120207 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
APPARATUS AND PROCESS FOR APPLYING A COATING COMPOSITION TO A SUBSTRATE BY SPRAYING
#2CO-JET NOZZLE ASSEMBLY AND ANOMALY DETECTION
#3METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, SUSCEPTOR, AND a-GALLIUM OXIDE FILM
#4METHOD FOR ELECTROCHEMICAL WATER SPLITTING
#5METHOD FOR MAKING AN ELECTRODE
#6METHOD FOR MANUFACTURING GLASS PLATE INCLUDING FUNCTIONAL LAYER AND FUNCTIONAL LAYER FORMING DEVICE
#7ELECTROCHEMICAL WATER SPLITTING WITH A NIVOX CATALYST
#8FILM FORMING METHOD AND FILM FORMING APPARATUS
#9FILM FORMING APPARATUS AND FILM FORMING METHOD
#10RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COMPOUND, AND CHEMICAL DEPOSITION METHOD FOR RUTHENIUM THIN FILM OR RUTHENIUM COMPOUND THIN FILM
#11FILM FORMING APPARATUS AND FILM FORMING METHOD, AND OXIDE SEMICONDUCTOR FILM AND LAMINATE
#12NICKEL-IRON-OXIDE THIN FILMS AS AN ELECTROCATALYST FOR WATER OXIDATION
#13FILM-FORMING APPARATUS AND MANUFACTURING METHOD
#14FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE FILM
#15VANADIUM OXIDE-BASED ELECTRODE FOR ELECTROCHEMICAL WATER SPLITTING AND METHOD OF PREPARATION THEREOF
#16Heat-dissipating circuit board, heat-dissipating member, and production method for heat-dissipating circuit board
#17LAMINATED STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING CRYSTALLINE OXIDE FILM
#18FILM FORMING APPARATUS AND METHOD OF FORMING CRYSTALLINE SEMICONDUCTOR FILM USING THE SAME
#19OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICONDUCTOR APPARATUS
#20METHOD FOR PRODUCING LAMINATE, PRODUCING APPARATUS FOR LAMINATE, LAMINATE, AND SEMICONDUCTOR DEVICE
#21MIST CVD FILM FORMATION DEVICE AND FILM FORMATION METHOD
#22OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICONDUCTOR APPARATUS
#23Electrocatalyst with a NiMoO4 layer with nanoflower morphology
#24METHOD OF PRODUCING RAW MATERIAL SOLUTION, METHOD OF FILM-FORMING AND PRODUCTION LOT
#25METHOD FOR FORMING FILM, FILM-FORMING APPARATUS, AND LAMINATE
#26Method for producing gallium precursor and method for producing laminated body using the same
#27RAW MATERIAL FOR CHEMICAL DEPOSITION CONTAINING ORGANORUTHENIUM COMPOUND, AND CHEMICAL DEPOSITION METHOD FOR RUTHENIUM THIN FILM OR RUTHENIUM COMPOUND THIN FILM
#28AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION METHOD AND NiVOx MATERIAL FOR ELECTROCHEMICAL WATER OXIDATION
#29Flow control method using plasma system
#30AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION OF NICKEL SULFIDE NANOWIRES FOR ELECTROCHEMICAL WATER OXIDATION
#31DEVICE FOR DIFFUSING A PRECURSOR WITH A CONTAINER HAVING AT LEAST ONE POROUS ELEMENT ALLOWING THE GENERATION OF AN AEROSOL TOWARDS A GROWTH SURFACE
#32METAL OXIDE WITH LOW TEMPERATURE FLUORINATION
#33METHOD FOR PRODUCING A GALLIUM OXIDE SEMICONDUCTOR FILM AND A FILM FORMING APPARATUS
#34METHOD FOR PRODUCING DOPING RAW-MATERIAL SOLUTION FOR FILM FORMATION, METHOD FOR PRODUCING LAMINATE, DOPING RAW-MATERIAL SOLUTION FOR FILM FORMATION, AND SEMICONDUCTOR FILM
#35GALLIUM NITRIDE PARTICLES AND METHOD FOR PRODUCING SAME
#36Process of Manufacture a Nuclear Component with Metal Substrate by Dlimocvd and Method against Oxidation/Hydriding of Nuclear Component
#37FILM FORMATION APPARATUS AND METHOD OF USING THE SAME
#38METHOD FOR PRODUCING LIQUID TRANSPORT APPARATUS
#39LIQUID PRECURSOR INJECTION FOR THIN FILM DEPOSITION
#40Method for making a PD-coated electrode
#41APPARATUS AND METHODS TO REDUCE PARTICLES IN A FILM DEPOSITION CHAMBER
#42Method for making a CaTiO composite thin film electrode for water splitting
#43FILM FORMATION APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#44Electrochemical water splitting cell
#45Coating Having Solar Control Properties for a Substrate, and Method and System for Depositing Said Coating on the Substrate
#46PLASMA JET DEPOSITION PROCESS
#47ATOMIZING APPARATUS FOR FILM FORMATION, FILM FORMING APPARATUS USING THE SAME, AND SEMICONDUCTOR FILM
#48HOMOGENEOUS CERIUM OXIDE-TITANIUM OXIDE COMPOSITE THIN FILM
