HAVING A HETEROSTRUCTURE, METHOD FOR MANUFACTURING THE SAME, AND PHOTOELECTRIC DEVICE INCLUDING THE SAME
#3PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PROCESSING APPARATUS, AND RECORDING MEDIUM
#4COMPOSITE OF A SUBSTRATE COATED WITH A MECHANICALLY INTERLOCKED COATING, CUTTING ELEMENT AND METHOD FOR DEPOSITING A MECHANICALLY INTERLOCKED COATING UPON A SUBSTRATE
#5METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES
#6FILM FORMATION METHOD AND FILM FORMATION APPARATUS
#7SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND PROTECTIVE FILM
#8CLEANING METHOD AND FILM-FORMING APPARATUS
#9METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEEP TRENCH
#10METHOD AND APPARATUS FOR ATOMIC LAYER DEPOSITION OF A FLUORIDE LAYER, OPTICAL ELEMENT AND OPTICAL ARRANGEMENT
#11UNIFORM GAPFILL DEPOSITION ON SEMICONDUCTOR SUBSTRATES WITH VARYING GEOMETRIES
#12SIDEWALL PASSIVATION USING ALDEHYDE OR ISOCYANATE CHEMISTRY FOR HIGH ASPECT RATIO ETCH
#13THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USING THIN FILM MODIFICATION COMPOSITION, SEMICONDUCTOR SUBSTRATE INCLUDING THIN FILM, AND SEMICONDUCTOR DEVICE INCLUDING SEMICONDUCTOR SUBSTRATE
#14SURFACE CLEANING, MODIFICATION AND DOPING OF ARGYRODITE TYPE SOLID ELECTROLYTES
#15METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE
#16METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN PATTERN FORMATION AND A SEMICONDUCTOR DEVICE
#17System and method for transistor pathogen detector
#18ETCHING METHOD AND PLASMA PROCESSING APPARATUS
#19MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
#20APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES
#21SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
#22METHOD OF SELECTIVE ETCHING OF DIELECTRIC MATERIALS
#23Vacuum pump protection against deposition byproduct buildup
#24FORMATION OF PORES IN ATOMICALLY THIN LAYERS
#25METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES
#26METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE
#27ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS
#28METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
#29METHOD FOR MANUFACTURING SHALLOW TRENCH ISOLATION STRUCTURE, SHALLOW TRENCH ISOLATION STRUCTURE AND SEMICONDUCTOR STRUCTURE
#30Method and apparatus for low temperature selective epitaxy in a deep trench
#31METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM
#32Substrate processing method
#33Energy storage devices having coated passive particles
#34INTEGRATED EPITAXY AND PRECLEAN SYSTEM
#35Electrode and method for production
#36METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS
#37SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
#38Depositing Coatings On and Within A Housing, Apparatus, or Tool Using a Coating System Positioned Therein
#39METHOD FOR RECORDING A STATE OF A CVD REACTOR UNDER PRODUCTION CONDITIONS
#40Fabricating method of semi-polar gallium nitride
#41Silicide film nucleation
#42Method of manufacturing silicon carbide epitaxial wafer
#43System and method for transistor pathogen detector
#44Vacuum pump protection against deposition byproduct buildup
#45Apparatus and method for etching one side of a semiconductor layer of a workpiece
#46Method for etching or deposition
#47Substrate processing method and substrate processing system
#48Energy storage devices having coated passive components
#49Depositing coatings on and within a housing, apparatus, or tool using a coating system positioned therein
#50Surface processing method and processing system
#51Vacuum pump protection against deposition byproduct buildup
#52METHODS FOR SELECTIVE DEPOSITION USING MOLYBDENUM HEXACARBONYL
#53Formation of pores in atomically thin layers
#54Film forming method and film forming apparatus
#55Extreme Ultraviolet Mask Absorber Materials
#56Apparatus and method for synthesizing vertically aligned carbon nanotubes
#57Optical element for a motor vehicle
#58Method of forming boron-based film, and film forming apparatus
#59Method, materials and process for native oxide removal and regrowth of dielectric oxides for better biosensor performance
#60Method of preparing for reactor restart for manufacturing epitaxial wafer
#61Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal
#62Single-crystal diamond, method for manufacturing single-crystal diamond, and chemical vapor deposition device used in same
#63Energy storage devices having coated passive components
#64Processing system and processing method
#65Method for epitaxially coating semiconductor wafers, and semiconductor wafer
