Chemical delivery apparatus for CVD or ALD

Apparatus for supplying source and apparatus for deposition thin film having the same

Solid organometallic compound-filled container and filling method thereof

DEVICE FOR TEMPERATURE-CONTROLLED ACCOMMODATION OF A CONTAINER

Metalorganic Chemical Vapor Deposition of Zinc Oxide

REAGENT DISPENSING APPARATUS AND DELIVERY METHOD

REAGENT DISPENSING APPARATUS AND DELIVERY METHOD

Raw material feeding device, film formation system and method for feeding gaseous raw material

Heated valve manifold for ampoule

Method and apparatus for precursor delivery system for irradiation beam instruments

MULTIPLE AMPOULE DELIVERY SYSTEMS

MULTIPLE AMPOULE DELIVERY SYSTEMS

MULTIPLE AMPOULE DELIVERY SYSTEMS

MULTIPLE AMPOULE DELIVERY SYSTEMS

Solid precursor sublimator

Low decomposition storage of a tantalum precursor

DEVICE FOR SUPPLYING ORGANIC METAL COMPOUND

Method and apparatus for generating a precursor for a semiconductor processing system

NANOPARTICLE AND NANOCOMPOSITE FILMS

Method and apparatus to help promote contact of gas with vaporized material

Gas supply method using a gas supply system

Safe liquid source containers

Method of manufacturing p-type nitride semiconductor and semiconductor device fabricated by the method

Liquid material vaporizer

Process for depositing layers containing silicon and germanium

Chemical vaporizer for material deposition systems and associated methods

Vaporizer for delivery of low vapor pressure gases

Method and apparatus for providing precursor gas to a processing chamber

Substrate processing system

Vaporizing apparatus and semiconductor processing system

Method for Depositing in Particular Metal Oxides by Means of Discontinuous Precursor Injection

Method for controlling the sublimation of reactants

Device For Providing Vapors Of A Solid Precursor To A Processing Device

Bubbler for the transportation of substances by a carrier gas

System and method for simulated dosimetry using a real time locating system

Method for pre-conditioning a precursor vaporization system for a vapor deposition process

Method for performing a vapor deposition process

Method and apparatus for reducing substrate temperature variability

Method for heating a substrate prior to a vapor deposition process

Chemical precursor ampoule for vapor deposition processes

Methods for forming a ruthenium-based film on a substrate

Dispenser For Carburetor, Carburetor For Mocvd Using the Dispenser For Carburetor, and Carrier Gas Vaporizing Method

Ampule tray for and method of precursor surface area

System For Delivery Of Reagents From Solid Sources Thereof

DELIVERY OF SOLID CHEMICAL PRECURSORS

Apparatus For Forming Thin Film

Ampoule with a thermally conductive coating

Self assembled controlled luminescent transparent conductive photonic crystals for light emitting devices

METHOD AND SYSTEM FOR CONTROLLING A VAPOR DELIVERY SYSTEM

APPARATUS OF SUPPLYING ORGANOMETALLIC COMPOUND

Method of vaporizing solid organometallic compound

Ampoule for liquid draw and vapor draw with a continuous level sensor

Solid source container with inlet plenum

Precursor delivery system

Method and apparatus to help promote contact of gas with vaporized material

RATE CONTROL PROCESS FOR A PRECURSOR DELIVERY SYSTEM

Chemical delivery apparatus for CVD or ALD

Method and apparatus to help promote contact of gas with vaporized material

METHOD, APPARATUS AND STARTING MATERIAL FOR PROVIDING A GASEOUS PRECURSOR

Delivery device

Liquid Amount Monitoring Apparatus, Semiconductor Manufacturing Apparatus Having the Liquid Amount Monitoring Apparatus Mounted Thereon, and Liquid Material/Liquid Amount Monitoring Method

Chemical delivery apparatus for CVD or ALD

Method for reducing carbon monoxide poisoning in a thin film deposition system

Method and integrated system for purifying and delivering a metal carbonyl precursor

Bubbler for constant vapor delivery of a solid chemical

Method and apparatus for reducing particle formation in a vapor distribution system

Method and apparatus for reducing particle contamination in a deposition system

Gasification monitor, method for detecting mist, film forming method and film forming apparatus

Vaporizer with Integral Diaphragm

DIRECT LIQUID INJECTOR DEVICE

Method for forming dielectric or metallic films

Method for packing solid organometallic compound and packed container

Safe liquid source containers

Deposition from liquid sources

Gas supply system and processing system

Evaporator featuring annular ridge member provided on side wall surface of evaporating chamber