#49CERIUM OXIDE-TITANIUM OXIDE COMPOSITE THIN FILM ELECTRODE
#50Method for forming palladium thin film on glass substrate
#51Aerosol assisted deposition process for forming palladium thin film electrode
#52Antimicrobial and/or antiviral polymer surfaces and methods for the preparation thereof
#53Vapor delivery device, methods of manufacture and methods of use thereof
#54Carbon-nanotube-based composite coating and production method thereof
#55Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device
#56Vaporizer and method for manufacture thereof
#57Liquid precursor injection for thin film deposition
#58VAPORIZING APPARATUS FOR THIN FILM DEPOSITION
#59NUCLEAR COMPONENT WITH METASTABLE CR COATING, DLI-MOCVD METHOD FOR PRODUCING SAME, AND USES FOR CONTROLLING OXIDATION/HYDRIDATION
#60APPARATUS AND METHODS TO REDUCE PARTICLES IN A FILM DEPOSITION CHAMBER
#61FILM FORMING APPARATUS
#62Nuclear reactor component having a coating of amorphous chromium carbide
#63Carbon nanotube preparation system
#64FILM FORMING METHOD AND FILM FORMING APPARATUS
#65Aerosol assisted chemical vapor deposition methods useful for making dye-sensitized solar cells with platinum dialkyldithiocarbamate complexes
#66Fabrication of photoactive CaTiO3—TiO2 composite thin film electrodes via single step AACVD
#67Fabrication, characterization and photoelectrochemical properties of CeO-TiOthin film electrodes
#68Vapor delivery device, methods of manufacture and methods of use thereof
#69Fabrication of nanostructured palladium thin film for electrochemical detection of hydrazine
#70Cobalt oxide film upon electron sink
#71Nuclear component with metastable Cr coating, DLI-MOCVD method for producing same, and uses for controlling oxidation/hydridation
#72Coating having solar control properties for a substrate, and method and system for depositing said coating on the substrate
#73AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS
#74Method for depositing a coating by DLI-MOCVD with direct recycling of the precursor compound
#75Method of using DLI-MOCVD to provide a nuclear reactor component with a coating of amorphous chromium carbide
#76Process of manufacture a nuclear component with metal substrate by DLI-MOCVD and method against oxidation/hydriding of nuclear component
#77DEVICE FOR PERFORMING ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT LOW TEMPERATURE
#78Film forming method, method of manufacturing semiconductor device, and film forming device
#79METHOD OF FORMING ORGANIC FILM
#80METHOD OF SURFACE TREATMENT
#81P-type oxide semiconductor and method for manufacturing same
#82Thermal barrier coating, turbine member, and gas turbine
#83FILM DEPOSITION APPARATUS
#84Method of forming film
#85System and methods for deposition spray of particulate coatings
#86Vapor delivery device, methods of manufacture and methods of use thereof
#87Layered structure, semiconductor device including layered structure, and semiconductor system including semiconductor device
#88Process for the generation of thin inorganic films
#89METHOD FOR DEPOSITING A COATING BY DLI-MOCVD WITH DIRECT RECYCLING OF THE PRECURSOR COMPOUND
#90Selective Deposition And Etching Of Metal Pillars Using AACVD And An Electrical Bias
#91Depositing ruthenium layers in interconnect metallization
#92Aerosol Assisted CVD For Industrial Coatings
#93Flowable gapfill using solvents
#94Apparatus and method of manufacturing display apparatus
#95Multilayer structure and method of forming the same
#96Method and apparatus for preparing boron nitride nanotubes by heat treating boron precursor prepared by using air-jet
#97Metal oxide film formation method
#98Ceramic composite and production method thereof
#99Apparatus and method for generating a vapor for a CVD or PVD device
#100Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer
#101PLASMA RESISTANT COATING FILM AND FABRICATING METHOD THEREOF
#102Apparatus and method for vapor generation and film deposition
#103System and methods for deposition spray of particulate coatings
