LOWER K AND HIGHER HARDNESS WITH IMPROVED PLASMA INDUCED DAMAGE (PID) DIELECTRIC FILM DEPOSITION

APPARATUS AND METHOD OF FORMING CARBON-CONTAINING FILM ON SUBSTRATE

SUBSTRATE FOR HIGH-FREQUENCY DEVICE, AND METHOD FOR PRODUCING SAME

FILM FORMING DEVICE AND FILM FORMING METHOD

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

Multiple Chamber System for Plasma Chemical Vapor Deposition of Diamond and Related Materials

COATING APPARATUS AND APPLICATION THEREOF

Non-planar polycrystalline diamond body

Chemical vapor deposition process for producing diamond

NON-PLANAR DIAMOND BODY FOR A SPEAKER DOME

METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK AND OTHER PATTERNING APPLICATIONS

Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications

Process and device for diamond synthesis by CVD

Self-supporting ultra-fine nanocrystalline diamond thick film

DIAMOND-LIKE CARBON SYNTHESIZED BY ATMOSPHERIC PLASMA

BARRIER FILM

High density carbon films for patterning applications

Toroidal plasma processing apparatus with a shaped workpiece holder

Film formation method

Multispectral interference coating with diamond-like carbon (DLC) film

High-density low temperature carbon films for hardmask and other patterning applications

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

Deposition or treatment of diamond-like carbon in a plasma reactor

Foundation substrate for producing diamond film and method for producing diamond substrate using same

Method of CVD Plasma Processing with a Toroidal Plasma Processing Apparatus

PROTECTIVE FILM AND METHOD FOR PRODUCING SAME

Method of CVD plasma processing with a toroidal plasma processing apparatus

DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS

Toroidal plasma processing apparatus with a shaped workpiece holder

High power impulse magnetron sputtering process to achieve a high density high SP3 containing layer

Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition

Carbon film forming apparatus, carbon film forming method, and magnetic recording medium manufacturing method

Method and Apparatus of Growing Metal-free and Low Stress Thick Film of Diamond-like Carbon

DEVICE FOR DEPOSITING CARBON FILM AND METHOD FOR DEPOSITING CARBON FILM

Toroidal Plasma Processing Apparatus

POLYCRYSTALLINE DIAMOND COMPACT COATED WITH HIGH ABRASION RESISTANCE DIAMOND LAYERS

Diamond producing method and DC plasma enhanced CVD apparatus

Methods for fabricating nanocrystalline diamond film

Device and method for coating a substrate using CVD

BIAS ENHANCED NUCLEATION OF DIAMOND FILMS IN A CHEMICAL VAPOR DEPOSITION PROCESS

Direct-current plasma CVD apparatus and method for producing diamond using the same

Base substrate for epitaxial diamond film, method for producing the base substrate for epitaxial diamond film, epitaxial diamond film produced with the base substrate for epitaxial diamond film, and method for producing the epitaxial diamond film

Amorphous carbon film forming method and device

Method for DC plasma assisted chemical vapor deposition in the absence of a positive column

Diamond films and methods of making diamond films

Diamond films and methods of making diamond films

Process for synthesizing uniform nanocrystalline films

Method for synthesizing self-aligned carbon nanomaterials on large area

Diamond shell with a geometrical figure and method for fabrication thereof

Method for making a highly stable diamond film on a substrate

Diamond films and methods of diamond films

Chemically attached diamondoids for CVD diamond film nucleation

Fabrication of diamond shells

Plasma CVD apparatus and plasma surface treatment method

Bias enhanced nucleation of diamond films in a chemical vapor deposition process

Synthesis of a self assembled hybrid of ultrananocrystalline diamond and carbon nanotubes

Powered anode for ion source for DLC and reactive processes