Chemical vapour deposition apparatus

High stability and high capacity precursor vapor generation for thin film deposition

METHOD AND SYSTEM FOR DEPOSITING MATERIAL ON A SUBSTRATE USING A SOLID PRECURSOR

Method and apparatus for providing precursor gas to a processing chamber

Layer forming method, layer forming apparatus, workpiece processing apparatus, interconnect forming method, and substrate interconnect structure

Method for providing gas to a processing chamber

Method and apparatus for generating a precursor for a semiconductor processing system

Methods of operating a liquid vaporizer

Vaporizer for atomic layer deposition system

Method for thin film deposition using multi-tray film precursor evaporation system

Methods and apparatus for vapor processing of micro-device workpieces

Process for the self-limiting deposition of one or more monolayers

Vaporizer

Vaporizer, various devices using the same, and vaporizing method

Method of Depositing CVD Thin Film

Solid source precursor delivery system

Apparatus and method for generating a chemical precursor

Process and apparatus for depositing single-component or multi-component layers and layer sequences using discontinuous injection of liquid and dissolved starting substances via a multi-channel injection unit

Method of producing esthetically pleasing ornaments from bone components

Method and system for depositing a layer from light-induced vaporization of a solid precursor

Method and system for refurbishing a metal carbonyl precursor

Method for saturating a carrier gas with precursor vapor

Method for precursor delivery

Method and system for depositing material on a substrate using a solid precursor

Solid precursor vaporization system for use in chemical vapor deposition

Sublimation bed employing carrier gas guidance structures

Method for forming a ruthenium metal layer on a patterned substrate

Apparatus for the deposition of high dielectric constant films

Film precursor tray for use in a film precursor evaporation system and method of using

Film precursor evaporation system and method of using

Method and system for improved delivery of a precursor vapor to a processing zone

Evaporation method and evaporator

Vaporizer for cvd, solution voporizing cvd system and voporization method for cvd

Delivery of solid chemical precursors

High accuracy vapor generation and delivery for thin film deposition

Apparatus and method for delivering vapor phase reagent to a deposition chamber

Delivery device

Method for preparing solid precursor tray for use in solid precursor evaporation system

Method and system for performing in-situ cleaning of a deposition system

Method and system for measuring a flow rate in a solid precursor delivery system

Method and apparatus for depositing LED organic film

Replaceable precursor tray for use in a multi-tray solid precursor delivery system

Multi-tray film precursor evaporation system and thin film deposition system incorporating same

Direct liquid injection system and method for forming multi-component dielectric films

Reducing variability in delivery rates of solid state precursors

Apparatus for depositing thin film on wafer

Novel deposition of high-k MSiON dielectric films

Precursor gas delivery with carrier gas mixing

Deposition from liquid sources

Delivery system

Vaporizer, various apparatuses including the same and method of vaporization

Film forming apparatus and film forming method

Apparatus and method for depositing a material on a substrate

System for controlling the sublimation of reactants

Delivery systems for efficient vaporization of precursor source material

Apparatus for providing gas to a processing chamber

Apparatuses and methods for producing chemically reactive vapors used in manufacturing microelectronic devices

Chemical vapor deposition (CVD) apparatus usable in the manufacture of superconducting conductors

Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers

Method for novel deposition of high-k MSiON dielectric films

Method and apparatus of generating PDMAT precursor

Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases

Method and system for selecting speech or DTMF interfaces or a mixture of both

Solid source precursor delivery system

Deposition apparatus and related methods including a pulse fluid supplier having a buffer

Delivery of solid chemical precursors

Processing device and method of maintaining the device

Precursor delivery system with rate control

Sublimation bed employing carrier gas guidance structures

Method and apparatus for preparing vaporized reactants for chemical vapor deposition

Safe liquid source containers

Method and vessel for the delivery of precursor materials

Source gas delivery

Delivery systems for efficient vaporization of precursor source material

Methods of operating a liquid vaporizer

Gasification monitor, method for detecting mist, film forming method and film forming apparatus

Solid organometallic compound-filled container and filling method thereof

Method and apparatus to help promote contact of gas with vaporized material

Method and apparatus for vaporizing and delivering reactant

Gas supplying apparatus for atomic layer deposition

Methods and apparatus for depositing a thin film on a substrate

System and method for volatilizing organic compounds