#104Derivatization apparatus and method
#105Method for forming aluminum oxide/carbon nanotubes by ultrasonic atomization and chemical vapor deposition
#106Film forming apparatus
#107Process for making low-resistivity CVC
#108Method for producing piezoelectric actuator and method for producing liquid transport apparatus
#109Low vapor pressure aerosol-assisted CVD
#110Low vapor pressure aerosol-assisted CVD
#111Apparatus and method for vapor generation and film deposition
#112SYNTHESIS OF SI-BASED NANO-MATERIALS USING LIQUID SILANES
#113APPARATUS AND METHOD FOR FORMING FILM
#114INJECTION NOZZLE FOR AEROSOLS AND THEIR METHOD OF USE TO DEPOSIT DIFFERENT COATINGS VIA VAPOR CHEMICAL DEPOSITION ASSISTED BY AEROSOL
#115System for manufacturing graphene on a substrate
#116Vapor delivery device, methods of manufacture and methods of use thereof
#117Methods of vapor deposition with multiple vapor sources
#118Coating having solar control properties for a substrate, and method and system for depositing said coating on the substrate
#119Synthesis of silicon containing materials using liquid hydrosilane compositions through direct injection
#120Method of forming metal film
#121FILM FORMATION METHOD
#122Film-forming apparatus to form a film on a substrate
#123INTEGRATED MULTI-HEADED ATOMIZER AND VAPORIZATION SYSTEM AND METHOD
#124FILM-FORMING APPARATUS AND FILM-FORMING METHOD
#125ENHANCING THE ADHESION OR ATTACHMENT OF CARBON NANOTUBES TO THE SURFACE OF A MATERIAL VIA A CARBON LAYER
#126Biosensor systems and related methods for detecting analytes in aqueous and biological environments
#127Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium
#128Oxide film deposition method and oxide film deposition device
#129Method for supplying vaporized precursor
#130Semiconductor processing system including vaporizer and method for using same
#131Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device
#132Vapor delivery device, methods of manufacture and methods of use thereof
#133Process for deposition and characterization of a coating
#134Fine droplet atomization for liquid precursor vaporization
#135Evaporation method and film deposition method
#136Film formation device
#137Multiple vapor sources for vapor deposition
#138COATING METHOD AND APPARATUS
#139Direct liquid injection for halide vapor phase epitaxy systems and methods
#140Method of coating surface of inorganic powder particles with silicon-carbon composite and inorganic powder particles coated by the same
#141ATMOSPHERIC FILM-COATING METHOD
#142ATMOSPHERIC FILM-COATING DEVICE AND FILM-MANUFACTURING APPARATUS
#143Process for controlling coating deposition
#144COMPOSITIONS AND METHODS OF USE FOR FORMING TITANIUM-CONTAINING THIN FILMS
#145FILM DEPOSITION SYSTEM AND METHOD AND GAS SUPPLYING APPARATUS BEING USED THEREIN
#146Method and apparatus for coating glass substrate
#147METHODS AND SYSTEMS FOR SPRAY PYROLYSIS WITH ADDITION OF VOLATILE NON-POLAR MATERIALS
#148Method for forming metal oxide film, metal oxide film, and apparatus for forming metal oxide film
#149COATING APPRATUS HAVING CONCENTRATION SENSOR
#150VAPORIZING OR ATOMIZING OF ELECTRICALLY CHARGED DROPLETS
#151Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same
#152Fine droplet atomizer for liquid precursor vaporization
#153Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film
#154METHOD FOR DEPOSITING A CARBON NANOTUBE THIN FILM COATING ON AN ARBITRARY SUBSTRATE DIRECTLY FROM CHEMICAL VAPOR DEPOSITION SYNTHESIS
#155Precursor vapor generation and delivery system with filters and filter monitoring system
#156Atmospheric pressure chemical vapor deposition method for producing an-N-semiconductive metal sulfide thin layer
#157LIQUID MATERIAL VAPORIZER AND FILM DEPOSITION APPARATUS USING THE SAME
#158Vaporization apparatus with precise powder metering
#159Organometallic compounds
#160VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPUTER PROGRAM AND STORAGE MEDIUM
#161FILM FORMING APPARATUS AND FILM FORMING METHOD