#66Method of manufacturing a moth eye mircostructure, an antireflective substrate and an electronic product
#67System and method for controllable non-volatile metal removal
#68Wear resistant vapor deposited coating, method of coating deposition and applications therefor
#69EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR
#70Method and apparatus for forming nitride film
#71Lamination transfer films for forming antireflective structures
#72Method of producing a silicon carbide single-crystal substrate by epitaxial growth of a SiC epitaxial film on a SiC substrate
#73System and method for controllable non-volatile metal removal
#74Method for substrate processing using exhaust ports
#75Preparing a semiconductor surface for epitaxial deposition
#76Selective deposition
#77APPARATUS AND METHOD FOR EPITAXIALLY GROWING SOURCES AND DRAINS OF A FINFET DEVICE
#78METHODS OF MAKING LAMINATION TRANSFER FILMS FOR FORMING ANTIREFLECTIVE STRUCTURES
#79SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SUBSTRATE PROCESSING METHOD
#80Wear resistant vapor deposited coating, method of coating deposition and applications therefor
#81METHOD FOR ENHANCING GROWTH OF CARBON NANOTUBES ON SUBSTRATES
#82Method of manufacturing semiconductor device and substrate processing apparatus
#83Coated retaining ring
#84Substrate processing apparatus including auxiliary gas supply port
#85Silicon carbide crystal growth in a CVD reactor using chlorinated chemistry
#86PASSIVE THERMAL MANAGEMENT DEVICE
#87Substrate processing apparatus including exhaust ports and substrate processing method
#88Methods for forming a contact metal layer in semiconductor devices
#89FILM-FORMING APPARATUS AND FILM-FORMING METHOD
#90METHODS FOR CLEANING A SURFACE OF A SUBSTRATE USING A HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD) CHAMBER
#91APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE
#92PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR CONTROLLING THE SAME
#93SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
#94Method for forming barrier film on wiring line
#95Methods of forming material on a substrate, and a method of forming a field effect transistor gate oxide on a substrate
#96Wear resistant vapor deposited coating, method of coating deposition and applications therefor
#97CLUSTER TOOL FOR EPITAXIAL FILM FORMATION
#98Sealing structure and fuel cell having the sealing structure
#99Substrate for epitaxial growth, process for manufacturing GaN-based semiconductor film, GaN-based semiconductor film, process for manufacturing GaN-based semiconductor light emitting element and GaN-based semiconductor light emitting element
#100DRY CLEANING AND SURFACE TREATMENT EQUIPMENT USED FOR BIOCHIP OR MEDICAL APPARATUS
#101Silicon film formation apparatus and method for using same
#102Capacitor with zirconium oxide and method for fabricating the same
#103METHOD FOR FORMING RUTHENIUM METAL CAP LAYERS
#104Capacitor with zirconium oxide and method for fabricating the same
#105FILM FORMING METHOD AND FILM FORMING APPARATUS
#106Seasoning method for film-forming apparatus
#107Method for applying a diamond layer onto a graphite substrate
#108Method for the protection of an optical element of a lithographic apparatus and device manufacturing method
#109LOW-TEMPERATURE CLEANING OF NATIVE OXIDE
#110Pre-cleaning of substrates in epitaxy chambers
#111Vacuum film-forming apparatus
#112CLUSTER TOOL FOR EPITAXIAL FILM FORMATION
#113Wear resistant vapor deposited coating, method of coating deposition and applications therefor
#114Epitaxial deposition process and apparatus
#115IN-SITU ATOMIC LAYER DEPOSITION
#116Low temperature wafer backside cleaning
#117Capacitor with zirconium oxide and method for fabricating the same
#118Methods for treating pluralities of discrete semiconductor substrates
#119Methods of forming material on a substrate, and a method of forming a field effect transistor gate oxide on a substrate
#120Vacuum film-forming apparatus
#121Method for modifying a metallic surface
#122Manufacturing device for buried insulating layer type single crystal silicon carbide substrate
#123Method of and apparatus for performing sequential processes requiring different amounts of time in the manufacturing of semiconductor devices
#124Methods of forming material on a substrate, and a method of forming a field effect transistor gate oxide on a substrate
#125Apparatuses for treating pluralities of discrete semiconductor substrates; and methods for treating pluralities of discrete semiconductor substrates
#126Apparatus and method for synthesizing vertically aligned carbon nanotubes