#162DLI-MOCVD process for making electrodes for electrochemical reactors
#163High accuracy vapor generation and delivery for thin film deposition
#164VAPORIZER, MATERIAL GAS SUPPLY SYSTEM INCLUDING VAPORIZER AND FILM FORMING APPARATUS USING SUCH SYSTEM
#165Method for stable hydrophilicity enhancement of a substrate by atmospheric pressure plasma disposition
#166Vaporizing apparatus and film forming apparatus provided with vaporizing apparatus
#167FILM OR COATING DEPOSITION AND POWDER FORMATION
#168Deposition from liquid sources
#169Process for deposition of non-oxide ceramic coatings
#170Liquid material vaporizer
#171Device for injecting liquid precursors into a chamber in pulsed mode with measurement and control of the flowrate
#172Method for depositing hard metallic coatings
#173VAPORIZER AND FILM FORMING APPARATUS
#174Method for producing piezoelectric actuator and method for producing liquid transport apparatus
#175Semiconductor processing system including vaporizer and method for using same
#176Vaporization apparatus with precise powder metering
#177Device for introducing, injecting or spraying a mixture of a carrier gas and liquid compounds and method for implementing said device
#178Trap device
#179Method for vaporizing liquid material capable of vaporizing liquid material at low temperature and vaporizer using the same
#180Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method
#181Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method
#182Method for atomizing material for coating processes
#183Vaporizer and semiconductor processing system
#184Carburetor, Method of Vaporizing Material Solution, and Method of Washing Carburetor
#185Vaporizer and various devices using the same and an associated vaporizing method
#186Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions
#187DELIVERY OF SOLID CHEMICAL PRECURSORS
#188FILM FORMING SYSTEM AND METHOD FOR FORMING FILM
#189Film forming apparatus and vaporizer
#190System and Method for Forming Multi-Component Films
#191Deposition from liquid sources
#192Vaporizer for cvd, solution-vaporization type cvd apparatus and vaporization method for cvd
#193Vaporizer and semiconductor processing apparatus
#194Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method
#195Vaporizer and semiconductor processing system
#196Method of Depositing CVD Thin Film
#197Novel composition
#198Aerosol misted deposition of low dielectric organosilicate films
#199Gas reaction system and semiconductor processing apparatus
#200Atomisation of a precursor into an excitation medium for coating a remote substrate
#201Semiconductor fabrication equipment and method for controlling pressure
#202Apparatus for supplying gas and apparatus for forming a layer having the same
#203Delivery of solid chemical precursors
#204High accuracy vapor generation and delivery for thin film deposition
#205Controlled flow of source material via droplet evaporation
#206Solution-vaporization type CVD apparatus
#207Vaporizer
#208Deposition from liquid sources
#209Vaporizer, various apparatuses including the same and method of vaporization
#210Method for manufaturing semiconductor device and substrate processing system
#211Thick films of yba
Film forming apparatus
#213Method and system for selecting speech or DTMF interfaces or a mixture of both
#214High-performance vaporizer for liquid-precursor and multi-liquid-precursor vaporization in semiconductor thin film deposition
#215Delivery of solid chemical precursors
#216Metallization of substrate(s) by a liquid/vapor deposition process
#217Variable gas conductance control for a process chamber
#218Chemical vapor deposition and powder formation using thermal spray
#219Substrate temperature control in an ALD reactor
#220NiMoO4 nanoflowers on nickel foam as electrocatalysts for water oxidation
#221NiPd nano-alloy film as a electrocatalyst and methods of preparation thereof
#222Flowable gapfill using solvents
#223Reactor and method for synthesizing metal oxide impregnated carbon nanotubes